Hot-filament metal oxide deposition (HFMOD): a novel method for depositing thin films of metallic oxides

Detalhes bibliográficos
Autor(a) principal: Rouxinol,F. Paulo
Data de Publicação: 2004
Outros Autores: Trasferetti,B. Cláudio, Landers,Richard, Moraes,Mário A. Bica de
Tipo de documento: Artigo
Idioma: eng
Título da fonte: Journal of the Brazilian Chemical Society (Online)
Texto Completo: http://old.scielo.br/scielo.php?script=sci_arttext&pid=S0103-50532004000200026
Resumo: This short report describes a novel method for the synthesis of metal oxide thin films. The experimental setup consists of a metal filament installed inside a vacuum chamber. The filament can be heated by an ac power supply while oxygen is admitted into the chamber using a mass flowmeter. From reactions between oxygen and the heated metal filament, volatile oxide species, Me xOy, where Me is the metal, can be formed, condensing on a nearby substrate. We have observed that thin films of WxOy and Mo xOy can be satisfactorily deposited by this novel method. Although several techniques were used to characterize the oxides, this note emphasizes the results obtained by X-ray Photoelectron Spectroscopy (XPS).
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spelling Hot-filament metal oxide deposition (HFMOD): a novel method for depositing thin films of metallic oxidesWO3MoO3thin filmsXPSCVDThis short report describes a novel method for the synthesis of metal oxide thin films. The experimental setup consists of a metal filament installed inside a vacuum chamber. The filament can be heated by an ac power supply while oxygen is admitted into the chamber using a mass flowmeter. From reactions between oxygen and the heated metal filament, volatile oxide species, Me xOy, where Me is the metal, can be formed, condensing on a nearby substrate. We have observed that thin films of WxOy and Mo xOy can be satisfactorily deposited by this novel method. Although several techniques were used to characterize the oxides, this note emphasizes the results obtained by X-ray Photoelectron Spectroscopy (XPS).Sociedade Brasileira de Química2004-04-01info:eu-repo/semantics/articleinfo:eu-repo/semantics/publishedVersiontext/htmlhttp://old.scielo.br/scielo.php?script=sci_arttext&pid=S0103-50532004000200026Journal of the Brazilian Chemical Society v.15 n.2 2004reponame:Journal of the Brazilian Chemical Society (Online)instname:Sociedade Brasileira de Química (SBQ)instacron:SBQ10.1590/S0103-50532004000200026info:eu-repo/semantics/openAccessRouxinol,F. PauloTrasferetti,B. CláudioLanders,RichardMoraes,Mário A. Bica deeng2004-06-29T00:00:00Zoai:scielo:S0103-50532004000200026Revistahttp://jbcs.sbq.org.brONGhttps://old.scielo.br/oai/scielo-oai.php||office@jbcs.sbq.org.br1678-47900103-5053opendoar:2004-06-29T00:00Journal of the Brazilian Chemical Society (Online) - Sociedade Brasileira de Química (SBQ)false
dc.title.none.fl_str_mv Hot-filament metal oxide deposition (HFMOD): a novel method for depositing thin films of metallic oxides
title Hot-filament metal oxide deposition (HFMOD): a novel method for depositing thin films of metallic oxides
spellingShingle Hot-filament metal oxide deposition (HFMOD): a novel method for depositing thin films of metallic oxides
Rouxinol,F. Paulo
WO3
MoO3
thin films
XPS
CVD
title_short Hot-filament metal oxide deposition (HFMOD): a novel method for depositing thin films of metallic oxides
title_full Hot-filament metal oxide deposition (HFMOD): a novel method for depositing thin films of metallic oxides
title_fullStr Hot-filament metal oxide deposition (HFMOD): a novel method for depositing thin films of metallic oxides
title_full_unstemmed Hot-filament metal oxide deposition (HFMOD): a novel method for depositing thin films of metallic oxides
title_sort Hot-filament metal oxide deposition (HFMOD): a novel method for depositing thin films of metallic oxides
author Rouxinol,F. Paulo
author_facet Rouxinol,F. Paulo
Trasferetti,B. Cláudio
Landers,Richard
Moraes,Mário A. Bica de
author_role author
author2 Trasferetti,B. Cláudio
Landers,Richard
Moraes,Mário A. Bica de
author2_role author
author
author
dc.contributor.author.fl_str_mv Rouxinol,F. Paulo
Trasferetti,B. Cláudio
Landers,Richard
Moraes,Mário A. Bica de
dc.subject.por.fl_str_mv WO3
MoO3
thin films
XPS
CVD
topic WO3
MoO3
thin films
XPS
CVD
description This short report describes a novel method for the synthesis of metal oxide thin films. The experimental setup consists of a metal filament installed inside a vacuum chamber. The filament can be heated by an ac power supply while oxygen is admitted into the chamber using a mass flowmeter. From reactions between oxygen and the heated metal filament, volatile oxide species, Me xOy, where Me is the metal, can be formed, condensing on a nearby substrate. We have observed that thin films of WxOy and Mo xOy can be satisfactorily deposited by this novel method. Although several techniques were used to characterize the oxides, this note emphasizes the results obtained by X-ray Photoelectron Spectroscopy (XPS).
publishDate 2004
dc.date.none.fl_str_mv 2004-04-01
dc.type.driver.fl_str_mv info:eu-repo/semantics/article
dc.type.status.fl_str_mv info:eu-repo/semantics/publishedVersion
format article
status_str publishedVersion
dc.identifier.uri.fl_str_mv http://old.scielo.br/scielo.php?script=sci_arttext&pid=S0103-50532004000200026
url http://old.scielo.br/scielo.php?script=sci_arttext&pid=S0103-50532004000200026
dc.language.iso.fl_str_mv eng
language eng
dc.relation.none.fl_str_mv 10.1590/S0103-50532004000200026
dc.rights.driver.fl_str_mv info:eu-repo/semantics/openAccess
eu_rights_str_mv openAccess
dc.format.none.fl_str_mv text/html
dc.publisher.none.fl_str_mv Sociedade Brasileira de Química
publisher.none.fl_str_mv Sociedade Brasileira de Química
dc.source.none.fl_str_mv Journal of the Brazilian Chemical Society v.15 n.2 2004
reponame:Journal of the Brazilian Chemical Society (Online)
instname:Sociedade Brasileira de Química (SBQ)
instacron:SBQ
instname_str Sociedade Brasileira de Química (SBQ)
instacron_str SBQ
institution SBQ
reponame_str Journal of the Brazilian Chemical Society (Online)
collection Journal of the Brazilian Chemical Society (Online)
repository.name.fl_str_mv Journal of the Brazilian Chemical Society (Online) - Sociedade Brasileira de Química (SBQ)
repository.mail.fl_str_mv ||office@jbcs.sbq.org.br
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