Study of diglyme plasmas by mass spectrometry

Detalhes bibliográficos
Autor(a) principal: Bigansolli, Antonio R.
Data de Publicação: 2017
Outros Autores: Honda, Roberto Y. [UNESP], Algatti, Mauricio A. [UNESP], Mota, Rogerio P. [UNESP], Kayama, Milton E. [UNESP], IEEE
Tipo de documento: Artigo de conferência
Idioma: eng
Título da fonte: Repositório Institucional da UNESP
Texto Completo: http://hdl.handle.net/11449/196298
Resumo: This paper deals with the study of the fragmentation process of diethylene glycol dimethyl ether (diglyme) molecule, i.e., (CH3OCH2CH2)(2)O; in low pressure RF excited plasma discharges. The study was carried out using mass spectrometry. The mass spectra were collected by a mass spectrometer operating in the mass range from 1 to 300 amu. Plasmas were generated within a stainless steel cylindrical chamber in a plane parallel plate electrodes plasma reactor configuration with 210 mm of internal diameter and 225 mm of length. The chamber is provided with eight lateral entrances, positioned at the mid plane between the electrodes, that may be used for setting optical, electrical and mass diagnostics and the low (mechanical pump) and high (turbo-molecular pump) vacuum systems. The vacuum inside the plasma chamber is monitored by Pirani (TM) (thermocouple) and Penning (TM) (inverse magnetrom) gauges. The turbo-molecular pump is coupled to the chamber through a gate valve and is used for cleanness purposes. The pressure is pumped down to 10(-6) Torr, being the chamber purged with argon several times before each running of the experiment. The 13.56 MHz RF power was coupled to the chamber through an appropriate matching network. Mass spectrometry allowed one to follow the trends of several chemical species resulted from diglyme's molecule fragmentation for different values of pressure and RF power. The results showed that for a fixed pressure, the increase of the RF power coupled to the plasma chamber from 5 to 45 W produced a plasma environment much more reactive which reduces the population of the heavier species and increases the population of the lighter one. This fact can be attributed to the increase of the electronic temperature that makes predominant the occurrence of inelastic processes that promotes molecular fragmentation. From the point of view of the nonfouling characteristic of the plasma deposited diglyme films the ethylene-glycol structure, e.g., CH2CH2O (44 amu), is one the most important structure to be retained within the film composition if one wants to keep its functionality as is already shown in current literature. The experimental results suggest that if one wants to keep the monomer's functionality within the plasma deposited films resulting from such kind of discharges one must operate in low RF power conditions.
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spelling Study of diglyme plasmas by mass spectrometryMolecular fragmentationMass spectrometry; Optical spectroscopyDiglyme plasmasThis paper deals with the study of the fragmentation process of diethylene glycol dimethyl ether (diglyme) molecule, i.e., (CH3OCH2CH2)(2)O; in low pressure RF excited plasma discharges. The study was carried out using mass spectrometry. The mass spectra were collected by a mass spectrometer operating in the mass range from 1 to 300 amu. Plasmas were generated within a stainless steel cylindrical chamber in a plane parallel plate electrodes plasma reactor configuration with 210 mm of internal diameter and 225 mm of length. The chamber is provided with eight lateral entrances, positioned at the mid plane between the electrodes, that may be used for setting optical, electrical and mass diagnostics and the low (mechanical pump) and high (turbo-molecular pump) vacuum systems. The vacuum inside the plasma chamber is monitored by Pirani (TM) (thermocouple) and Penning (TM) (inverse magnetrom) gauges. The turbo-molecular pump is coupled to the chamber through a gate valve and is used for cleanness purposes. The pressure is pumped down to 10(-6) Torr, being the chamber purged with argon several times before each running of the experiment. The 13.56 MHz RF power was coupled to the chamber through an appropriate matching network. Mass spectrometry allowed one to follow the trends of several chemical species resulted from diglyme's molecule fragmentation for different values of pressure and RF power. The results showed that for a fixed pressure, the increase of the RF power coupled to the plasma chamber from 5 to 45 W produced a plasma environment much more reactive which reduces the population of the heavier species and increases the population of the lighter one. This fact can be attributed to the increase of the electronic temperature that makes predominant the occurrence of inelastic processes that promotes molecular fragmentation. From the point of view of the nonfouling characteristic of the plasma deposited diglyme films the ethylene-glycol structure, e.g., CH2CH2O (44 amu), is one the most important structure to be retained within the film composition if one wants to keep its functionality as is already shown in current literature. The experimental results suggest that if one wants to keep the monomer's functionality within the plasma deposited films resulting from such kind of discharges one must operate in low RF power conditions.Fundação de Amparo à Pesquisa do Estado de São Paulo (FAPESP)Univ Fed Rural Rio de Janeiro, Dept Engn Quim, Seropedica, BrazilUNESP Univ Estadual Paulista, Dept Fis & Quim, Guaratingueta, BrazilUNESP Univ Estadual Paulista, Dept Fis & Quim, Guaratingueta, BrazilIeeeUniv Fed Rural Rio de JaneiroUniversidade Estadual Paulista (Unesp)Bigansolli, Antonio R.Honda, Roberto Y. [UNESP]Algatti, Mauricio A. [UNESP]Mota, Rogerio P. [UNESP]Kayama, Milton E. [UNESP]IEEE2020-12-10T19:40:09Z2020-12-10T19:40:09Z2017-01-01info:eu-repo/semantics/publishedVersioninfo:eu-repo/semantics/conferenceObject20-232017 16th Latin American Workshop On Plasma Physics (lawpp 2017). New York: Ieee, p. 20-23, 2017.http://hdl.handle.net/11449/196298WOS:000494428100005Web of Sciencereponame:Repositório Institucional da UNESPinstname:Universidade Estadual Paulista (UNESP)instacron:UNESPeng2017 16th Latin American Workshop On Plasma Physics (lawpp 2017)info:eu-repo/semantics/openAccess2024-07-01T20:52:56Zoai:repositorio.unesp.br:11449/196298Repositório InstitucionalPUBhttp://repositorio.unesp.br/oai/requestopendoar:29462024-08-05T15:33:51.988306Repositório Institucional da UNESP - Universidade Estadual Paulista (UNESP)false
dc.title.none.fl_str_mv Study of diglyme plasmas by mass spectrometry
title Study of diglyme plasmas by mass spectrometry
spellingShingle Study of diglyme plasmas by mass spectrometry
Bigansolli, Antonio R.
Molecular fragmentation
Mass spectrometry; Optical spectroscopy
Diglyme plasmas
title_short Study of diglyme plasmas by mass spectrometry
title_full Study of diglyme plasmas by mass spectrometry
title_fullStr Study of diglyme plasmas by mass spectrometry
title_full_unstemmed Study of diglyme plasmas by mass spectrometry
title_sort Study of diglyme plasmas by mass spectrometry
author Bigansolli, Antonio R.
author_facet Bigansolli, Antonio R.
Honda, Roberto Y. [UNESP]
Algatti, Mauricio A. [UNESP]
Mota, Rogerio P. [UNESP]
Kayama, Milton E. [UNESP]
IEEE
author_role author
author2 Honda, Roberto Y. [UNESP]
Algatti, Mauricio A. [UNESP]
Mota, Rogerio P. [UNESP]
Kayama, Milton E. [UNESP]
IEEE
author2_role author
author
author
author
author
dc.contributor.none.fl_str_mv Univ Fed Rural Rio de Janeiro
Universidade Estadual Paulista (Unesp)
dc.contributor.author.fl_str_mv Bigansolli, Antonio R.
