The influence of aluminum grain size on alumina nanoporous structure

Detalhes bibliográficos
Autor(a) principal: Feil, Adriano Friedrich
Data de Publicação: 2010
Outros Autores: Costa, Marlla Vallerius da, Amaral, Livio, Teixeira, Sergio Ribeiro, Migowski, Pedro, Dupont, Jairton, Machado, Giovanna, Peripolli, Suzana Bottega
Tipo de documento: Artigo
Idioma: eng
Título da fonte: Repositório Institucional da UFRGS
Texto Completo: http://hdl.handle.net/10183/96124
Resumo: An approach to control the interpore distances and nanopore diameters of 150-nm-thick thin aluminum films is reported here. The Al thin films were grown by sputtering on p-type silicon substrate and anodized with a conventional anodization process in a phosphoric acid solution. It was found that interpore distance and pore diameter are related to the aluminum grain size and can be controlled by annealing. The grain contours limit the sizes of alumina cells. This mechanism is valid for grain sizes supporting only one alumina cell and consequently only one pore.
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spelling Feil, Adriano FriedrichCosta, Marlla Vallerius daAmaral, LivioTeixeira, Sergio RibeiroMigowski, PedroDupont, JairtonMachado, GiovannaPeripolli, Suzana Bottega2014-06-06T02:06:36Z20100021-8979http://hdl.handle.net/10183/96124000731674An approach to control the interpore distances and nanopore diameters of 150-nm-thick thin aluminum films is reported here. The Al thin films were grown by sputtering on p-type silicon substrate and anodized with a conventional anodization process in a phosphoric acid solution. It was found that interpore distance and pore diameter are related to the aluminum grain size and can be controlled by annealing. The grain contours limit the sizes of alumina cells. This mechanism is valid for grain sizes supporting only one alumina cell and consequently only one pore.application/pdfengJournal of applied physics. Melville. Vol. 107, no. 2 (Jan. 2010), 026103, 3 p.Física da matéria condensadaDeposição por sputteringTamanho de grãoMateriais nanoestruturadosNanotubosFilmes finosAlumínioThe influence of aluminum grain size on alumina nanoporous structureEstrangeiroinfo:eu-repo/semantics/articleinfo:eu-repo/semantics/publishedVersioninfo:eu-repo/semantics/openAccessreponame:Repositório Institucional da UFRGSinstname:Universidade Federal do Rio Grande do Sul (UFRGS)instacron:UFRGSORIGINAL000731674.pdf000731674.pdfTexto completo (inglês)application/pdf485329http://www.lume.ufrgs.br/bitstream/10183/96124/1/000731674.pdf66b8c2d77c2943e94171a1b4bf19b75bMD51TEXT000731674.pdf.txt000731674.pdf.txtExtracted Texttext/plain15715http://www.lume.ufrgs.br/bitstream/10183/96124/2/000731674.pdf.txt3798ac6ea63316ce44323f75d9116629MD52THUMBNAIL000731674.pdf.jpg000731674.pdf.jpgGenerated Thumbnailimage/jpeg1573http://www.lume.ufrgs.br/bitstream/10183/96124/3/000731674.pdf.jpg322c08fdc3615cc2d4632cd7c57a99f9MD5310183/961242024-04-21 06:18:34.422849oai:www.lume.ufrgs.br:10183/96124Repositório de PublicaçõesPUBhttps://lume.ufrgs.br/oai/requestopendoar:2024-04-21T09:18:34Repositório Institucional da UFRGS - Universidade Federal do Rio Grande do Sul (UFRGS)false
dc.title.pt_BR.fl_str_mv The influence of aluminum grain size on alumina nanoporous structure
title The influence of aluminum grain size on alumina nanoporous structure
spellingShingle The influence of aluminum grain size on alumina nanoporous structure
Feil, Adriano Friedrich
Física da matéria condensada
Deposição por sputtering
Tamanho de grão
Materiais nanoestruturados
Nanotubos
Filmes finos
Alumínio
title_short The influence of aluminum grain size on alumina nanoporous structure
title_full The influence of aluminum grain size on alumina nanoporous structure
title_fullStr The influence of aluminum grain size on alumina nanoporous structure
title_full_unstemmed The influence of aluminum grain size on alumina nanoporous structure
title_sort The influence of aluminum grain size on alumina nanoporous structure
author Feil, Adriano Friedrich
author_facet Feil, Adriano Friedrich
Costa, Marlla Vallerius da
Amaral, Livio
Teixeira, Sergio Ribeiro
Migowski, Pedro
Dupont, Jairton
Machado, Giovanna
Peripolli, Suzana Bottega
author_role author
author2 Costa, Marlla Vallerius da
Amaral, Livio
Teixeira, Sergio Ribeiro
Migowski, Pedro
Dupont, Jairton
Machado, Giovanna
Peripolli, Suzana Bottega
author2_role author
author
author
author
author
author
author
dc.contributor.author.fl_str_mv Feil, Adriano Friedrich
Costa, Marlla Vallerius da
Amaral, Livio
Teixeira, Sergio Ribeiro
Migowski, Pedro
Dupont, Jairton
Machado, Giovanna
Peripolli, Suzana Bottega
dc.subject.por.fl_str_mv Física da matéria condensada
Deposição por sputtering
Tamanho de grão
Materiais nanoestruturados
Nanotubos
Filmes finos
Alumínio
topic Física da matéria condensada
Deposição por sputtering
Tamanho de grão
Materiais nanoestruturados
Nanotubos
Filmes finos
Alumínio
description An approach to control the interpore distances and nanopore diameters of 150-nm-thick thin aluminum films is reported here. The Al thin films were grown by sputtering on p-type silicon substrate and anodized with a conventional anodization process in a phosphoric acid solution. It was found that interpore distance and pore diameter are related to the aluminum grain size and can be controlled by annealing. The grain contours limit the sizes of alumina cells. This mechanism is valid for grain sizes supporting only one alumina cell and consequently only one pore.
publishDate 2010
dc.date.issued.fl_str_mv 2010
dc.date.accessioned.fl_str_mv 2014-06-06T02:06:36Z
dc.type.driver.fl_str_mv Estrangeiro
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dc.type.status.fl_str_mv info:eu-repo/semantics/publishedVersion
format article
status_str publishedVersion
dc.identifier.uri.fl_str_mv http://hdl.handle.net/10183/96124
dc.identifier.issn.pt_BR.fl_str_mv 0021-8979
dc.identifier.nrb.pt_BR.fl_str_mv 000731674
identifier_str_mv 0021-8979
000731674
url http://hdl.handle.net/10183/96124
dc.language.iso.fl_str_mv eng
language eng
dc.relation.ispartof.pt_BR.fl_str_mv Journal of applied physics. Melville. Vol. 107, no. 2 (Jan. 2010), 026103, 3 p.
dc.rights.driver.fl_str_mv info:eu-repo/semantics/openAccess
eu_rights_str_mv openAccess
dc.format.none.fl_str_mv application/pdf
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