NIR micro beam-splitter by saw-dicing of glass substrate for Optical Coherence Tomography

Detalhes bibliográficos
Autor(a) principal: Maciel, Marino Jesus Correia
Data de Publicação: 2015
Outros Autores: Costa, C. G., Peixoto, Alexandre Coumiotis Moreira, Wolffenbuttel, R. F., Correia, J. H.
Idioma: eng
Título da fonte: Repositório Científico de Acesso Aberto de Portugal (Repositórios Cientìficos)
Texto Completo: http://hdl.handle.net/1822/71700
Resumo: This paper reports the fabrication of a near infrared (NIR) micro beam-splitter (MBS) for Optical Coherence Tomography (OCT) applications. The proposed configuration is based on saw-dicing micromachining of glass substrate combined with thin film deposition of a dielectric multilayer. In order to obtain a splitting with horizontal and vertical transmitted/reflected beams, a 45° surface was fabricated with conventional dicing blades. A dielectric multilayer based only in four thin films was optimized for NIR range (800-900 nm) and for a 50/50 non-polarized split ratio. This multilayer is deposited in the 45° micro machined surface. The MBS offers the possibility of wafer-level alignment and assembly, representing the first step towards OCT miniaturization.
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spelling NIR micro beam-splitter by saw-dicing of glass substrate for Optical Coherence TomographyMicro beam-splitterNear infraredOptical Coherence TomographySaw-dicingThin filmEngenharia e Tecnologia::Engenharia Eletrotécnica, Eletrónica e InformáticaScience & TechnologyThis paper reports the fabrication of a near infrared (NIR) micro beam-splitter (MBS) for Optical Coherence Tomography (OCT) applications. The proposed configuration is based on saw-dicing micromachining of glass substrate combined with thin film deposition of a dielectric multilayer. In order to obtain a splitting with horizontal and vertical transmitted/reflected beams, a 45° surface was fabricated with conventional dicing blades. A dielectric multilayer based only in four thin films was optimized for NIR range (800-900 nm) and for a 50/50 non-polarized split ratio. This multilayer is deposited in the 45° micro machined surface. The MBS offers the possibility of wafer-level alignment and assembly, representing the first step towards OCT miniaturization.- (undefined)ElsevierUniversidade do MinhoMaciel, Marino Jesus CorreiaCosta, C. G.Peixoto, Alexandre Coumiotis MoreiraWolffenbuttel, R. F.Correia, J. H.20152015-01-01T00:00:00Zconference paperinfo:eu-repo/semantics/publishedVersionapplication/pdfhttp://hdl.handle.net/1822/71700engMaciel, M. J., Costa, C. G., Peixoto, A. C., Wolffenbuttel, R. F., & Correia, J. H. (2015). NIR Micro Beam-splitter by Saw-dicing of Glass Substrate for Optical Coherence Tomography. Procedia Engineering, 120, 807-810. doi: https://doi.org/10.1016/j.proeng.2015.08.6611877-705810.1016/j.proeng.2015.08.661https://www.sciencedirect.com/science/article/pii/S1877705815023243info:eu-repo/semantics/openAccessreponame:Repositório Científico de Acesso Aberto de Portugal (Repositórios Cientìficos)instname:Agência para a Sociedade do Conhecimento (UMIC) - FCT - Sociedade da Informaçãoinstacron:RCAAP2024-05-11T05:45:50Zoai:repositorium.sdum.uminho.pt:1822/71700Portal AgregadorONGhttps://www.rcaap.pt/oai/openairemluisa.alvim@gmail.comopendoar:71602024-05-11T05:45:50Repositório Científico de Acesso Aberto de Portugal (Repositórios Cientìficos) - Agência para a Sociedade do Conhecimento (UMIC) - FCT - Sociedade da Informaçãofalse
dc.title.none.fl_str_mv NIR micro beam-splitter by saw-dicing of glass substrate for Optical Coherence Tomography
title NIR micro beam-splitter by saw-dicing of glass substrate for Optical Coherence Tomography
spellingShingle NIR micro beam-splitter by saw-dicing of glass substrate for Optical Coherence Tomography
Maciel, Marino Jesus Correia
Micro beam-splitter
Near infrared
Optical Coherence Tomography
Saw-dicing
Thin film
Engenharia e Tecnologia::Engenharia Eletrotécnica, Eletrónica e Informática
Science & Technology
title_short NIR micro beam-splitter by saw-dicing of glass substrate for Optical Coherence Tomography
title_full NIR micro beam-splitter by saw-dicing of glass substrate for Optical Coherence Tomography
title_fullStr NIR micro beam-splitter by saw-dicing of glass substrate for Optical Coherence Tomography
title_full_unstemmed NIR micro beam-splitter by saw-dicing of glass substrate for Optical Coherence Tomography
title_sort NIR micro beam-splitter by saw-dicing of glass substrate for Optical Coherence Tomography
author Maciel, Marino Jesus Correia
author_facet Maciel, Marino Jesus Correia
Costa, C. G.