Honda, Roberto Y. [UNESP]
Algatti, Mauricio A. [UNESP]
Mota, Rogerio P. [UNESP]
Kayama, Milton E. [UNESP]
IEEE
dc.subject.por.fl_str_mv Molecular fragmentation
Mass spectrometry; Optical spectroscopy
Diglyme plasmas
topic Molecular fragmentation
Mass spectrometry; Optical spectroscopy
Diglyme plasmas
description This paper deals with the study of the fragmentation process of diethylene glycol dimethyl ether (diglyme) molecule, i.e., (CH3OCH2CH2)(2)O; in low pressure RF excited plasma discharges. The study was carried out using mass spectrometry. The mass spectra were collected by a mass spectrometer operating in the mass range from 1 to 300 amu. Plasmas were generated within a stainless steel cylindrical chamber in a plane parallel plate electrodes plasma reactor configuration with 210 mm of internal diameter and 225 mm of length. The chamber is provided with eight lateral entrances, positioned at the mid plane between the electrodes, that may be used for setting optical, electrical and mass diagnostics and the low (mechanical pump) and high (turbo-molecular pump) vacuum systems. The vacuum inside the plasma chamber is monitored by Pirani (TM) (thermocouple) and Penning (TM) (inverse magnetrom) gauges. The turbo-molecular pump is coupled to the chamber through a gate valve and is used for cleanness purposes. The pressure is pumped down to 10(-6) Torr, being the chamber purged with argon several times before each running of the experiment. The 13.56 MHz RF power was coupled to the chamber through an appropriate matching network. Mass spectrometry allowed one to follow the trends of several chemical species resulted from diglyme's molecule fragmentation for different values of pressure and RF power. The results showed that for a fixed pressure, the increase of the RF power coupled to the plasma chamber from 5 to 45 W produced a plasma environment much more reactive which reduces the population of the heavier species and increases the population of the lighter one. This fact can be attributed to the increase of the electronic temperature that makes predominant the occurrence of inelastic processes that promotes molecular fragmentation. From the point of view of the nonfouling characteristic of the plasma deposited diglyme films the ethylene-glycol structure, e.g., CH2CH2O (44 amu), is one the most important structure to be retained within the film composition if one wants to keep its functionality as is already shown in current literature. The experimental results suggest that if one wants to keep the monomer's functionality within the plasma deposited films resulting from such kind of discharges one must operate in low RF power conditions.
publishDate 2017
dc.date.none.fl_str_mv 2017-01-01
2020-12-10T19:40:09Z
2020-12-10T19:40:09Z
dc.type.status.fl_str_mv info:eu-repo/semantics/publishedVersion
dc.type.driver.fl_str_mv info:eu-repo/semantics/conferenceObject
format conferenceObject
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dc.identifier.uri.fl_str_mv 2017 16th Latin American Workshop On Plasma Physics (lawpp 2017). New York: Ieee, p. 20-23, 2017.
http://hdl.handle.net/11449/196298
WOS:000494428100005
identifier_str_mv 2017 16th Latin American Workshop On Plasma Physics (lawpp 2017). New York: Ieee, p. 20-23, 2017.
WOS:000494428100005
url http://hdl.handle.net/11449/196298
dc.language.iso.fl_str_mv eng
language eng
dc.relation.none.fl_str_mv 2017 16th Latin American Workshop On Plasma Physics (lawpp 2017)
dc.rights.driver.fl_str_mv info:eu-repo/semantics/openAccess
eu_rights_str_mv openAccess
dc.format.none.fl_str_mv 20-23
dc.publisher.none.fl_str_mv Ieee
publisher.none.fl_str_mv Ieee
dc.source.none.fl_str_mv Web of Science
reponame:Repositório Institucional da UNESP
instname:Universidade Estadual Paulista (UNESP)
instacron:UNESP
instname_str Universidade Estadual Paulista (UNESP)
instacron_str UNESP
institution UNESP
reponame_str Repositório Institucional da UNESP
collection Repositório Institucional da UNESP
repository.name.fl_str_mv Repositório Institucional da UNESP - Universidade Estadual Paulista (UNESP)
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