Atomic environment and interfacial structural order of TiAlN/Mo multilayers

Detalhes bibliográficos
Autor(a) principal: Tavares, C. J.
Data de Publicação: 2004
Outros Autores: Rebouta, L., Rivière, J. P., Girardeau, T., Goudeau, Ph., Alves, E., Barradas, N. P.
Tipo de documento: Artigo
Idioma: eng
Título da fonte: Repositório Científico de Acesso Aberto de Portugal (Repositórios Cientìficos)
Texto Completo: http://hdl.handle.net/1822/4643
Resumo: Multilayered TiAlN/Mo coatings were deposited by dc reactive magnetron sputtering in a custom-made chamber. In order to assess the composition of these coatings, a combined study of Extended X-ray Absorption Fine Structure (EXAFS) and Rutherford Backscattering Spectrometry (RBS) experiments were performed. Through the simulation of the EXAFS spectra, giving the local environment of the titanium atoms inside the nitride (TiAlN), a cubic phase has been evidenced with aluminium atoms occupying titanium sites. For modulation periods in the range of 3.6–11.8 nm, RBS simulations on these multilayers also enabled the determination of the level of intermixing that occurs at the interfaces as a function of the negative bias voltage and number of layers. It was observed that the intermixing width could be as high as 2.1 nm for the roughest samples (larger periods) or as low as 0.4 nm for those with the sharpest interfaces (smaller periods).
id RCAP_c0479eeee1491fa7604e2f1dc456feec
oai_identifier_str oai:repositorium.sdum.uminho.pt:1822/4643
network_acronym_str RCAP
network_name_str Repositório Científico de Acesso Aberto de Portugal (Repositórios Cientìficos)
repository_id_str 7160
spelling Atomic environment and interfacial structural order of TiAlN/Mo multilayersMultilayersEXAFSRBSRoughnessAtomin environmentsimulationsmultilaversatomic environmentScience & TechnologyMultilayered TiAlN/Mo coatings were deposited by dc reactive magnetron sputtering in a custom-made chamber. In order to assess the composition of these coatings, a combined study of Extended X-ray Absorption Fine Structure (EXAFS) and Rutherford Backscattering Spectrometry (RBS) experiments were performed. Through the simulation of the EXAFS spectra, giving the local environment of the titanium atoms inside the nitride (TiAlN), a cubic phase has been evidenced with aluminium atoms occupying titanium sites. For modulation periods in the range of 3.6–11.8 nm, RBS simulations on these multilayers also enabled the determination of the level of intermixing that occurs at the interfaces as a function of the negative bias voltage and number of layers. It was observed that the intermixing width could be as high as 2.1 nm for the roughest samples (larger periods) or as low as 0.4 nm for those with the sharpest interfaces (smaller periods).Comunidade Europeia (CE). Fundo Europeu de Desenvolvimento Regional (FEDER) -Ministério da Ciência e Tecnologia.Cooperação Científica e Tecnológica Internacional (ICCTI) - Ambassade de France in Portugal - Project no. 543 B3/2001.Fundação para a Ciência e a Tecnologia (FCT) - Programa Operacional “Ciência, Tecnologia, Inovação - POCTI/32670/CTM/2000.ElsevierUniversidade do MinhoTavares, C. J.Rebouta, L.Rivière, J. P.Girardeau, T.Goudeau, Ph.Alves, E.Barradas, N. P.2004-07-282004-07-28T00:00:00Zinfo:eu-repo/semantics/publishedVersioninfo:eu-repo/semantics/articleapplication/pdfhttp://hdl.handle.net/1822/4643eng"Surface & Coatings Technology". ISSN 0257-8972. 187 (2004) 393-398.0257-897210.1016/j.surfcoat.2004.03.052http://www.elsevier.com/wps/find/journaldescription.cws_home/504101/description#descriptioninfo:eu-repo/semantics/openAccessreponame:Repositório Científico de Acesso Aberto de Portugal (Repositórios Cientìficos)instname:Agência para a Sociedade do Conhecimento (UMIC) - FCT - Sociedade da Informaçãoinstacron:RCAAP2023-07-21T12:49:11Zoai:repositorium.sdum.uminho.pt:1822/4643Portal AgregadorONGhttps://www.rcaap.pt/oai/openaireopendoar:71602024-03-19T19:47:36.763490Repositório Científico de Acesso Aberto de Portugal (Repositórios Cientìficos) - Agência para a Sociedade do Conhecimento (UMIC) - FCT - Sociedade da Informaçãofalse
dc.title.none.fl_str_mv Atomic environment and interfacial structural order of TiAlN/Mo multilayers
title Atomic environment and interfacial structural order of TiAlN/Mo multilayers
spellingShingle Atomic environment and interfacial structural order of TiAlN/Mo multilayers
Tavares, C. J.
