Effect of PECVD deposition parameters on the DLC/PLC composition of a-C:H thin films

Detalhes bibliográficos
Autor(a) principal: Oliveira,Éder C.
Data de Publicação: 2012
Outros Autores: Cruz,Sandra A., Aguiar,Paulo H. L.
Tipo de documento: Artigo
Idioma: eng
Título da fonte: Journal of the Brazilian Chemical Society (Online)
Texto Completo: http://old.scielo.br/scielo.php?script=sci_arttext&pid=S0103-50532012000900010
Resumo: Hydrogenated amorphous carbon (a-C:H) thin films were synthesized on the surface of materials to improve mechanical, optical and chemical properties. In the present study, plasma enhanced chemical vapor deposition (PECVD) was performed to produce a-C:H films with PLC (polymer like carbon) and DLC (diamond like carbon) phases. The influences of the acetylene partial pressure and chamber pressure on the chemical structures of the products were evaluated by infrared reflection absorption spectroscopy (IRRAS) and Raman spectroscopy. Moreover, the morphology and thickness of the films were investigated by atomic force microscopy (AFM) and profilometry, respectively.
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spelling Effect of PECVD deposition parameters on the DLC/PLC composition of a-C:H thin filmsamorphous hydrogenated carbonPECVDparametersdiamond like carbonpolymer like carbonHydrogenated amorphous carbon (a-C:H) thin films were synthesized on the surface of materials to improve mechanical, optical and chemical properties. In the present study, plasma enhanced chemical vapor deposition (PECVD) was performed to produce a-C:H films with PLC (polymer like carbon) and DLC (diamond like carbon) phases. The influences of the acetylene partial pressure and chamber pressure on the chemical structures of the products were evaluated by infrared reflection absorption spectroscopy (IRRAS) and Raman spectroscopy. Moreover, the morphology and thickness of the films were investigated by atomic force microscopy (AFM) and profilometry, respectively.Sociedade Brasileira de Química2012-09-01info:eu-repo/semantics/articleinfo:eu-repo/semantics/publishedVersiontext/htmlhttp://old.scielo.br/scielo.php?script=sci_arttext&pid=S0103-50532012000900010Journal of the Brazilian Chemical Society v.23 n.9 2012reponame:Journal of the Brazilian Chemical Society (Online)instname:Sociedade Brasileira de Química (SBQ)instacron:SBQ10.1590/S0103-50532012005000027info:eu-repo/semantics/openAccessOliveira,Éder C.Cruz,Sandra A.Aguiar,Paulo H. L.eng2012-10-15T00:00:00Zoai:scielo:S0103-50532012000900010Revistahttp://jbcs.sbq.org.brONGhttps://old.scielo.br/oai/scielo-oai.php||office@jbcs.sbq.org.br1678-47900103-5053opendoar:2012-10-15T00:00Journal of the Brazilian Chemical Society (Online) - Sociedade Brasileira de Química (SBQ)false
dc.title.none.fl_str_mv Effect of PECVD deposition parameters on the DLC/PLC composition of a-C:H thin films
title Effect of PECVD deposition parameters on the DLC/PLC composition of a-C:H thin films
spellingShingle Effect of PECVD deposition parameters on the DLC/PLC composition of a-C:H thin films
Oliveira,Éder C.
amorphous hydrogenated carbon
PECVD
parameters
diamond like carbon
polymer like carbon
title_short Effect of PECVD deposition parameters on the DLC/PLC composition of a-C:H thin films
title_full Effect of PECVD deposition parameters on the DLC/PLC composition of a-C:H thin films
title_fullStr Effect of PECVD deposition parameters on the DLC/PLC composition of a-C:H thin films
title_full_unstemmed Effect of PECVD deposition parameters on the DLC/PLC composition of a-C:H thin films
title_sort Effect of PECVD deposition parameters on the DLC/PLC composition of a-C:H thin films
author Oliveira,Éder C.
author_facet Oliveira,Éder C.
Cruz,Sandra A.
Aguiar,Paulo H. L.
author_role author
author2 Cruz,Sandra A.
Aguiar,Paulo H. L.
author2_role author
author
dc.contributor.author.fl_str_mv Oliveira,Éder C.
Cruz,Sandra A.
Aguiar,Paulo H. L.
dc.subject.por.fl_str_mv amorphous hydrogenated carbon
PECVD
parameters
diamond like carbon
polymer like carbon
topic amorphous hydrogenated carbon
PECVD
parameters
diamond like carbon
polymer like carbon
description Hydrogenated amorphous carbon (a-C:H) thin films were synthesized on the surface of materials to improve mechanical, optical and chemical properties. In the present study, plasma enhanced chemical vapor deposition (PECVD) was performed to produce a-C:H films with PLC (polymer like carbon) and DLC (diamond like carbon) phases. The influences of the acetylene partial pressure and chamber pressure on the chemical structures of the products were evaluated by infrared reflection absorption spectroscopy (IRRAS) and Raman spectroscopy. Moreover, the morphology and thickness of the films were investigated by atomic force microscopy (AFM) and profilometry, respectively.
publishDate 2012
dc.date.none.fl_str_mv 2012-09-01
dc.type.driver.fl_str_mv info:eu-repo/semantics/article
dc.type.status.fl_str_mv info:eu-repo/semantics/publishedVersion
format article
status_str publishedVersion
dc.identifier.uri.fl_str_mv http://old.scielo.br/scielo.php?script=sci_arttext&pid=S0103-50532012000900010
url http://old.scielo.br/scielo.php?script=sci_arttext&pid=S0103-50532012000900010
dc.language.iso.fl_str_mv eng
language eng
dc.relation.none.fl_str_mv 10.1590/S0103-50532012005000027
dc.rights.driver.fl_str_mv info:eu-repo/semantics/openAccess
eu_rights_str_mv openAccess
dc.format.none.fl_str_mv text/html
dc.publisher.none.fl_str_mv Sociedade Brasileira de Química
publisher.none.fl_str_mv Sociedade Brasileira de Química
dc.source.none.fl_str_mv Journal of the Brazilian Chemical Society v.23 n.9 2012
reponame:Journal of the Brazilian Chemical Society (Online)
instname:Sociedade Brasileira de Química (SBQ)
instacron:SBQ
instname_str Sociedade Brasileira de Química (SBQ)
instacron_str SBQ
institution SBQ
reponame_str Journal of the Brazilian Chemical Society (Online)
collection Journal of the Brazilian Chemical Society (Online)
repository.name.fl_str_mv Journal of the Brazilian Chemical Society (Online) - Sociedade Brasileira de Química (SBQ)
repository.mail.fl_str_mv ||office@jbcs.sbq.org.br
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