Atomic environment and interfacial structural order of TiAlN/Mo multilayers
Autor(a) principal: | |
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Data de Publicação: | 2004 |
Outros Autores: | , , , , , |
Tipo de documento: | Artigo |
Idioma: | eng |
Título da fonte: | Repositório Científico de Acesso Aberto de Portugal (Repositórios Cientìficos) |
Texto Completo: | http://hdl.handle.net/1822/4643 |
Resumo: | Multilayered TiAlN/Mo coatings were deposited by dc reactive magnetron sputtering in a custom-made chamber. In order to assess the composition of these coatings, a combined study of Extended X-ray Absorption Fine Structure (EXAFS) and Rutherford Backscattering Spectrometry (RBS) experiments were performed. Through the simulation of the EXAFS spectra, giving the local environment of the titanium atoms inside the nitride (TiAlN), a cubic phase has been evidenced with aluminium atoms occupying titanium sites. For modulation periods in the range of 3.6–11.8 nm, RBS simulations on these multilayers also enabled the determination of the level of intermixing that occurs at the interfaces as a function of the negative bias voltage and number of layers. It was observed that the intermixing width could be as high as 2.1 nm for the roughest samples (larger periods) or as low as 0.4 nm for those with the sharpest interfaces (smaller periods). |
id |
RCAP_c0479eeee1491fa7604e2f1dc456feec |
---|---|
oai_identifier_str |
oai:repositorium.sdum.uminho.pt:1822/4643 |
network_acronym_str |
RCAP |
network_name_str |
Repositório Científico de Acesso Aberto de Portugal (Repositórios Cientìficos) |
repository_id_str |
7160 |
spelling |
Atomic environment and interfacial structural order of TiAlN/Mo multilayersMultilayersEXAFSRBSRoughnessAtomin environmentsimulationsmultilaversatomic environmentScience & TechnologyMultilayered TiAlN/Mo coatings were deposited by dc reactive magnetron sputtering in a custom-made chamber. In order to assess the composition of these coatings, a combined study of Extended X-ray Absorption Fine Structure (EXAFS) and Rutherford Backscattering Spectrometry (RBS) experiments were performed. Through the simulation of the EXAFS spectra, giving the local environment of the titanium atoms inside the nitride (TiAlN), a cubic phase has been evidenced with aluminium atoms occupying titanium sites. For modulation periods in the range of 3.6–11.8 nm, RBS simulations on these multilayers also enabled the determination of the level of intermixing that occurs at the interfaces as a function of the negative bias voltage and number of layers. It was observed that the intermixing width could be as high as 2.1 nm for the roughest samples (larger periods) or as low as 0.4 nm for those with the sharpest interfaces (smaller periods).Comunidade Europeia (CE). Fundo Europeu de Desenvolvimento Regional (FEDER) -Ministério da Ciência e Tecnologia.Cooperação Científica e Tecnológica Internacional (ICCTI) - Ambassade de France in Portugal - Project no. 543 B3/2001.Fundação para a Ciência e a Tecnologia (FCT) - Programa Operacional “Ciência, Tecnologia, Inovação - POCTI/32670/CTM/2000.ElsevierUniversidade do MinhoTavares, C. J.Rebouta, L.Rivière, J. P.Girardeau, T.Goudeau, Ph.Alves, E.Barradas, N. P.2004-07-282004-07-28T00:00:00Zinfo:eu-repo/semantics/publishedVersioninfo:eu-repo/semantics/articleapplication/pdfhttp://hdl.handle.net/1822/4643eng"Surface & Coatings Technology". ISSN 0257-8972. 187 (2004) 393-398.0257-897210.1016/j.surfcoat.2004.03.052http://www.elsevier.com/wps/find/journaldescription.cws_home/504101/description#descriptioninfo:eu-repo/semantics/openAccessreponame:Repositório Científico de Acesso Aberto de Portugal (Repositórios Cientìficos)instname:Agência para a Sociedade do Conhecimento (UMIC) - FCT - Sociedade da Informaçãoinstacron:RCAAP2023-07-21T12:49:11Zoai:repositorium.sdum.uminho.pt:1822/4643Portal AgregadorONGhttps://www.rcaap.pt/oai/openaireopendoar:71602024-03-19T19:47:36.763490Repositório Científico de Acesso Aberto de Portugal (Repositórios Cientìficos) - Agência para a Sociedade do Conhecimento (UMIC) - FCT - Sociedade da Informaçãofalse |
dc.title.none.fl_str_mv |
Atomic environment and interfacial structural order of TiAlN/Mo multilayers |
