Characterization of metal oxide-based gas nanosensors and microsensors fabricated via local anodic oxidation using atomic force microscopy

Detalhes bibliográficos
Autor(a) principal: Archanjo, Braulio Soares
Data de Publicação: 2013
Outros Autores: Fernández Siles, Pablo Roberto, Oliveira, Camilla K. B. Q. M., Baptista, Daniel Lorscheitter, Neves, Bernardo Ruegger Almeida
Tipo de documento: Artigo
Idioma: eng
Título da fonte: Repositório Institucional da UFRGS
Texto Completo: http://hdl.handle.net/10183/89697
Resumo: Thiswork reports on nanoscale and microscalemetal oxide gas sensors, consisting ofmetal-semiconductor-metal barriers designed via scanning probe microscopy. Two distinctmetal oxides, molybdenum and titaniumoxides, were tested at different temperatures using CO2 and H2 as test gases. Sensitivities down to ppm levels are demonstrated, and the influence of dry and humid working atmospheres on these metal oxide conductivities was studied. Furthermore, the activation energy was evaluated and analyzed within working sensor temperature range. Finally, full morphological, chemical, and structural analyses of the oxides composites are provided allowing their identification as MoO3 and TiO2−x.
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spelling Archanjo, Braulio SoaresFernández Siles, Pablo RobertoOliveira, Camilla K. B. Q. M.Baptista, Daniel LorscheitterNeves, Bernardo Ruegger Almeida2014-03-26T01:51:06Z20131687-8434http://hdl.handle.net/10183/89697000908994Thiswork reports on nanoscale and microscalemetal oxide gas sensors, consisting ofmetal-semiconductor-metal barriers designed via scanning probe microscopy. Two distinctmetal oxides, molybdenum and titaniumoxides, were tested at different temperatures using CO2 and H2 as test gases. Sensitivities down to ppm levels are demonstrated, and the influence of dry and humid working atmospheres on these metal oxide conductivities was studied. Furthermore, the activation energy was evaluated and analyzed within working sensor temperature range. Finally, full morphological, chemical, and structural analyses of the oxides composites are provided allowing their identification as MoO3 and TiO2−x.application/pdfengAdvances in materials science and engineering. New York. Vol. 2013 (2013), 898565, 13AnodizaçãoNanopartículasMicrofabricaçãoNanofabricaçãoNanocompósitosSensibilidade (Física)Microscopia de força atômicaCompostos de titânioCompostos de molibdênioCharacterization of metal oxide-based gas nanosensors and microsensors fabricated via local anodic oxidation using atomic force microscopyEstrangeiroinfo:eu-repo/semantics/articleinfo:eu-repo/semantics/publishedVersioninfo:eu-repo/semantics/openAccessreponame:Repositório Institucional da UFRGSinstname:Universidade Federal do Rio Grande do Sul (UFRGS)instacron:UFRGSORIGINAL000908994.pdf000908994.pdfTexto completo (inglês)application/pdf7421083http://www.lume.ufrgs.br/bitstream/10183/89697/1/000908994.pdf7aba1b877a27680f8e8b9a3d0fd0f467MD51TEXT000908994.pdf.txt000908994.pdf.txtExtracted Texttext/plain52054http://www.lume.ufrgs.br/bitstream/10183/89697/2/000908994.pdf.txtd474bac9395c1ac647da59644492a813MD52THUMBNAIL000908994.pdf.jpg000908994.pdf.jpgGenerated Thumbnailimage/jpeg1762http://www.lume.ufrgs.br/bitstream/10183/89697/3/000908994.pdf.jpg2f7e20c8a0c37d82043879cdec4f24dfMD5310183/896972023-07-29 03:34:50.004665oai:www.lume.ufrgs.br:10183/89697Repositório InstitucionalPUBhttps://lume.ufrgs.br/oai/requestlume@ufrgs.bropendoar:2023-07-29T06:34:50Repositório Institucional da UFRGS - Universidade Federal do Rio Grande do Sul (UFRGS)false
dc.title.pt_BR.fl_str_mv Characterization of metal oxide-based gas nanosensors and microsensors fabricated via local anodic oxidation using atomic force microscopy