Multilayers
EXAFS
RBS
Roughness
Atomin environment
simulations
multilavers
atomic environment
Science & Technology
title_short Atomic environment and interfacial structural order of TiAlN/Mo multilayers
title_full Atomic environment and interfacial structural order of TiAlN/Mo multilayers
title_fullStr Atomic environment and interfacial structural order of TiAlN/Mo multilayers
title_full_unstemmed Atomic environment and interfacial structural order of TiAlN/Mo multilayers
title_sort Atomic environment and interfacial structural order of TiAlN/Mo multilayers
author Tavares, C. J.
author_facet Tavares, C. J.
Rebouta, L.
Rivière, J. P.
Girardeau, T.
Goudeau, Ph.
Alves, E.
Barradas, N. P.
author_role author
author2 Rebouta, L.
Rivière, J. P.
Girardeau, T.
Goudeau, Ph.
Alves, E.
Barradas, N. P.
author2_role author
author
author
author
author
author
dc.contributor.none.fl_str_mv Universidade do Minho
dc.contributor.author.fl_str_mv Tavares, C. J.
Rebouta, L.
Rivière, J. P.
Girardeau, T.
Goudeau, Ph.
Alves, E.
Barradas, N. P.
dc.subject.por.fl_str_mv Multilayers
EXAFS
RBS
Roughness
Atomin environment
simulations
multilavers
atomic environment
Science & Technology
topic Multilayers
EXAFS
RBS
Roughness
Atomin environment
simulations
multilavers
atomic environment
Science & Technology
description Multilayered TiAlN/Mo coatings were deposited by dc reactive magnetron sputtering in a custom-made chamber. In order to assess the composition of these coatings, a combined study of Extended X-ray Absorption Fine Structure (EXAFS) and Rutherford Backscattering Spectrometry (RBS) experiments were performed. Through the simulation of the EXAFS spectra, giving the local environment of the titanium atoms inside the nitride (TiAlN), a cubic phase has been evidenced with aluminium atoms occupying titanium sites. For modulation periods in the range of 3.6–11.8 nm, RBS simulations on these multilayers also enabled the determination of the level of intermixing that occurs at the interfaces as a function of the negative bias voltage and number of layers. It was observed that the intermixing width could be as high as 2.1 nm for the roughest samples (larger periods) or as low as 0.4 nm for those with the sharpest interfaces (smaller periods).
publishDate 2004
dc.date.none.fl_str_mv 2004-07-28
2004-07-28T00:00:00Z
dc.type.status.fl_str_mv info:eu-repo/semantics/publishedVersion
dc.type.driver.fl_str_mv info:eu-repo/semantics/article
format article
status_str publishedVersion
dc.identifier.uri.fl_str_mv http://hdl.handle.net/1822/4643
url http://hdl.handle.net/1822/4643
dc.language.iso.fl_str_mv eng
language eng
dc.relation.none.fl_str_mv "Surface & Coatings Technology". ISSN 0257-8972. 187 (2004) 393-398.
0257-8972
10.1016/j.surfcoat.2004.03.052
http://www.elsevier.com/wps/find/journaldescription.cws_home/504101/description#description
dc.rights.driver.fl_str_mv info:eu-repo/semantics/openAccess
eu_rights_str_mv openAccess
dc.format.none.fl_str_mv application/pdf
dc.publisher.none.fl_str_mv Elsevier
publisher.none.fl_str_mv Elsevier
dc.source.none.fl_str_mv reponame:Repositório Científico de Acesso Aberto de Portugal (Repositórios Cientìficos)
instname:Agência para a Sociedade do Conhecimento (UMIC) - FCT - Sociedade da Informação
instacron:RCAAP
instname_str Agência para a Sociedade do Conhecimento (UMIC) - FCT - Sociedade da Informação
instacron_str RCAAP
institution RCAAP
reponame_str Repositório Científico de Acesso Aberto de Portugal (Repositórios Cientìficos)
collection Repositório Científico de Acesso Aberto de Portugal (Repositórios Cientìficos)
repository.name.fl_str_mv Repositório Científico de Acesso Aberto de Portugal (Repositórios Cientìficos) - Agência para a Sociedade do Conhecimento (UMIC) - FCT - Sociedade da Informação
repository.mail.fl_str_mv
_version_ 1799133050735427584