title |
Atomic environment and interfacial structural order of TiAlN/Mo multilayers |
spellingShingle |
Atomic environment and interfacial structural order of TiAlN/Mo multilayers Tavares, C. J. Multilayers EXAFS RBS Roughness Atomin environment simulations multilavers atomic environment Science & Technology |
title_short |
Atomic environment and interfacial structural order of TiAlN/Mo multilayers |
title_full |
Atomic environment and interfacial structural order of TiAlN/Mo multilayers |
title_fullStr |
Atomic environment and interfacial structural order of TiAlN/Mo multilayers |
title_full_unstemmed |
Atomic environment and interfacial structural order of TiAlN/Mo multilayers |
title_sort |
Atomic environment and interfacial structural order of TiAlN/Mo multilayers |
author |
Tavares, C. J. |
author_facet |
Tavares, C. J. Rebouta, L. Rivière, J. P. Girardeau, T. Goudeau, Ph. Alves, E. Barradas, N. P. |
author_role |
author |
author2 |
Rebouta, L. Rivière, J. P. Girardeau, T. Goudeau, Ph. Alves, E. Barradas, N. P. |
author2_role |
author author author author author author |
dc.contributor.none.fl_str_mv |
Universidade do Minho |
dc.contributor.author.fl_str_mv |
Tavares, C. J. Rebouta, L. Rivière, J. P. Girardeau, T. Goudeau, Ph. Alves, E. Barradas, N. P. |
dc.subject.por.fl_str_mv |
Multilayers EXAFS RBS Roughness Atomin environment simulations multilavers atomic environment Science & Technology |
topic |
Multilayers EXAFS RBS Roughness Atomin environment simulations multilavers atomic environment Science & Technology |
description |
Multilayered TiAlN/Mo coatings were deposited by dc reactive magnetron sputtering in a custom-made chamber. In order to assess the composition of these coatings, a combined study of Extended X-ray Absorption Fine Structure (EXAFS) and Rutherford Backscattering Spectrometry (RBS) experiments were performed. Through the simulation of the EXAFS spectra, giving the local environment of the titanium atoms inside the nitride (TiAlN), a cubic phase has been evidenced with aluminium atoms occupying titanium sites. For modulation periods in the range of 3.6–11.8 nm, RBS simulations on these multilayers also enabled the determination of the level of intermixing that occurs at the interfaces as a function of the negative bias voltage and number of layers. It was observed that the intermixing width could be as high as 2.1 nm for the roughest samples (larger periods) or as low as 0.4 nm for those with the sharpest interfaces (smaller periods). |
publishDate |
2004 |
dc.date.none.fl_str_mv |
2004-07-28 2004-07-28T00:00:00Z |
dc.type.status.fl_str_mv |
info:eu-repo/semantics/publishedVersion |
dc.type.driver.fl_str_mv |
info:eu-repo/semantics/article |
format |
article |
status_str |
publishedVersion |
dc.identifier.uri.fl_str_mv |
http://hdl.handle.net/1822/4643 |
url |
http://hdl.handle.net/1822/4643 |
dc.language.iso.fl_str_mv |
eng |
language |
eng |
dc.relation.none.fl_str_mv |
"Surface & Coatings Technology". ISSN 0257-8972. 187 (2004) 393-398. 0257-8972 10.1016/j.surfcoat.2004.03.052 http://www.elsevier.com/wps/find/journaldescription.cws_home/504101/description#description |
dc.rights.driver.fl_str_mv |
info:eu-repo/semantics/openAccess |
eu_rights_str_mv |
openAccess |
dc.format.none.fl_str_mv |
application/pdf |
dc.publisher.none.fl_str_mv |
Elsevier |
publisher.none.fl_str_mv |
Elsevier |
dc.source.none.fl_str_mv |
reponame:Repositório Científico de Acesso Aberto de Portugal (Repositórios Cientìficos) instname:Agência para a Sociedade do Conhecimento (UMIC) - FCT - Sociedade da Informação instacron:RCAAP |
instname_str |
Agência para a Sociedade do Conhecimento (UMIC) - FCT - Sociedade da Informação |
instacron_str |
RCAAP |
institution |
RCAAP |
reponame_str |
Repositório Científico de Acesso Aberto de Portugal (Repositórios Cientìficos) |
collection |
Repositório Científico de Acesso Aberto de Portugal (Repositórios Cientìficos) |
repository.name.fl_str_mv |
Repositório Científico de Acesso Aberto de Portugal (Repositórios Cientìficos) - Agência para a Sociedade do Conhecimento (UMIC) - FCT - Sociedade da Informação |
repository.mail.fl_str_mv |
|
_version_ |
1799133050735427584 |