Design and characterization of an RF plasma cleaner
| Autor(a) principal: | |
|---|---|
| Data de Publicação: | 2010 |
| Outros Autores: | , , |
| Tipo de documento: | Artigo |
| Idioma: | eng |
| Título da fonte: | Brazilian Journal of Physics |
| Texto Completo: | http://old.scielo.br/scielo.php?script=sci_arttext&pid=S0103-97332010000100015 |
Resumo: | The design and characterization of an innovative device for plasma cleaning, based upon a non-conventional radio-frequency discharge, is described. The RF fields are produced by an antenna placed inside the metallic vacuum chamber. Theoretical models are described to calculate both the electro-magnetic field structure and the spatial impurity distribution, due to erosion of the antenna. The electron energy distribution function is determined with a standard RF-filtered electrostatic probe; it is found that the plasma is well described by a Druyvesteyn energy distribution function. |
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Design and characterization of an RF plasma cleanerRF dischargeplasma cleanerLangmuir probeThe design and characterization of an innovative device for plasma cleaning, based upon a non-conventional radio-frequency discharge, is described. The RF fields are produced by an antenna placed inside the metallic vacuum chamber. Theoretical models are described to calculate both the electro-magnetic field structure and the spatial impurity distribution, due to erosion of the antenna. The electron energy distribution function is determined with a standard RF-filtered electrostatic probe; it is found that the plasma is well described by a Druyvesteyn energy distribution function.Sociedade Brasileira de Física2010-03-01info:eu-repo/semantics/articleinfo:eu-repo/semantics/publishedVersiontext/htmlhttp://old.scielo.br/scielo.php?script=sci_arttext&pid=S0103-97332010000100015Brazilian Journal of Physics v.40 n.1 2010reponame:Brazilian Journal of Physicsinstname:Sociedade Brasileira de Física (SBF)instacron:SBF10.1590/S0103-97332010000100015info:eu-repo/semantics/openAccessCanal,G.P.Luna,H.Ruchko,L.F.Galvão,R.M.O.eng2010-04-22T00:00:00Zoai:scielo:S0103-97332010000100015Revistahttp://www.sbfisica.org.br/v1/home/index.php/pt/ONGhttps://old.scielo.br/oai/scielo-oai.phpsbfisica@sbfisica.org.br||sbfisica@sbfisica.org.br1678-44480103-9733opendoar:2010-04-22T00:00Brazilian Journal of Physics - Sociedade Brasileira de Física (SBF)false |
| dc.title.none.fl_str_mv |
Design and characterization of an RF plasma cleaner |
| title |
Design and characterization of an RF plasma cleaner |
| spellingShingle |
Design and characterization of an RF plasma cleaner Canal,G.P. RF discharge plasma cleaner Langmuir probe |
| title_short |
Design and characterization of an RF plasma cleaner |
| title_full |
Design and characterization of an RF plasma cleaner |
| title_fullStr |
Design and characterization of an RF plasma cleaner |
| title_full_unstemmed |
Design and characterization of an RF plasma cleaner |
| title_sort |
Design and characterization of an RF plasma cleaner |
| author |
Canal,G.P. |
| author_facet |
Canal,G.P. Luna,H. Ruchko,L.F. Galvão,R.M.O. |
| author_role |
author |
| author2 |
Luna,H. Ruchko,L.F. Galvão,R.M.O. |
| author2_role |
author author author |
| dc.contributor.author.fl_str_mv |
Canal,G.P. Luna,H. Ruchko,L.F. Galvão,R.M.O. |
| dc.subject.por.fl_str_mv |
RF discharge plasma cleaner Langmuir probe |
| topic |
RF discharge plasma cleaner Langmuir probe |
| description |
The design and characterization of an innovative device for plasma cleaning, based upon a non-conventional radio-frequency discharge, is described. The RF fields are produced by an antenna placed inside the metallic vacuum chamber. Theoretical models are described to calculate both the electro-magnetic field structure and the spatial impurity distribution, due to erosion of the antenna. The electron energy distribution function is determined with a standard RF-filtered electrostatic probe; it is found that the plasma is well described by a Druyvesteyn energy distribution function. |
| publishDate |
2010 |
| dc.date.none.fl_str_mv |
2010-03-01 |
| dc.type.driver.fl_str_mv |
info:eu-repo/semantics/article |
| dc.type.status.fl_str_mv |
info:eu-repo/semantics/publishedVersion |
| format |
article |
| status_str |
publishedVersion |
| dc.identifier.uri.fl_str_mv |
http://old.scielo.br/scielo.php?script=sci_arttext&pid=S0103-97332010000100015 |
| url |
http://old.scielo.br/scielo.php?script=sci_arttext&pid=S0103-97332010000100015 |
| dc.language.iso.fl_str_mv |
eng |
| language |
eng |
| dc.relation.none.fl_str_mv |
10.1590/S0103-97332010000100015 |
| dc.rights.driver.fl_str_mv |
info:eu-repo/semantics/openAccess |
| eu_rights_str_mv |
openAccess |
| dc.format.none.fl_str_mv |
text/html |
| dc.publisher.none.fl_str_mv |
Sociedade Brasileira de Física |
| publisher.none.fl_str_mv |
Sociedade Brasileira de Física |
| dc.source.none.fl_str_mv |
Brazilian Journal of Physics v.40 n.1 2010 reponame:Brazilian Journal of Physics instname:Sociedade Brasileira de Física (SBF) instacron:SBF |
| instname_str |
Sociedade Brasileira de Física (SBF) |
| instacron_str |
SBF |
| institution |
SBF |
| reponame_str |
Brazilian Journal of Physics |
| collection |
Brazilian Journal of Physics |
| repository.name.fl_str_mv |
Brazilian Journal of Physics - Sociedade Brasileira de Física (SBF) |
| repository.mail.fl_str_mv |
sbfisica@sbfisica.org.br||sbfisica@sbfisica.org.br |
| _version_ |
1754734865271488512 |