Characterization of amorphous hydrogenated chlorinated plasma polymers

Detalhes bibliográficos
Autor(a) principal: Rossi, Diego [UNESP]
Data de Publicação: 2016
Outros Autores: Schreiner, Wido H., Durrant, Steven F. [UNESP]
Tipo de documento: Artigo
Idioma: eng
Título da fonte: Repositório Institucional da UNESP
Texto Completo: http://dx.doi.org/10.1016/j.surfcoat.2016.01.053
http://hdl.handle.net/11449/177873
Resumo: Thin films were produced by plasma enhanced chemical vapor deposition from propanol-chloroform-argon mixtures. The main system parameter studied was the percentage of chloroform in the chamber feed, CCl. Plasma polymers doped with chlorine were produced at deposition rates of up to 110 nm min-1. As revealed by infrared- and X-ray photoelectron spectroscopy, the films consisted of a hydrogenated carbon matrix with a carbon content of at least 80 at.%, and a roughly constant oxygen content of about 12 at.%. A maximum chlorine content of ~8 at.% was obtained. The surface contact angle of the films was around 75°, and was reduced slightly at greater chlorine contents. Optical properties were obtained from ultraviolet-visible-near infrared spectroscopic data. While the refractive index of the films was around 1.56 independently of CCl, the chlorinated films showed a distinct optical gap of ~2.5 eV compared to ~1.9 eV for the unchlorinated film.
id UNSP_20bd0f5bacba90e677a683b261b6cd5a
oai_identifier_str oai:repositorio.unesp.br:11449/177873
network_acronym_str UNSP
network_name_str Repositório Institucional da UNESP
repository_id_str 2946
spelling Characterization of amorphous hydrogenated chlorinated plasma polymersChlorinated filmsPECVDPlasma polymersTauc gapThin films were produced by plasma enhanced chemical vapor deposition from propanol-chloroform-argon mixtures. The main system parameter studied was the percentage of chloroform in the chamber feed, CCl. Plasma polymers doped with chlorine were produced at deposition rates of up to 110 nm min-1. As revealed by infrared- and X-ray photoelectron spectroscopy, the films consisted of a hydrogenated carbon matrix with a carbon content of at least 80 at.%, and a roughly constant oxygen content of about 12 at.%. A maximum chlorine content of ~8 at.% was obtained. The surface contact angle of the films was around 75°, and was reduced slightly at greater chlorine contents. Optical properties were obtained from ultraviolet-visible-near infrared spectroscopic data. While the refractive index of the films was around 1.56 independently of CCl, the chlorinated films showed a distinct optical gap of ~2.5 eV compared to ~1.9 eV for the unchlorinated film.Laboratório de Plasmas Tecnológicos Instituto de Ciência e Tecnologia de Sorocaba UNESPDepartamento de Física Universidade Federal de ParanáLaboratório de Plasmas Tecnológicos Instituto de Ciência e Tecnologia de Sorocaba UNESPUniversidade Estadual Paulista (Unesp)Universidade Federal de ParanáRossi, Diego [UNESP]Schreiner, Wido H.Durrant, Steven F. [UNESP]2018-12-11T17:27:31Z2018-12-11T17:27:31Z2016-03-15info:eu-repo/semantics/publishedVersioninfo:eu-repo/semantics/article118-123application/pdfhttp://dx.doi.org/10.1016/j.surfcoat.2016.01.053Surface and Coatings Technology, v. 289, p. 118-123.0257-8972http://hdl.handle.net/11449/17787310.1016/j.surfcoat.2016.01.0532-s2.0-849604913022-s2.0-84960491302.pdfScopusreponame:Repositório Institucional da UNESPinstname:Universidade Estadual Paulista (UNESP)instacron:UNESPengSurface and Coatings Technology0,928info:eu-repo/semantics/openAccess2024-01-23T07:09:25Zoai:repositorio.unesp.br:11449/177873Repositório InstitucionalPUBhttp://repositorio.unesp.br/oai/requestopendoar:29462024-08-05T23:46:33.112680Repositório Institucional da UNESP - Universidade Estadual Paulista (UNESP)false
dc.title.none.fl_str_mv Characterization of amorphous hydrogenated chlorinated plasma polymers
title Characterization of amorphous hydrogenated chlorinated plasma polymers
spellingShingle Characterization of amorphous hydrogenated chlorinated plasma polymers
Rossi, Diego [UNESP]
Chlorinated films
PECVD
Plasma polymers
Tauc gap
title_short Characterization of amorphous hydrogenated chlorinated plasma polymers
title_full Characterization of amorphous hydrogenated chlorinated plasma polymers
title_fullStr Characterization of amorphous hydrogenated chlorinated plasma polymers
title_full_unstemmed Characterization of amorphous hydrogenated chlorinated plasma polymers
title_sort Characterization of amorphous hydrogenated chlorinated plasma polymers
author Rossi, Diego [UNESP]
author_facet Rossi, Diego [UNESP]
Schreiner, Wido H.
