Chemical species from diethylene glycol-dimethyl ether/argon discharges investigated at low pressure by mass spectrometry
Autor(a) principal: | |
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Data de Publicação: | 2015 |
Outros Autores: | , |
Tipo de documento: | Artigo |
Idioma: | eng |
Título da fonte: | Repositório Institucional da UNESP |
Texto Completo: | http://dx.doi.org/10.1016/j.vacuum.2015.05.013 http://hdl.handle.net/11449/168094 |
Resumo: | Mass spectrometry is an important technique to investigate vacuum and discharges maintained at low or high pressure. It has been used to investigate plasma discharges from organic and inorganic gases or vapors. Plasma of organic gases or vapor can produce materials with interesting technological application. In this work, it was used to investigate the plasma discharges from diethylene glycol dimethyl-ether (diglyme)/argon at low pressure. The discharges occurred in a cylindrical stainless steel reactor, excited at 13.56 MHz from 10 Pa to 30 Pa as a function of partial pressure of the diglyme/argon mixture for different radio frequency powers between 1 and 40 W. The species assigned to H+ (m/z = 1), CH3+ (m/z = 15), CHO+ (m/z = 29), CH3O+ (m/z = 31), CH2CH2O+ (m/z = 44) and CH3OCH2CH2+ (m/z = 59) were investigated. The molecular structure of the films produced from these plasmas was analyzed by FTIR spectroscopy technique presenting C-O; C-O-C; C-H; C=C and O-H bonds. |
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Chemical species from diethylene glycol-dimethyl ether/argon discharges investigated at low pressure by mass spectrometryArgonDiethylene glycol dimethyl-etherDischargeMass spectrometryMolecular structurePlasma polymerMass spectrometry is an important technique to investigate vacuum and discharges maintained at low or high pressure. It has been used to investigate plasma discharges from organic and inorganic gases or vapors. Plasma of organic gases or vapor can produce materials with interesting technological application. In this work, it was used to investigate the plasma discharges from diethylene glycol dimethyl-ether (diglyme)/argon at low pressure. The discharges occurred in a cylindrical stainless steel reactor, excited at 13.56 MHz from 10 Pa to 30 Pa as a function of partial pressure of the diglyme/argon mixture for different radio frequency powers between 1 and 40 W. The species assigned to H+ (m/z = 1), CH3+ (m/z = 15), CHO+ (m/z = 29), CH3O+ (m/z = 31), CH2CH2O+ (m/z = 44) and CH3OCH2CH2+ (m/z = 59) were investigated. The molecular structure of the films produced from these plasmas was analyzed by FTIR spectroscopy technique presenting C-O; C-O-C; C-H; C=C and O-H bonds.Faculdade de Engenharia, UNESP - Univ Estadual Paulista, Campus of GuaratinguetáFaculdade de Engenharia, UNESP - Univ Estadual Paulista, Campus of GuaratinguetáUniversidade Estadual Paulista (Unesp)Moreira, P. W.P. [UNESP]Mota, R. P. [UNESP]Honda, R. Y. [UNESP]2018-12-11T16:39:43Z2018-12-11T16:39:43Z2015-12-01info:eu-repo/semantics/publishedVersioninfo:eu-repo/semantics/article321-325application/pdfhttp://dx.doi.org/10.1016/j.vacuum.2015.05.013Vacuum, v. 122, p. 321-325.0042-207Xhttp://hdl.handle.net/11449/16809410.1016/j.vacuum.2015.05.0132-s2.0-849454430212-s2.0-84945443021.pdfScopusreponame:Repositório Institucional da UNESPinstname:Universidade Estadual Paulista (UNESP)instacron:UNESPengVacuuminfo:eu-repo/semantics/openAccess2023-10-07T06:05:26Zoai:repositorio.unesp.br:11449/168094Repositório InstitucionalPUBhttp://repositorio.unesp.br/oai/requestopendoar:29462023-10-07T06:05:26Repositório Institucional da UNESP - Universidade Estadual Paulista (UNESP)false |
dc.title.none.fl_str_mv |
Chemical species from diethylene glycol-dimethyl ether/argon discharges investigated at low pressure by mass spectrometry |
title |
Chemical species from diethylene glycol-dimethyl ether/argon discharges investigated at low pressure by mass spectrometry |
spellingShingle |
