Numerical simulation of HFCVD process used for diamond growth

Detalhes bibliográficos
Autor(a) principal: Barbosa,Divani C.
Data de Publicação: 2006
Outros Autores: Nova,Hélcio F. V., Baldan,Mauricio R.
Tipo de documento: Artigo
Idioma: eng
Título da fonte: Brazilian Journal of Physics
Texto Completo: http://old.scielo.br/scielo.php?script=sci_arttext&pid=S0103-97332006000300021
Resumo: Hot-filament chemical vapour deposition (HFCVD) is a common method employed for diamond deposition. Typically in this method a dilute mixture of carbon containing gas such as methane in hydrogen is thermally activated at sub atmospheric pressures by a hot filament. Due to the filament-substrate proximity, large temperature variation across the substrate is possible. In this work we investigate the role of fluid flow and heat transfer from the filament to substrate in determining the quality of diamond growth. The commercial software CFX was used to calculate velocity field, temperature distribution and fluid flow. A vortex was identified on the substrate.
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spelling Numerical simulation of HFCVD process used for diamond growthNumerical simulationDiamond growthHot-filament chemical vapour depositionHot-filament chemical vapour deposition (HFCVD) is a common method employed for diamond deposition. Typically in this method a dilute mixture of carbon containing gas such as methane in hydrogen is thermally activated at sub atmospheric pressures by a hot filament. Due to the filament-substrate proximity, large temperature variation across the substrate is possible. In this work we investigate the role of fluid flow and heat transfer from the filament to substrate in determining the quality of diamond growth. The commercial software CFX was used to calculate velocity field, temperature distribution and fluid flow. A vortex was identified on the substrate.Sociedade Brasileira de Física2006-06-01info:eu-repo/semantics/articleinfo:eu-repo/semantics/publishedVersiontext/htmlhttp://old.scielo.br/scielo.php?script=sci_arttext&pid=S0103-97332006000300021Brazilian Journal of Physics v.36 n.2a 2006reponame:Brazilian Journal of Physicsinstname:Sociedade Brasileira de Física (SBF)instacron:SBF10.1590/S0103-97332006000300021info:eu-repo/semantics/openAccessBarbosa,Divani C.Nova,Hélcio F. V.Baldan,Mauricio R.eng2006-07-06T00:00:00Zoai:scielo:S0103-97332006000300021Revistahttp://www.sbfisica.org.br/v1/home/index.php/pt/ONGhttps://old.scielo.br/oai/scielo-oai.phpsbfisica@sbfisica.org.br||sbfisica@sbfisica.org.br1678-44480103-9733opendoar:2006-07-06T00:00Brazilian Journal of Physics - Sociedade Brasileira de Física (SBF)false
dc.title.none.fl_str_mv Numerical simulation of HFCVD process used for diamond growth
title Numerical simulation of HFCVD process used for diamond growth
spellingShingle Numerical simulation of HFCVD process used for diamond growth
Barbosa,Divani C.
Numerical simulation
Diamond growth
Hot-filament chemical vapour deposition
title_short Numerical simulation of HFCVD process used for diamond growth
title_full Numerical simulation of HFCVD process used for diamond growth
title_fullStr Numerical simulation of HFCVD process used for diamond growth
title_full_unstemmed Numerical simulation of HFCVD process used for diamond growth
title_sort Numerical simulation of HFCVD process used for diamond growth
author Barbosa,Divani C.
author_facet Barbosa,Divani C.
Nova,Hélcio F. V.
Baldan,Mauricio R.
author_role author
author2 Nova,Hélcio F. V.
Baldan,Mauricio R.
author2_role author
author
dc.contributor.author.fl_str_mv Barbosa,Divani C.
Nova,Hélcio F. V.
Baldan,Mauricio R.
dc.subject.por.fl_str_mv Numerical simulation
Diamond growth
Hot-filament chemical vapour deposition
topic Numerical simulation
Diamond growth
Hot-filament chemical vapour deposition
description Hot-filament chemical vapour deposition (HFCVD) is a common method employed for diamond deposition. Typically in this method a dilute mixture of carbon containing gas such as methane in hydrogen is thermally activated at sub atmospheric pressures by a hot filament. Due to the filament-substrate proximity, large temperature variation across the substrate is possible. In this work we investigate the role of fluid flow and heat transfer from the filament to substrate in determining the quality of diamond growth. The commercial software CFX was used to calculate velocity field, temperature distribution and fluid flow. A vortex was identified on the substrate.
publishDate 2006
dc.date.none.fl_str_mv 2006-06-01
dc.type.driver.fl_str_mv info:eu-repo/semantics/article
dc.type.status.fl_str_mv info:eu-repo/semantics/publishedVersion
format article
status_str publishedVersion
dc.identifier.uri.fl_str_mv http://old.scielo.br/scielo.php?script=sci_arttext&pid=S0103-97332006000300021
url http://old.scielo.br/scielo.php?script=sci_arttext&pid=S0103-97332006000300021
dc.language.iso.fl_str_mv eng
language eng
dc.relation.none.fl_str_mv 10.1590/S0103-97332006000300021
dc.rights.driver.fl_str_mv info:eu-repo/semantics/openAccess
eu_rights_str_mv openAccess
dc.format.none.fl_str_mv text/html
dc.publisher.none.fl_str_mv Sociedade Brasileira de Física
publisher.none.fl_str_mv Sociedade Brasileira de Física
dc.source.none.fl_str_mv Brazilian Journal of Physics v.36 n.2a 2006
reponame:Brazilian Journal of Physics
instname:Sociedade Brasileira de Física (SBF)
instacron:SBF
instname_str Sociedade Brasileira de Física (SBF)
instacron_str SBF
institution SBF
reponame_str Brazilian Journal of Physics
collection Brazilian Journal of Physics
repository.name.fl_str_mv Brazilian Journal of Physics - Sociedade Brasileira de Física (SBF)
repository.mail.fl_str_mv sbfisica@sbfisica.org.br||sbfisica@sbfisica.org.br
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