Durrant, Steven F. [UNESP]
author_role author
author2 Schreiner, Wido H.
Durrant, Steven F. [UNESP]
author2_role author
author
dc.contributor.none.fl_str_mv Universidade Estadual Paulista (Unesp)
Universidade Federal de Paraná
dc.contributor.author.fl_str_mv Rossi, Diego [UNESP]
Schreiner, Wido H.
Durrant, Steven F. [UNESP]
dc.subject.por.fl_str_mv Chlorinated films
PECVD
Plasma polymers
Tauc gap
topic Chlorinated films
PECVD
Plasma polymers
Tauc gap
description Thin films were produced by plasma enhanced chemical vapor deposition from propanol-chloroform-argon mixtures. The main system parameter studied was the percentage of chloroform in the chamber feed, CCl. Plasma polymers doped with chlorine were produced at deposition rates of up to 110 nm min-1. As revealed by infrared- and X-ray photoelectron spectroscopy, the films consisted of a hydrogenated carbon matrix with a carbon content of at least 80 at.%, and a roughly constant oxygen content of about 12 at.%. A maximum chlorine content of ~8 at.% was obtained. The surface contact angle of the films was around 75°, and was reduced slightly at greater chlorine contents. Optical properties were obtained from ultraviolet-visible-near infrared spectroscopic data. While the refractive index of the films was around 1.56 independently of CCl, the chlorinated films showed a distinct optical gap of ~2.5 eV compared to ~1.9 eV for the unchlorinated film.
publishDate 2016
dc.date.none.fl_str_mv 2016-03-15
2018-12-11T17:27:31Z
2018-12-11T17:27:31Z
dc.type.status.fl_str_mv info:eu-repo/semantics/publishedVersion
dc.type.driver.fl_str_mv info:eu-repo/semantics/article
format article
status_str publishedVersion
dc.identifier.uri.fl_str_mv http://dx.doi.org/10.1016/j.surfcoat.2016.01.053
Surface and Coatings Technology, v. 289, p. 118-123.
0257-8972
http://hdl.handle.net/11449/177873
10.1016/j.surfcoat.2016.01.053
2-s2.0-84960491302
2-s2.0-84960491302.pdf
url http://dx.doi.org/10.1016/j.surfcoat.2016.01.053
http://hdl.handle.net/11449/177873
identifier_str_mv Surface and Coatings Technology, v. 289, p. 118-123.
0257-8972
10.1016/j.surfcoat.2016.01.053
2-s2.0-84960491302
2-s2.0-84960491302.pdf
dc.language.iso.fl_str_mv eng
language eng
dc.relation.none.fl_str_mv Surface and Coatings Technology
0,928
dc.rights.driver.fl_str_mv info:eu-repo/semantics/openAccess
eu_rights_str_mv openAccess
dc.format.none.fl_str_mv 118-123
application/pdf
dc.source.none.fl_str_mv Scopus
reponame:Repositório Institucional da UNESP
instname:Universidade Estadual Paulista (UNESP)
instacron:UNESP
instname_str Universidade Estadual Paulista (UNESP)
instacron_str UNESP
institution UNESP
reponame_str Repositório Institucional da UNESP
collection Repositório Institucional da UNESP
repository.name.fl_str_mv Repositório Institucional da UNESP - Universidade Estadual Paulista (UNESP)
repository.mail.fl_str_mv
_version_ 1808129550734852096