Real-Time Optical Monitoring of Etching Reaction of Microfluidic Channel Fabricated by Femtosecond Laser Direct Writing
Autor(a) principal: | |
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Data de Publicação: | 2017 |
Outros Autores: | , , |
Tipo de documento: | Artigo |
Idioma: | eng |
Título da fonte: | Repositório Científico de Acesso Aberto de Portugal (Repositórios Cientìficos) |
Texto Completo: | http://repositorio.inesctec.pt/handle/123456789/7346 http://dx.doi.org/10.1109/jlt.2017.2678604 |
Resumo: | Femtosecond laser direct writing is a three dimensional fabrication technique that can be applied to produce integrated optical components with high spatial resolution or microfluidic channels when combined with HF etching. The same fabrication technique can thus be employed to produce monolithic optofluidic devices for sensing applications. One of the most common sensing schemes involves evanescent optical interaction; therefore, the channel must meet some requirements regarding surface roughness, which will depend on the laser writing conditions, as described in this paper. However, of more significance is the distance between waveguiding medium and microfluidic channel that must be accurately defined. This control can be achieved by monitoring the etching reaction of a waveguide grating written a few microns from the channel, as introduced in this paper. In addition to its function as an etching monitor, the grating can also be used as a coarse refractive index sensor device. |
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Real-Time Optical Monitoring of Etching Reaction of Microfluidic Channel Fabricated by Femtosecond Laser Direct WritingFemtosecond laser direct writing is a three dimensional fabrication technique that can be applied to produce integrated optical components with high spatial resolution or microfluidic channels when combined with HF etching. The same fabrication technique can thus be employed to produce monolithic optofluidic devices for sensing applications. One of the most common sensing schemes involves evanescent optical interaction; therefore, the channel must meet some requirements regarding surface roughness, which will depend on the laser writing conditions, as described in this paper. However, of more significance is the distance between waveguiding medium and microfluidic channel that must be accurately defined. This control can be achieved by monitoring the etching reaction of a waveguide grating written a few microns from the channel, as introduced in this paper. In addition to its function as an etching monitor, the grating can also be used as a coarse refractive index sensor device.2018-01-25T11:28:37Z2017-01-01T00:00:00Z2017info:eu-repo/semantics/publishedVersioninfo:eu-repo/semantics/articleapplication/pdfhttp://repositorio.inesctec.pt/handle/123456789/7346http://dx.doi.org/10.1109/jlt.2017.2678604engJoão Miguel MaiaVítor Oliveira AmorimDaniel AlexandrePaulo Vicente Marquesinfo:eu-repo/semantics/openAccessreponame:Repositório Científico de Acesso Aberto de Portugal (Repositórios Cientìficos)instname:Agência para a Sociedade do Conhecimento (UMIC) - FCT - Sociedade da Informaçãoinstacron:RCAAP2023-05-15T10:20:03Zoai:repositorio.inesctec.pt:123456789/7346Portal AgregadorONGhttps://www.rcaap.pt/oai/openaireopendoar:71602024-03-19T17:52:36.976534Repositório Científico de Acesso Aberto de Portugal (Repositórios Cientìficos) - Agência para a Sociedade do Conhecimento (UMIC) - FCT - Sociedade da Informaçãofalse |
dc.title.none.fl_str_mv |
Real-Time Optical Monitoring of Etching Reaction of Microfluidic Channel Fabricated by Femtosecond Laser Direct Writing |
title |
Real-Time Optical Monitoring of Etching Reaction of Microfluidic Channel Fabricated by Femtosecond Laser Direct Writing |
spellingShingle |
Real-Time Optical Monitoring of Etching Reaction of Microfluidic Channel Fabricated by Femtosecond Laser Direct Writing João Miguel Maia |
title_short |
Real-Time Optical Monitoring of Etching Reaction of Microfluidic Channel Fabricated by Femtosecond Laser Direct Writing |
title_full |
Real-Time Optical Monitoring of Etching Reaction of Microfluidic Channel Fabricated by Femtosecond Laser Direct Writing |
title_fullStr |
Real-Time Optical Monitoring of Etching Reaction of Microfluidic Channel Fabricated by Femtosecond Laser Direct Writing |
title_full_unstemmed |
Real-Time Optical Monitoring of Etching Reaction of Microfluidic Channel Fabricated by Femtosecond Laser Direct Writing |
title_sort |
Real-Time Optical Monitoring of Etching Reaction of Microfluidic Channel Fabricated by Femtosecond Laser Direct Writing |
author |
João Miguel Maia |
author_facet |
João Miguel Maia Vítor Oliveira Amorim Daniel Alexandre Paulo Vicente Marques |
author_role |
author |
author2 |
Vítor Oliveira Amorim Daniel Alexandre Paulo Vicente Marques |
author2_role |
author author author |
dc.contributor.author.fl_str_mv |
João Miguel Maia Vítor Oliveira Amorim Daniel Alexandre Paulo Vicente Marques |
description |
Femtosecond laser direct writing is a three dimensional fabrication technique that can be applied to produce integrated optical components with high spatial resolution or microfluidic channels when combined with HF etching. The same fabrication technique can thus be employed to produce monolithic optofluidic devices for sensing applications. One of the most common sensing schemes involves evanescent optical interaction; therefore, the channel must meet some requirements regarding surface roughness, which will depend on the laser writing conditions, as described in this paper. However, of more significance is the distance between waveguiding medium and microfluidic channel that must be accurately defined. This control can be achieved by monitoring the etching reaction of a waveguide grating written a few microns from the channel, as introduced in this paper. In addition to its function as an etching monitor, the grating can also be used as a coarse refractive index sensor device. |
publishDate |
2017 |
dc.date.none.fl_str_mv |
2017-01-01T00:00:00Z 2017 2018-01-25T11:28:37Z |
dc.type.status.fl_str_mv |
info:eu-repo/semantics/publishedVersion |
dc.type.driver.fl_str_mv |
info:eu-repo/semantics/article |
format |
article |
status_str |
publishedVersion |
dc.identifier.uri.fl_str_mv |
http://repositorio.inesctec.pt/handle/123456789/7346 http://dx.doi.org/10.1109/jlt.2017.2678604 |
url |
http://repositorio.inesctec.pt/handle/123456789/7346 http://dx.doi.org/10.1109/jlt.2017.2678604 |
dc.language.iso.fl_str_mv |
eng |
language |
eng |
dc.rights.driver.fl_str_mv |
info:eu-repo/semantics/openAccess |
eu_rights_str_mv |
openAccess |
dc.format.none.fl_str_mv |
application/pdf |
dc.source.none.fl_str_mv |
reponame:Repositório Científico de Acesso Aberto de Portugal (Repositórios Cientìficos) instname:Agência para a Sociedade do Conhecimento (UMIC) - FCT - Sociedade da Informação instacron:RCAAP |
instname_str |
Agência para a Sociedade do Conhecimento (UMIC) - FCT - Sociedade da Informação |
instacron_str |
RCAAP |
institution |
RCAAP |
reponame_str |
Repositório Científico de Acesso Aberto de Portugal (Repositórios Cientìficos) |
collection |
Repositório Científico de Acesso Aberto de Portugal (Repositórios Cientìficos) |
repository.name.fl_str_mv |
Repositório Científico de Acesso Aberto de Portugal (Repositórios Cientìficos) - Agência para a Sociedade do Conhecimento (UMIC) - FCT - Sociedade da Informação |
repository.mail.fl_str_mv |
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1799131602050088960 |