Auto-calibrated capacitive MEMS accelerometer

Detalhes bibliográficos
Autor(a) principal: L. A. Rocha
Data de Publicação: 2008
Outros Autores: Lukas Mol, Edmond Cretu, Reinoud F. Wolffenbuttel, José Machado da Silva
Tipo de documento: Livro
Idioma: eng
Título da fonte: Repositório Científico de Acesso Aberto de Portugal (Repositórios Cientìficos)
Texto Completo: https://hdl.handle.net/10216/71536
Resumo: An electronic calibration technique for capacitive MEMS accelerometers based on the measurement of pull-in voltages is described. A combination of pull-in voltages and resonance frequency measurements can be used for the estimation of processinduced variations in device dimensions from layout and deviations in material properties from nominal value, which enables auto-calibration. Measurements on fabricated devices confirm the validity of the proposed technique and electronic calibration is experimentally demonstrated.
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spelling Auto-calibrated capacitive MEMS accelerometerOutras ciências da engenharia e tecnologiasOther engineering and technologiesAn electronic calibration technique for capacitive MEMS accelerometers based on the measurement of pull-in voltages is described. A combination of pull-in voltages and resonance frequency measurements can be used for the estimation of processinduced variations in device dimensions from layout and deviations in material properties from nominal value, which enables auto-calibration. Measurements on fabricated devices confirm the validity of the proposed technique and electronic calibration is experimentally demonstrated.20082008-01-01T00:00:00Zinfo:eu-repo/semantics/publishedVersioninfo:eu-repo/semantics/bookapplication/pdfhttps://hdl.handle.net/10216/71536engL. A. RochaLukas MolEdmond CretuReinoud F. WolffenbuttelJosé Machado da Silvainfo:eu-repo/semantics/openAccessreponame:Repositório Científico de Acesso Aberto de Portugal (Repositórios Cientìficos)instname:Agência para a Sociedade do Conhecimento (UMIC) - FCT - Sociedade da Informaçãoinstacron:RCAAP2023-11-29T13:27:20Zoai:repositorio-aberto.up.pt:10216/71536Portal AgregadorONGhttps://www.rcaap.pt/oai/openaireopendoar:71602024-03-19T23:40:51.496654Repositório Científico de Acesso Aberto de Portugal (Repositórios Cientìficos) - Agência para a Sociedade do Conhecimento (UMIC) - FCT - Sociedade da Informaçãofalse
dc.title.none.fl_str_mv Auto-calibrated capacitive MEMS accelerometer
title Auto-calibrated capacitive MEMS accelerometer
spellingShingle Auto-calibrated capacitive MEMS accelerometer
L. A. Rocha
Outras ciências da engenharia e tecnologias
Other engineering and technologies
title_short Auto-calibrated capacitive MEMS accelerometer
title_full Auto-calibrated capacitive MEMS accelerometer
title_fullStr Auto-calibrated capacitive MEMS accelerometer
title_full_unstemmed Auto-calibrated capacitive MEMS accelerometer
title_sort Auto-calibrated capacitive MEMS accelerometer
author L. A. Rocha
author_facet L. A. Rocha
Lukas Mol
Edmond Cretu
Reinoud F. Wolffenbuttel
José Machado da Silva
author_role author
author2 Lukas Mol
Edmond Cretu
Reinoud F. Wolffenbuttel
José Machado da Silva
author2_role author
author
author
author
dc.contributor.author.fl_str_mv L. A. Rocha
Lukas Mol
Edmond Cretu
Reinoud F. Wolffenbuttel
José Machado da Silva
dc.subject.por.fl_str_mv Outras ciências da engenharia e tecnologias
Other engineering and technologies
topic Outras ciências da engenharia e tecnologias
Other engineering and technologies
description An electronic calibration technique for capacitive MEMS accelerometers based on the measurement of pull-in voltages is described. A combination of pull-in voltages and resonance frequency measurements can be used for the estimation of processinduced variations in device dimensions from layout and deviations in material properties from nominal value, which enables auto-calibration. Measurements on fabricated devices confirm the validity of the proposed technique and electronic calibration is experimentally demonstrated.
publishDate 2008
dc.date.none.fl_str_mv 2008
2008-01-01T00:00:00Z
dc.type.status.fl_str_mv info:eu-repo/semantics/publishedVersion
dc.type.driver.fl_str_mv info:eu-repo/semantics/book
format book
status_str publishedVersion
dc.identifier.uri.fl_str_mv https://hdl.handle.net/10216/71536
url https://hdl.handle.net/10216/71536
dc.language.iso.fl_str_mv eng
language eng
dc.rights.driver.fl_str_mv info:eu-repo/semantics/openAccess
eu_rights_str_mv openAccess
dc.format.none.fl_str_mv application/pdf
dc.source.none.fl_str_mv reponame:Repositório Científico de Acesso Aberto de Portugal (Repositórios Cientìficos)
instname:Agência para a Sociedade do Conhecimento (UMIC) - FCT - Sociedade da Informação
instacron:RCAAP
instname_str Agência para a Sociedade do Conhecimento (UMIC) - FCT - Sociedade da Informação
instacron_str RCAAP
institution RCAAP
reponame_str Repositório Científico de Acesso Aberto de Portugal (Repositórios Cientìficos)
collection Repositório Científico de Acesso Aberto de Portugal (Repositórios Cientìficos)
repository.name.fl_str_mv Repositório Científico de Acesso Aberto de Portugal (Repositórios Cientìficos) - Agência para a Sociedade do Conhecimento (UMIC) - FCT - Sociedade da Informação
repository.mail.fl_str_mv
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