Chemical species from diethylene glycol-dimethyl ether/argon discharges investigated at low pressure by mass spectrometry Moreira, P. W.P. [UNESP] Argon Diethylene glycol dimethyl-ether Discharge Mass spectrometry Molecular structure Plasma polymer |
title_short |
Chemical species from diethylene glycol-dimethyl ether/argon discharges investigated at low pressure by mass spectrometry |
title_full |
Chemical species from diethylene glycol-dimethyl ether/argon discharges investigated at low pressure by mass spectrometry |
title_fullStr |
Chemical species from diethylene glycol-dimethyl ether/argon discharges investigated at low pressure by mass spectrometry |
title_full_unstemmed |
Chemical species from diethylene glycol-dimethyl ether/argon discharges investigated at low pressure by mass spectrometry |
title_sort |
Chemical species from diethylene glycol-dimethyl ether/argon discharges investigated at low pressure by mass spectrometry |
author |
Moreira, P. W.P. [UNESP] |
author_facet |
Moreira, P. W.P. [UNESP] Mota, R. P. [UNESP] Honda, R. Y. [UNESP] |
author_role |
author |
author2 |
Mota, R. P. [UNESP] Honda, R. Y. [UNESP] |
author2_role |
author author |
dc.contributor.none.fl_str_mv |
Universidade Estadual Paulista (Unesp) |
dc.contributor.author.fl_str_mv |
Moreira, P. W.P. [UNESP] Mota, R. P. [UNESP] Honda, R. Y. [UNESP] |
dc.subject.por.fl_str_mv |
Argon Diethylene glycol dimethyl-ether Discharge Mass spectrometry Molecular structure Plasma polymer |
topic |
Argon Diethylene glycol dimethyl-ether Discharge Mass spectrometry Molecular structure Plasma polymer |
description |
Mass spectrometry is an important technique to investigate vacuum and discharges maintained at low or high pressure. It has been used to investigate plasma discharges from organic and inorganic gases or vapors. Plasma of organic gases or vapor can produce materials with interesting technological application. In this work, it was used to investigate the plasma discharges from diethylene glycol dimethyl-ether (diglyme)/argon at low pressure. The discharges occurred in a cylindrical stainless steel reactor, excited at 13.56 MHz from 10 Pa to 30 Pa as a function of partial pressure of the diglyme/argon mixture for different radio frequency powers between 1 and 40 W. The species assigned to H+ (m/z = 1), CH3+ (m/z = 15), CHO+ (m/z = 29), CH3O+ (m/z = 31), CH2CH2O+ (m/z = 44) and CH3OCH2CH2+ (m/z = 59) were investigated. The molecular structure of the films produced from these plasmas was analyzed by FTIR spectroscopy technique presenting C-O; C-O-C; C-H; C=C and O-H bonds. |
publishDate |
2015 |
dc.date.none.fl_str_mv |
2015-12-01 2018-12-11T16:39:43Z 2018-12-11T16:39:43Z |
dc.type.status.fl_str_mv |
info:eu-repo/semantics/publishedVersion |
dc.type.driver.fl_str_mv |
info:eu-repo/semantics/article |
format |
article |
status_str |
publishedVersion |
dc.identifier.uri.fl_str_mv |
http://dx.doi.org/10.1016/j.vacuum.2015.05.013 Vacuum, v. 122, p. 321-325. 0042-207X http://hdl.handle.net/11449/168094 10.1016/j.vacuum.2015.05.013 2-s2.0-84945443021 2-s2.0-84945443021.pdf |
url |
http://dx.doi.org/10.1016/j.vacuum.2015.05.013 http://hdl.handle.net/11449/168094 |
identifier_str_mv |
Vacuum, v. 122, p. 321-325. 0042-207X 10.1016/j.vacuum.2015.05.013 2-s2.0-84945443021 2-s2.0-84945443021.pdf |
dc.language.iso.fl_str_mv |
eng |
language |
eng |
dc.relation.none.fl_str_mv |
Vacuum |
dc.rights.driver.fl_str_mv |
info:eu-repo/semantics/openAccess |
eu_rights_str_mv |
openAccess |
dc.format.none.fl_str_mv |
321-325 application/pdf |
dc.source.none.fl_str_mv |
Scopus reponame:Repositório Institucional da UNESP instname:Universidade Estadual Paulista (UNESP) instacron:UNESP |
instname_str |
Universidade Estadual Paulista (UNESP) |
instacron_str |
UNESP |
institution |
UNESP |
reponame_str |
Repositório Institucional da UNESP |
collection |
Repositório Institucional da UNESP |
repository.name.fl_str_mv |
Repositório Institucional da UNESP - Universidade Estadual Paulista (UNESP) |
repository.mail.fl_str_mv |
|
_version_ |
1799964468521730048 |