Python-based MEMS inertial sensors design, simulation and optimization
Autor(a) principal: | |
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Data de Publicação: | 2020 |
Tipo de documento: | Dissertação |
Idioma: | eng |
Título da fonte: | Repositório Científico de Acesso Aberto de Portugal (Repositórios Cientìficos) |
Texto Completo: | http://hdl.handle.net/10362/110349 |
Resumo: | With the rapid growth in microsensor technology, a never-ending range of possible applications emerged. The developments in fabrication techniques gave room to the creation of numerous new products that significantly improve human life. However, the evolution in the design, simulation, and optimization process of these devices did not observe a similar rapid growth. Thus, the microsensor technology would benefit from significant improvements in this domain. This work presents a novel methodology for electro-mechanical co optimization of microelectromechanical systems (MEMS) inertial sensors. The developed software tool comprises geometry design, finite element method (FEM) analysis, damping calculation, electronic domain simulation, and a genetic algorithm (GA) optimization process. It allows for a facilitated system-level MEMS design flow, in which electrical and mechanical domains communicate with each other to achieve an optimized system performance. To demonstrate the efficacy of the co-optimization methodology, an open-loop capacitive MEMS accelerometer and an open-loop Coriolis vibratory MEMS gyroscope were simulated and optimized - these devices saw a sensitivity improvement of 193.77% and 420.9%, respectively, in comparison to its original state. |
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Python-based MEMS inertial sensors design, simulation and optimizationMicroelectromechanical systems (MEMS)inertial sensorsPythonfinite element methodgenetic algorithmoptimizationDomínio/Área Científica::Engenharia e Tecnologia::NanotecnologiaWith the rapid growth in microsensor technology, a never-ending range of possible applications emerged. The developments in fabrication techniques gave room to the creation of numerous new products that significantly improve human life. However, the evolution in the design, simulation, and optimization process of these devices did not observe a similar rapid growth. Thus, the microsensor technology would benefit from significant improvements in this domain. This work presents a novel methodology for electro-mechanical co optimization of microelectromechanical systems (MEMS) inertial sensors. The developed software tool comprises geometry design, finite element method (FEM) analysis, damping calculation, electronic domain simulation, and a genetic algorithm (GA) optimization process. It allows for a facilitated system-level MEMS design flow, in which electrical and mechanical domains communicate with each other to achieve an optimized system performance. To demonstrate the efficacy of the co-optimization methodology, an open-loop capacitive MEMS accelerometer and an open-loop Coriolis vibratory MEMS gyroscope were simulated and optimized - these devices saw a sensitivity improvement of 193.77% and 420.9%, respectively, in comparison to its original state.Kraft, MichaelPinto, JoanaRUNEsteves, Rui Amendoeira2021-01-18T12:14:48Z2020-1220202020-12-01T00:00:00Zinfo:eu-repo/semantics/publishedVersioninfo:eu-repo/semantics/masterThesisapplication/pdfhttp://hdl.handle.net/10362/110349enginfo:eu-repo/semantics/openAccessreponame:Repositório Científico de Acesso Aberto de Portugal (Repositórios Cientìficos)instname:Agência para a Sociedade do Conhecimento (UMIC) - FCT - Sociedade da Informaçãoinstacron:RCAAP2024-03-11T04:53:22Zoai:run.unl.pt:10362/110349Portal AgregadorONGhttps://www.rcaap.pt/oai/openaireopendoar:71602024-03-20T03:41:19.512596Repositório Científico de Acesso Aberto de Portugal (Repositórios Cientìficos) - Agência para a Sociedade do Conhecimento (UMIC) - FCT - Sociedade da Informaçãofalse |
dc.title.none.fl_str_mv |
Python-based MEMS inertial sensors design, simulation and optimization |
title |