Peixoto, Alexandre Coumiotis Moreira
Wolffenbuttel, R. F.
Correia, J. H.
author_role author
author2 Costa, C. G.
Peixoto, Alexandre Coumiotis Moreira
Wolffenbuttel, R. F.
Correia, J. H.
author2_role author
author
author
author
dc.contributor.none.fl_str_mv Universidade do Minho
dc.contributor.author.fl_str_mv Maciel, Marino Jesus Correia
Costa, C. G.
Peixoto, Alexandre Coumiotis Moreira
Wolffenbuttel, R. F.
Correia, J. H.
dc.subject.por.fl_str_mv Micro beam-splitter
Near infrared
Optical Coherence Tomography
Saw-dicing
Thin film
Engenharia e Tecnologia::Engenharia Eletrotécnica, Eletrónica e Informática
Science & Technology
topic Micro beam-splitter
Near infrared
Optical Coherence Tomography
Saw-dicing
Thin film
Engenharia e Tecnologia::Engenharia Eletrotécnica, Eletrónica e Informática
Science & Technology
description This paper reports the fabrication of a near infrared (NIR) micro beam-splitter (MBS) for Optical Coherence Tomography (OCT) applications. The proposed configuration is based on saw-dicing micromachining of glass substrate combined with thin film deposition of a dielectric multilayer. In order to obtain a splitting with horizontal and vertical transmitted/reflected beams, a 45° surface was fabricated with conventional dicing blades. A dielectric multilayer based only in four thin films was optimized for NIR range (800-900 nm) and for a 50/50 non-polarized split ratio. This multilayer is deposited in the 45° micro machined surface. The MBS offers the possibility of wafer-level alignment and assembly, representing the first step towards OCT miniaturization.
publishDate 2015
dc.date.none.fl_str_mv 2015
2015-01-01T00:00:00Z
dc.type.driver.fl_str_mv conference paper
dc.type.status.fl_str_mv info:eu-repo/semantics/publishedVersion
status_str publishedVersion
dc.identifier.uri.fl_str_mv http://hdl.handle.net/1822/71700
url http://hdl.handle.net/1822/71700
dc.language.iso.fl_str_mv eng
language eng
dc.relation.none.fl_str_mv Maciel, M. J., Costa, C. G., Peixoto, A. C., Wolffenbuttel, R. F., & Correia, J. H. (2015). NIR Micro Beam-splitter by Saw-dicing of Glass Substrate for Optical Coherence Tomography. Procedia Engineering, 120, 807-810. doi: https://doi.org/10.1016/j.proeng.2015.08.661
1877-7058
10.1016/j.proeng.2015.08.661
https://www.sciencedirect.com/science/article/pii/S1877705815023243
dc.rights.driver.fl_str_mv info:eu-repo/semantics/openAccess
eu_rights_str_mv openAccess
dc.format.none.fl_str_mv application/pdf
dc.publisher.none.fl_str_mv Elsevier
publisher.none.fl_str_mv Elsevier
dc.source.none.fl_str_mv reponame:Repositório Científico de Acesso Aberto de Portugal (Repositórios Cientìficos)
instname:Agência para a Sociedade do Conhecimento (UMIC) - FCT - Sociedade da Informação
instacron:RCAAP
instname_str Agência para a Sociedade do Conhecimento (UMIC) - FCT - Sociedade da Informação
instacron_str RCAAP
institution RCAAP
reponame_str Repositório Científico de Acesso Aberto de Portugal (Repositórios Cientìficos)
collection Repositório Científico de Acesso Aberto de Portugal (Repositórios Cientìficos)
repository.name.fl_str_mv Repositório Científico de Acesso Aberto de Portugal (Repositórios Cientìficos) - Agência para a Sociedade do Conhecimento (UMIC) - FCT - Sociedade da Informação
repository.mail.fl_str_mv mluisa.alvim@gmail.com
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