Numerical simulation of HFCVD process used for diamond growth
Autor(a) principal: | |
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Data de Publicação: | 2006 |
Outros Autores: | , |
Tipo de documento: | Artigo |
Idioma: | eng |
Título da fonte: | Brazilian Journal of Physics |
Texto Completo: | http://old.scielo.br/scielo.php?script=sci_arttext&pid=S0103-97332006000300021 |
Resumo: | Hot-filament chemical vapour deposition (HFCVD) is a common method employed for diamond deposition. Typically in this method a dilute mixture of carbon containing gas such as methane in hydrogen is thermally activated at sub atmospheric pressures by a hot filament. Due to the filament-substrate proximity, large temperature variation across the substrate is possible. In this work we investigate the role of fluid flow and heat transfer from the filament to substrate in determining the quality of diamond growth. The commercial software CFX was used to calculate velocity field, temperature distribution and fluid flow. A vortex was identified on the substrate. |
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Brazilian Journal of Physics |
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Numerical simulation of HFCVD process used for diamond growthNumerical simulationDiamond growthHot-filament chemical vapour depositionHot-filament chemical vapour deposition (HFCVD) is a common method employed for diamond deposition. Typically in this method a dilute mixture of carbon containing gas such as methane in hydrogen is thermally activated at sub atmospheric pressures by a hot filament. Due to the filament-substrate proximity, large temperature variation across the substrate is possible. In this work we investigate the role of fluid flow and heat transfer from the filament to substrate in determining the quality of diamond growth. The commercial software CFX was used to calculate velocity field, temperature distribution and fluid flow. A vortex was identified on the substrate.Sociedade Brasileira de Física2006-06-01info:eu-repo/semantics/articleinfo:eu-repo/semantics/publishedVersiontext/htmlhttp://old.scielo.br/scielo.php?script=sci_arttext&pid=S0103-97332006000300021Brazilian Journal of Physics v.36 n.2a 2006reponame:Brazilian Journal of Physicsinstname:Sociedade Brasileira de Física (SBF)instacron:SBF10.1590/S0103-97332006000300021info:eu-repo/semantics/openAccessBarbosa,Divani C.Nova,Hélcio F. V.Baldan,Mauricio R.eng2006-07-06T00:00:00Zoai:scielo:S0103-97332006000300021Revistahttp://www.sbfisica.org.br/v1/home/index.php/pt/ONGhttps://old.scielo.br/oai/scielo-oai.phpsbfisica@sbfisica.org.br||sbfisica@sbfisica.org.br1678-44480103-9733opendoar:2006-07-06T00:00Brazilian Journal of Physics - Sociedade Brasileira de Física (SBF)false |
dc.title.none.fl_str_mv |
Numerical simulation of HFCVD process used for diamond growth |
title |
Numerical simulation of HFCVD process used for diamond growth |
spellingShingle |
Numerical simulation of HFCVD process used for diamond growth Barbosa,Divani C. Numerical simulation Diamond growth Hot-filament chemical vapour deposition |
title_short |
Numerical simulation of HFCVD process used for diamond growth |
title_full |
Numerical simulation of HFCVD process used for diamond growth |
title_fullStr |
Numerical simulation of HFCVD process used for diamond growth |
title_full_unstemmed |
Numerical simulation of HFCVD process used for diamond growth |
title_sort |
Numerical simulation of HFCVD process used for diamond growth |
author |
Barbosa,Divani C. |
author_facet |
Barbosa,Divani C. Nova,Hélcio F. V. Baldan,Mauricio R. |
author_role |
author |
author2 |
Nova,Hélcio F. V. Baldan,Mauricio R. |
author2_role |
author author |
dc.contributor.author.fl_str_mv |
Barbosa,Divani C. Nova,Hélcio F. V. Baldan,Mauricio R. |
dc.subject.por.fl_str_mv |
Numerical simulation Diamond growth Hot-filament chemical vapour deposition |
topic |
Numerical simulation Diamond growth Hot-filament chemical vapour deposition |
description |
Hot-filament chemical vapour deposition (HFCVD) is a common method employed for diamond deposition. Typically in this method a dilute mixture of carbon containing gas such as methane in hydrogen is thermally activated at sub atmospheric pressures by a hot filament. Due to the filament-substrate proximity, large temperature variation across the substrate is possible. In this work we investigate the role of fluid flow and heat transfer from the filament to substrate in determining the quality of diamond growth. The commercial software CFX was used to calculate velocity field, temperature distribution and fluid flow. A vortex was identified on the substrate. |
publishDate |
2006 |
dc.date.none.fl_str_mv |
2006-06-01 |
dc.type.driver.fl_str_mv |
info:eu-repo/semantics/article |
dc.type.status.fl_str_mv |
info:eu-repo/semantics/publishedVersion |
format |
article |
status_str |
publishedVersion |
dc.identifier.uri.fl_str_mv |
http://old.scielo.br/scielo.php?script=sci_arttext&pid=S0103-97332006000300021 |
url |
http://old.scielo.br/scielo.php?script=sci_arttext&pid=S0103-97332006000300021 |
dc.language.iso.fl_str_mv |
eng |
language |
eng |
dc.relation.none.fl_str_mv |
10.1590/S0103-97332006000300021 |
dc.rights.driver.fl_str_mv |
info:eu-repo/semantics/openAccess |
eu_rights_str_mv |
openAccess |
dc.format.none.fl_str_mv |
text/html |
dc.publisher.none.fl_str_mv |
Sociedade Brasileira de Física |
publisher.none.fl_str_mv |
Sociedade Brasileira de Física |
dc.source.none.fl_str_mv |
Brazilian Journal of Physics v.36 n.2a 2006 reponame:Brazilian Journal of Physics instname:Sociedade Brasileira de Física (SBF) instacron:SBF |
instname_str |
Sociedade Brasileira de Física (SBF) |
instacron_str |
SBF |
institution |
SBF |
reponame_str |
Brazilian Journal of Physics |
collection |
Brazilian Journal of Physics |
repository.name.fl_str_mv |
Brazilian Journal of Physics - Sociedade Brasileira de Física (SBF) |
repository.mail.fl_str_mv |
sbfisica@sbfisica.org.br||sbfisica@sbfisica.org.br |
_version_ |
1754734862694088704 |