title Characterization of metal oxide-based gas nanosensors and microsensors fabricated via local anodic oxidation using atomic force microscopy
spellingShingle Characterization of metal oxide-based gas nanosensors and microsensors fabricated via local anodic oxidation using atomic force microscopy
Archanjo, Braulio Soares
Anodização
Nanopartículas
Microfabricação
Nanofabricação
Nanocompósitos
Sensibilidade (Física)
Microscopia de força atômica
Compostos de titânio
Compostos de molibdênio
title_short Characterization of metal oxide-based gas nanosensors and microsensors fabricated via local anodic oxidation using atomic force microscopy
title_full Characterization of metal oxide-based gas nanosensors and microsensors fabricated via local anodic oxidation using atomic force microscopy
title_fullStr Characterization of metal oxide-based gas nanosensors and microsensors fabricated via local anodic oxidation using atomic force microscopy
title_full_unstemmed Characterization of metal oxide-based gas nanosensors and microsensors fabricated via local anodic oxidation using atomic force microscopy
title_sort Characterization of metal oxide-based gas nanosensors and microsensors fabricated via local anodic oxidation using atomic force microscopy
author Archanjo, Braulio Soares
author_facet Archanjo, Braulio Soares
Fernández Siles, Pablo Roberto
Oliveira, Camilla K. B. Q. M.
Baptista, Daniel Lorscheitter
Neves, Bernardo Ruegger Almeida
author_role author
author2 Fernández Siles, Pablo Roberto
Oliveira, Camilla K. B. Q. M.
Baptista, Daniel Lorscheitter
Neves, Bernardo Ruegger Almeida
author2_role author
author
author
author
dc.contributor.author.fl_str_mv Archanjo, Braulio Soares
Fernández Siles, Pablo Roberto
Oliveira, Camilla K. B. Q. M.
Baptista, Daniel Lorscheitter
Neves, Bernardo Ruegger Almeida
dc.subject.por.fl_str_mv Anodização
Nanopartículas
Microfabricação
Nanofabricação
Nanocompósitos
Sensibilidade (Física)
Microscopia de força atômica
Compostos de titânio
Compostos de molibdênio
topic Anodização
Nanopartículas
Microfabricação
Nanofabricação
Nanocompósitos
Sensibilidade (Física)
Microscopia de força atômica
Compostos de titânio
Compostos de molibdênio
description Thiswork reports on nanoscale and microscalemetal oxide gas sensors, consisting ofmetal-semiconductor-metal barriers designed via scanning probe microscopy. Two distinctmetal oxides, molybdenum and titaniumoxides, were tested at different temperatures using CO2 and H2 as test gases. Sensitivities down to ppm levels are demonstrated, and the influence of dry and humid working atmospheres on these metal oxide conductivities was studied. Furthermore, the activation energy was evaluated and analyzed within working sensor temperature range. Finally, full morphological, chemical, and structural analyses of the oxides composites are provided allowing their identification as MoO3 and TiO2−x.
publishDate 2013
dc.date.issued.fl_str_mv 2013
dc.date.accessioned.fl_str_mv 2014-03-26T01:51:06Z
dc.type.driver.fl_str_mv Estrangeiro
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dc.type.status.fl_str_mv info:eu-repo/semantics/publishedVersion
format article
status_str publishedVersion
dc.identifier.uri.fl_str_mv http://hdl.handle.net/10183/89697
dc.identifier.issn.pt_BR.fl_str_mv 1687-8434
dc.identifier.nrb.pt_BR.fl_str_mv 000908994
identifier_str_mv 1687-8434
000908994
url http://hdl.handle.net/10183/89697
dc.language.iso.fl_str_mv eng
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dc.relation.ispartof.pt_BR.fl_str_mv Advances in materials science and engineering. New York. Vol. 2013 (2013), 898565, 13
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institution UFRGS
reponame_str Repositório Institucional da UFRGS
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