Python-based MEMS inertial sensors design, simulation and optimization |
spellingShingle |
Python-based MEMS inertial sensors design, simulation and optimization Esteves, Rui Amendoeira Microelectromechanical systems (MEMS) inertial sensors Python finite element method genetic algorithm optimization Domínio/Área Científica::Engenharia e Tecnologia::Nanotecnologia |
title_short |
Python-based MEMS inertial sensors design, simulation and optimization |
title_full |
Python-based MEMS inertial sensors design, simulation and optimization |
title_fullStr |
Python-based MEMS inertial sensors design, simulation and optimization |
title_full_unstemmed |
Python-based MEMS inertial sensors design, simulation and optimization |
title_sort |
Python-based MEMS inertial sensors design, simulation and optimization |
author |
Esteves, Rui Amendoeira |
author_facet |
Esteves, Rui Amendoeira |
author_role |
author |
dc.contributor.none.fl_str_mv |
Kraft, Michael Pinto, Joana RUN |
dc.contributor.author.fl_str_mv |
Esteves, Rui Amendoeira |
dc.subject.por.fl_str_mv |
Microelectromechanical systems (MEMS) inertial sensors Python finite element method genetic algorithm optimization Domínio/Área Científica::Engenharia e Tecnologia::Nanotecnologia |
topic |
Microelectromechanical systems (MEMS) inertial sensors Python finite element method genetic algorithm optimization Domínio/Área Científica::Engenharia e Tecnologia::Nanotecnologia |
description |
With the rapid growth in microsensor technology, a never-ending range of possible applications emerged. The developments in fabrication techniques gave room to the creation of numerous new products that significantly improve human life. However, the evolution in the design, simulation, and optimization process of these devices did not observe a similar rapid growth. Thus, the microsensor technology would benefit from significant improvements in this domain. This work presents a novel methodology for electro-mechanical co optimization of microelectromechanical systems (MEMS) inertial sensors. The developed software tool comprises geometry design, finite element method (FEM) analysis, damping calculation, electronic domain simulation, and a genetic algorithm (GA) optimization process. It allows for a facilitated system-level MEMS design flow, in which electrical and mechanical domains communicate with each other to achieve an optimized system performance. To demonstrate the efficacy of the co-optimization methodology, an open-loop capacitive MEMS accelerometer and an open-loop Coriolis vibratory MEMS gyroscope were simulated and optimized - these devices saw a sensitivity improvement of 193.77% and 420.9%, respectively, in comparison to its original state. |
publishDate |
2020 |
dc.date.none.fl_str_mv |
2020-12 2020 2020-12-01T00:00:00Z 2021-01-18T12:14:48Z |
dc.type.status.fl_str_mv |
info:eu-repo/semantics/publishedVersion |
dc.type.driver.fl_str_mv |
info:eu-repo/semantics/masterThesis |
format |
masterThesis |
status_str |
publishedVersion |
dc.identifier.uri.fl_str_mv |
http://hdl.handle.net/10362/110349 |
url |
http://hdl.handle.net/10362/110349 |
dc.language.iso.fl_str_mv |
eng |
language |
eng |
dc.rights.driver.fl_str_mv |
info:eu-repo/semantics/openAccess |
eu_rights_str_mv |
openAccess |
dc.format.none.fl_str_mv |
application/pdf |
dc.source.none.fl_str_mv |
reponame:Repositório Científico de Acesso Aberto de Portugal (Repositórios Cientìficos) instname:Agência para a Sociedade do Conhecimento (UMIC) - FCT - Sociedade da Informação instacron:RCAAP |
instname_str |
Agência para a Sociedade do Conhecimento (UMIC) - FCT - Sociedade da Informação |
instacron_str |
RCAAP |
institution |
RCAAP |
reponame_str |
Repositório Científico de Acesso Aberto de Portugal (Repositórios Cientìficos) |
collection |
Repositório Científico de Acesso Aberto de Portugal (Repositórios Cientìficos) |
repository.name.fl_str_mv |
Repositório Científico de Acesso Aberto de Portugal (Repositórios Cientìficos) - Agência para a Sociedade do Conhecimento (UMIC) - FCT - Sociedade da Informação |
repository.mail.fl_str_mv |
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1799138026814701568 |