Recent progress in the synthesis and characterization of amorphous and crystalline carbon nitride coatings

Detalhes bibliográficos
Autor(a) principal: Widlow,Ian
Data de Publicação: 2000
Outros Autores: Chung,Yip-Wah
Tipo de documento: Artigo
Idioma: eng
Título da fonte: Brazilian Journal of Physics
Texto Completo: http://old.scielo.br/scielo.php?script=sci_arttext&pid=S0103-97332000000300004
Resumo: This review summarizes our most recent findings in the structure and properties of amorphous and crystalline carbon nitride coatings, synthesized by reactive magnetron sputtering. By careful control of the plasma conditions via proper choice of process parameters such as substrate bias, target power and gas pressure, one can precisely control film structure and properties. With this approach, we were able to produce amorphous carbon nitride films with controlled hardness and surface roughness. In particular, we can synthesize ultrathin (1 nm thick) amorphous carbon nitride films to be sufficiently dense and uniform that they provide adequate corrosion protection for hard disk applications. We demonstrated the strong correlation between ZrN(111) texture and hardness in CNx/ZrN superlattice coatings. Raman spectroscopy and near-edge x-ray absorption show the predominance of sp³-bonded carbon in these superlattice coatings.
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spelling Recent progress in the synthesis and characterization of amorphous and crystalline carbon nitride coatingsThis review summarizes our most recent findings in the structure and properties of amorphous and crystalline carbon nitride coatings, synthesized by reactive magnetron sputtering. By careful control of the plasma conditions via proper choice of process parameters such as substrate bias, target power and gas pressure, one can precisely control film structure and properties. With this approach, we were able to produce amorphous carbon nitride films with controlled hardness and surface roughness. In particular, we can synthesize ultrathin (1 nm thick) amorphous carbon nitride films to be sufficiently dense and uniform that they provide adequate corrosion protection for hard disk applications. We demonstrated the strong correlation between ZrN(111) texture and hardness in CNx/ZrN superlattice coatings. Raman spectroscopy and near-edge x-ray absorption show the predominance of sp³-bonded carbon in these superlattice coatings.Sociedade Brasileira de Física2000-01-01info:eu-repo/semantics/articleinfo:eu-repo/semantics/publishedVersiontext/htmlhttp://old.scielo.br/scielo.php?script=sci_arttext&pid=S0103-97332000000300004Brazilian Journal of Physics v.30 n.3 2000reponame:Brazilian Journal of Physicsinstname:Sociedade Brasileira de Física (SBF)instacron:SBF10.1590/S0103-97332000000300004info:eu-repo/semantics/openAccessWidlow,IanChung,Yip-Waheng2002-01-11T00:00:00Zoai:scielo:S0103-97332000000300004Revistahttp://www.sbfisica.org.br/v1/home/index.php/pt/ONGhttps://old.scielo.br/oai/scielo-oai.phpsbfisica@sbfisica.org.br||sbfisica@sbfisica.org.br1678-44480103-9733opendoar:2002-01-11T00:00Brazilian Journal of Physics - Sociedade Brasileira de Física (SBF)false
dc.title.none.fl_str_mv Recent progress in the synthesis and characterization of amorphous and crystalline carbon nitride coatings
title Recent progress in the synthesis and characterization of amorphous and crystalline carbon nitride coatings
spellingShingle Recent progress in the synthesis and characterization of amorphous and crystalline carbon nitride coatings
Widlow,Ian
title_short Recent progress in the synthesis and characterization of amorphous and crystalline carbon nitride coatings
title_full Recent progress in the synthesis and characterization of amorphous and crystalline carbon nitride coatings
title_fullStr Recent progress in the synthesis and characterization of amorphous and crystalline carbon nitride coatings
title_full_unstemmed Recent progress in the synthesis and characterization of amorphous and crystalline carbon nitride coatings
title_sort Recent progress in the synthesis and characterization of amorphous and crystalline carbon nitride coatings
author Widlow,Ian
author_facet Widlow,Ian
Chung,Yip-Wah
author_role author
author2 Chung,Yip-Wah
author2_role author
dc.contributor.author.fl_str_mv Widlow,Ian
Chung,Yip-Wah
description This review summarizes our most recent findings in the structure and properties of amorphous and crystalline carbon nitride coatings, synthesized by reactive magnetron sputtering. By careful control of the plasma conditions via proper choice of process parameters such as substrate bias, target power and gas pressure, one can precisely control film structure and properties. With this approach, we were able to produce amorphous carbon nitride films with controlled hardness and surface roughness. In particular, we can synthesize ultrathin (1 nm thick) amorphous carbon nitride films to be sufficiently dense and uniform that they provide adequate corrosion protection for hard disk applications. We demonstrated the strong correlation between ZrN(111) texture and hardness in CNx/ZrN superlattice coatings. Raman spectroscopy and near-edge x-ray absorption show the predominance of sp³-bonded carbon in these superlattice coatings.
publishDate 2000
dc.date.none.fl_str_mv 2000-01-01
dc.type.driver.fl_str_mv info:eu-repo/semantics/article
dc.type.status.fl_str_mv info:eu-repo/semantics/publishedVersion
format article
status_str publishedVersion
dc.identifier.uri.fl_str_mv http://old.scielo.br/scielo.php?script=sci_arttext&pid=S0103-97332000000300004
url http://old.scielo.br/scielo.php?script=sci_arttext&pid=S0103-97332000000300004
dc.language.iso.fl_str_mv eng
language eng
dc.relation.none.fl_str_mv 10.1590/S0103-97332000000300004
dc.rights.driver.fl_str_mv info:eu-repo/semantics/openAccess
eu_rights_str_mv openAccess
dc.format.none.fl_str_mv text/html
dc.publisher.none.fl_str_mv Sociedade Brasileira de Física
publisher.none.fl_str_mv Sociedade Brasileira de Física
dc.source.none.fl_str_mv Brazilian Journal of Physics v.30 n.3 2000
reponame:Brazilian Journal of Physics
instname:Sociedade Brasileira de Física (SBF)
instacron:SBF
instname_str Sociedade Brasileira de Física (SBF)
instacron_str SBF
institution SBF
reponame_str Brazilian Journal of Physics
collection Brazilian Journal of Physics
repository.name.fl_str_mv Brazilian Journal of Physics - Sociedade Brasileira de Física (SBF)
repository.mail.fl_str_mv sbfisica@sbfisica.org.br||sbfisica@sbfisica.org.br
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