Analytical energy loss distribution for accurate high resolution depth profiling using medium energy ion scattering

Detalhes bibliográficos
Autor(a) principal: Pezzi, Rafael Peretti
Data de Publicação: 2008
Outros Autores: Krug, Cristiano, Grande, Pedro Luis, Rosa, Elisa Brod Oliveira da, Schiwietz, Gregor, Baumvol, Israel Jacob Rabin
Tipo de documento: Artigo
Idioma: eng
Título da fonte: Repositório Institucional da UFRGS
Texto Completo: http://hdl.handle.net/10183/141710
Resumo: An analytical approach to ion energy loss distributions capable of simplifying medium energy ion scattering MEIS spectral analysis is presented. This analytical approach preserves the accuracy of recent numerical models that evaluate energy loss effects overlooked by standard calculations based on the Gaussian approximation. Results are compared to first principle calculations and experimental MEIS spectra from 0.2- to 1.5-nm-thick HfO2 films on Si, supporting the application of this analytical model for proton scattering in the kinetic energy range from 100 to 200 keV.
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spelling Pezzi, Rafael PerettiKrug, CristianoGrande, Pedro LuisRosa, Elisa Brod Oliveira daSchiwietz, GregorBaumvol, Israel Jacob Rabin2016-05-24T02:10:50Z20080003-6951http://hdl.handle.net/10183/141710000637821An analytical approach to ion energy loss distributions capable of simplifying medium energy ion scattering MEIS spectral analysis is presented. This analytical approach preserves the accuracy of recent numerical models that evaluate energy loss effects overlooked by standard calculations based on the Gaussian approximation. Results are compared to first principle calculations and experimental MEIS spectra from 0.2- to 1.5-nm-thick HfO2 films on Si, supporting the application of this analytical model for proton scattering in the kinetic energy range from 100 to 200 keV.application/pdfengApplied physics letters. Vol. 92, no. 16 (Apr. 2008), 164102, 3p.SilícioRetroespalhamentoPerda de energia de particulasAnalytical energy loss distribution for accurate high resolution depth profiling using medium energy ion scatteringEstrangeiroinfo:eu-repo/semantics/articleinfo:eu-repo/semantics/publishedVersioninfo:eu-repo/semantics/openAccessreponame:Repositório Institucional da UFRGSinstname:Universidade Federal do Rio Grande do Sul (UFRGS)instacron:UFRGSORIGINAL000637821.pdf000637821.pdfTexto completo (inglês)application/pdf637317http://www.lume.ufrgs.br/bitstream/10183/141710/1/000637821.pdf431e031f2f4f0d207458c208f71209bfMD51TEXT000637821.pdf.txt000637821.pdf.txtExtracted Texttext/plain17896http://www.lume.ufrgs.br/bitstream/10183/141710/2/000637821.pdf.txt3d9d4a3d7c33ed8b82b666c976c1ea2bMD52THUMBNAIL000637821.pdf.jpg000637821.pdf.jpgGenerated Thumbnailimage/jpeg2214http://www.lume.ufrgs.br/bitstream/10183/141710/3/000637821.pdf.jpg63a6dd96bc3d2b19d27ed39cc230d42bMD5310183/1417102023-06-15 03:28:50.319192oai:www.lume.ufrgs.br:10183/141710Repositório de PublicaçõesPUBhttps://lume.ufrgs.br/oai/requestopendoar:2023-06-15T06:28:50Repositório Institucional da UFRGS - Universidade Federal do Rio Grande do Sul (UFRGS)false
dc.title.pt_BR.fl_str_mv Analytical energy loss distribution for accurate high resolution depth profiling using medium energy ion scattering
title Analytical energy loss distribution for accurate high resolution depth profiling using medium energy ion scattering
spellingShingle Analytical energy loss distribution for accurate high resolution depth profiling using medium energy ion scattering
Pezzi, Rafael Peretti
Silício
Retroespalhamento
Perda de energia de particulas
title_short Analytical energy loss distribution for accurate high resolution depth profiling using medium energy ion scattering
title_full Analytical energy loss distribution for accurate high resolution depth profiling using medium energy ion scattering
title_fullStr Analytical energy loss distribution for accurate high resolution depth profiling using medium energy ion scattering
title_full_unstemmed Analytical energy loss distribution for accurate high resolution depth profiling using medium energy ion scattering
title_sort Analytical energy loss distribution for accurate high resolution depth profiling using medium energy ion scattering
author Pezzi, Rafael Peretti
author_facet Pezzi, Rafael Peretti
Krug, Cristiano
Grande, Pedro Luis
Rosa, Elisa Brod Oliveira da
Schiwietz, Gregor
Baumvol, Israel Jacob Rabin
author_role author
author2 Krug, Cristiano
Grande, Pedro Luis
Rosa, Elisa Brod Oliveira da
Schiwietz, Gregor
Baumvol, Israel Jacob Rabin
author2_role author
author
author
author
author
dc.contributor.author.fl_str_mv Pezzi, Rafael Peretti
Krug, Cristiano
Grande, Pedro Luis
Rosa, Elisa Brod Oliveira da
Schiwietz, Gregor
Baumvol, Israel Jacob Rabin
dc.subject.por.fl_str_mv Silício
Retroespalhamento
Perda de energia de particulas
topic Silício
Retroespalhamento
Perda de energia de particulas
description An analytical approach to ion energy loss distributions capable of simplifying medium energy ion scattering MEIS spectral analysis is presented. This analytical approach preserves the accuracy of recent numerical models that evaluate energy loss effects overlooked by standard calculations based on the Gaussian approximation. Results are compared to first principle calculations and experimental MEIS spectra from 0.2- to 1.5-nm-thick HfO2 films on Si, supporting the application of this analytical model for proton scattering in the kinetic energy range from 100 to 200 keV.
publishDate 2008
dc.date.issued.fl_str_mv 2008
dc.date.accessioned.fl_str_mv 2016-05-24T02:10:50Z
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dc.identifier.issn.pt_BR.fl_str_mv 0003-6951
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url http://hdl.handle.net/10183/141710
dc.language.iso.fl_str_mv eng
language eng
dc.relation.ispartof.pt_BR.fl_str_mv Applied physics letters. Vol. 92, no. 16 (Apr. 2008), 164102, 3p.
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