Influence of ALN crystallinity on SAP waveguides

Detalhes bibliográficos
Autor(a) principal: Alvarado, M. A.
Data de Publicação: 2016
Outros Autores: Pereyra, I., Carvalho, D. O. [UNESP], Alayo, M. I.
Tipo de documento: Artigo de conferência
Idioma: eng
Título da fonte: Repositório Institucional da UNESP
Texto Completo: http://dx.doi.org/10.1364/LAOP.2016.LTu4A.28
http://hdl.handle.net/11449/169742
Resumo: In this work, a comparison in the behavior of highly c-axis oriented and amorphous Aluminum Nitride (AlN) films as core layer in self-aligned pedestal (SAP) optical waveguides is presented, aiming to study the influence of AlN crystallinity in waveguiding. Optical losses characterizations were measured in these devices using the top-view technique at a visible wavelength (wavelength at 547 nm). AlN films were examined by X-ray diffraction (XRD) to determine their crystalline structure. Furthermore, Scanning Electron microscopy (SEM) technique was utilized to verify the geometrical definition of the optical waveguide.
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spelling Influence of ALN crystallinity on SAP waveguidesIn this work, a comparison in the behavior of highly c-axis oriented and amorphous Aluminum Nitride (AlN) films as core layer in self-aligned pedestal (SAP) optical waveguides is presented, aiming to study the influence of AlN crystallinity in waveguiding. Optical losses characterizations were measured in these devices using the top-view technique at a visible wavelength (wavelength at 547 nm). AlN films were examined by X-ray diffraction (XRD) to determine their crystalline structure. Furthermore, Scanning Electron microscopy (SEM) technique was utilized to verify the geometrical definition of the optical waveguide.Departamento de Engenharia de Sistemas Eletrônicos Escola Politécnica da Universidade de São PauloUniversidade Estadual Paulista UNESPUniversidade Estadual Paulista UNESPUniversidade de São Paulo (USP)Universidade Estadual Paulista (Unesp)Alvarado, M. A.Pereyra, I.Carvalho, D. O. [UNESP]Alayo, M. I.2018-12-11T16:47:25Z2018-12-11T16:47:25Z2016-08-15info:eu-repo/semantics/publishedVersioninfo:eu-repo/semantics/conferenceObjecthttp://dx.doi.org/10.1364/LAOP.2016.LTu4A.28Optics InfoBase Conference Papers.http://hdl.handle.net/11449/16974210.1364/LAOP.2016.LTu4A.282-s2.0-85019532391Scopusreponame:Repositório Institucional da UNESPinstname:Universidade Estadual Paulista (UNESP)instacron:UNESPengOptics InfoBase Conference Papersinfo:eu-repo/semantics/openAccess2021-10-23T21:47:02Zoai:repositorio.unesp.br:11449/169742Repositório InstitucionalPUBhttp://repositorio.unesp.br/oai/requestopendoar:29462024-08-05T22:07:15.852589Repositório Institucional da UNESP - Universidade Estadual Paulista (UNESP)false
dc.title.none.fl_str_mv Influence of ALN crystallinity on SAP waveguides
title Influence of ALN crystallinity on SAP waveguides
spellingShingle Influence of ALN crystallinity on SAP waveguides
Alvarado, M. A.
title_short Influence of ALN crystallinity on SAP waveguides
title_full Influence of ALN crystallinity on SAP waveguides
title_fullStr Influence of ALN crystallinity on SAP waveguides
title_full_unstemmed Influence of ALN crystallinity on SAP waveguides
title_sort Influence of ALN crystallinity on SAP waveguides
author Alvarado, M. A.
author_facet Alvarado, M. A.
Pereyra, I.
Carvalho, D. O. [UNESP]
Alayo, M. I.
author_role author
author2 Pereyra, I.
Carvalho, D. O. [UNESP]
Alayo, M. I.
author2_role author
author
author
dc.contributor.none.fl_str_mv Universidade de São Paulo (USP)
Universidade Estadual Paulista (Unesp)
dc.contributor.author.fl_str_mv Alvarado, M. A.
Pereyra, I.
Carvalho, D. O. [UNESP]
Alayo, M. I.
description In this work, a comparison in the behavior of highly c-axis oriented and amorphous Aluminum Nitride (AlN) films as core layer in self-aligned pedestal (SAP) optical waveguides is presented, aiming to study the influence of AlN crystallinity in waveguiding. Optical losses characterizations were measured in these devices using the top-view technique at a visible wavelength (wavelength at 547 nm). AlN films were examined by X-ray diffraction (XRD) to determine their crystalline structure. Furthermore, Scanning Electron microscopy (SEM) technique was utilized to verify the geometrical definition of the optical waveguide.
publishDate 2016
dc.date.none.fl_str_mv 2016-08-15
2018-12-11T16:47:25Z
2018-12-11T16:47:25Z
dc.type.status.fl_str_mv info:eu-repo/semantics/publishedVersion
dc.type.driver.fl_str_mv info:eu-repo/semantics/conferenceObject
format conferenceObject
status_str publishedVersion
dc.identifier.uri.fl_str_mv http://dx.doi.org/10.1364/LAOP.2016.LTu4A.28
Optics InfoBase Conference Papers.
http://hdl.handle.net/11449/169742
10.1364/LAOP.2016.LTu4A.28
2-s2.0-85019532391
url http://dx.doi.org/10.1364/LAOP.2016.LTu4A.28
http://hdl.handle.net/11449/169742
identifier_str_mv Optics InfoBase Conference Papers.
10.1364/LAOP.2016.LTu4A.28
2-s2.0-85019532391
dc.language.iso.fl_str_mv eng
language eng
dc.relation.none.fl_str_mv Optics InfoBase Conference Papers
dc.rights.driver.fl_str_mv info:eu-repo/semantics/openAccess
eu_rights_str_mv openAccess
dc.source.none.fl_str_mv Scopus
reponame:Repositório Institucional da UNESP
instname:Universidade Estadual Paulista (UNESP)
instacron:UNESP
instname_str Universidade Estadual Paulista (UNESP)
instacron_str UNESP
institution UNESP
reponame_str Repositório Institucional da UNESP
collection Repositório Institucional da UNESP
repository.name.fl_str_mv Repositório Institucional da UNESP - Universidade Estadual Paulista (UNESP)
repository.mail.fl_str_mv
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