Influencia del tratamiento térmico en la cristalización y rugosidad de películas delgadas de LiNbO3 depositadas por el método Spin Coating
| Autor(a) principal: | |
|---|---|
| Data de Publicação: | 2001 |
| Outros Autores: | , , , , , , |
| Tipo de documento: | Artigo |
| Idioma: | spa |
| Título da fonte: | Repositório Institucional da UNESP |
| Texto Completo: | http://boletines.secv.es/upload/20090505112758.200140275.pdf http://dx.doi.org/10.3989/cyv.2001.v40.i4.736 http://hdl.handle.net/11449/66617 |
Resumo: | Lithium niobate (LiNbO3) thin films with 1/1 stoichiometry were prepared by a spin-coating from polymeric precursor method. The films deposited on silicon (100) substrates, were thermally treated from 400° to 600°C for 3 hours in order to study the influence of thermal treatment on the crystallinity, microstructure, grain size and roughness. X-ray diffraction (XRD) results showed that LiNbO3 phase crystallizes at low temperature (400°C). It was observed by scanning electron microscopy (SEM) that it is possible to obtain dense thin films at temperatures around 500°C. The atomic force microscopy (AFM) results showed that the grain size and roughness are strongly influenced by the annealing temperature. |
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Influencia del tratamiento térmico en la cristalización y rugosidad de películas delgadas de LiNbO3 depositadas por el método Spin CoatingInfluence of thermal treatment on the crystallization and roughness of LinbO3 thin films deposited by a spin coating methodLiNbO3Spin-coatingThermal TreatmentThin FilmsLithium niobate (LiNbO3) thin films with 1/1 stoichiometry were prepared by a spin-coating from polymeric precursor method. The films deposited on silicon (100) substrates, were thermally treated from 400° to 600°C for 3 hours in order to study the influence of thermal treatment on the crystallinity, microstructure, grain size and roughness. X-ray diffraction (XRD) results showed that LiNbO3 phase crystallizes at low temperature (400°C). It was observed by scanning electron microscopy (SEM) that it is possible to obtain dense thin films at temperatures around 500°C. The atomic force microscopy (AFM) results showed that the grain size and roughness are strongly influenced by the annealing temperature.LIEC Instituto de Química de Araraquara UNESP, CP-355, 14801-970 Araraquara-SPLIEC Instituto de Química de Araraquara UNESP, CP-355, 14801-970 Araraquara-SPUniversidade Estadual Paulista (Unesp)Zirpoli, A. [UNESP]Varela, José Arana [UNESP]González, A. H M [UNESP]Gimenez, R. [UNESP]Cavalheiro, A. A. [UNESP]Cilense, M. [UNESP]Zaghete, M. A. [UNESP]Stojanovic, B. [UNESP]2014-05-27T11:20:19Z2014-05-27T11:20:19Z2001-12-01info:eu-repo/semantics/publishedVersioninfo:eu-repo/semantics/article275-278application/pdfhttp://boletines.secv.es/upload/20090505112758.200140275.pdfhttp://dx.doi.org/10.3989/cyv.2001.v40.i4.736Boletin de la Sociedad Espanola de Ceramica y Vidrio, v. 40, n. 4, p. 275-278, 2001.0366-3175http://hdl.handle.net/11449/6661710.3989/cyv.2001.v40.i4.736WOS:0001709986000052-s2.0-525491077462-s2.0-52549107746.pdf9128353103083394Scopusreponame:Repositório Institucional da UNESPinstname:Universidade Estadual Paulista (UNESP)instacron:UNESPspaBoletin de la Sociedad Espanola de Ceramica y Vidrio1.0490,264info:eu-repo/semantics/openAccess2023-10-31T06:07:35Zoai:repositorio.unesp.br:11449/66617Repositório InstitucionalPUBhttp://repositorio.unesp.br/oai/requestopendoar:29462024-08-05T16:30:44.247703Repositório Institucional da UNESP - Universidade Estadual Paulista (UNESP)false |
| dc.title.none.fl_str_mv |
Influencia del tratamiento térmico en la cristalización y rugosidad de películas delgadas de LiNbO3 depositadas por el método Spin Coating Influence of thermal treatment on the crystallization and roughness of LinbO3 thin films deposited by a spin coating method |
| title |
Influencia del tratamiento térmico en la cristalización y rugosidad de películas delgadas de LiNbO3 depositadas por el método Spin Coating |
| spellingShingle |
Influencia del tratamiento térmico en la cristalización y rugosidad de películas delgadas de LiNbO3 depositadas por el método Spin Coating Zirpoli, A. [UNESP] LiNbO3 Spin-coating Thermal Treatment Thin Films |
| title_short |
Influencia del tratamiento térmico en la cristalización y rugosidad de películas delgadas de LiNbO3 depositadas por el método Spin Coating |
| title_full |
Influencia del tratamiento térmico en la cristalización y rugosidad de películas delgadas de LiNbO3 depositadas por el método Spin Coating |
| title_fullStr |
Influencia del tratamiento térmico en la cristalización y rugosidad de películas delgadas de LiNbO3 depositadas por el método Spin Coating |
| title_full_unstemmed |
Influencia del tratamiento térmico en la cristalización y rugosidad de películas delgadas de LiNbO3 depositadas por el método Spin Coating |
| title_sort |
Influencia del tratamiento térmico en la cristalización y rugosidad de películas delgadas de LiNbO3 depositadas por el método Spin Coating |
| author |
Zirpoli, A. [UNESP] |
| author_facet |
Zirpoli, A. [UNESP] Varela, José Arana [UNESP] González, A. H M [UNESP] Gimenez, R. [UNESP] Cavalheiro, A. A. [UNESP] Cilense, M. [UNESP] Zaghete, M. A. [UNESP] Stojanovic, B. [UNESP] |
| author_role |
author |
| author2 |
Varela, José Arana [UNESP] González, A. H M [UNESP] Gimenez, R. [UNESP] Cavalheiro, A. A. [UNESP] Cilense, M. [UNESP] Zaghete, M. A. [UNESP] Stojanovic, B. [UNESP] |
| author2_role |
author author author author author author author |
| dc.contributor.none.fl_str_mv |
Universidade Estadual Paulista (Unesp) |
| dc.contributor.author.fl_str_mv |
Zirpoli, A. [UNESP] Varela, José Arana [UNESP] González, A. H M [UNESP] Gimenez, R. [UNESP] Cavalheiro, A. A. [UNESP] Cilense, M. [UNESP] Zaghete, M. A. [UNESP] Stojanovic, B. [UNESP] |
| dc.subject.por.fl_str_mv |
LiNbO3 Spin-coating Thermal Treatment Thin Films |
| topic |
LiNbO3 Spin-coating Thermal Treatment Thin Films |
| description |
Lithium niobate (LiNbO3) thin films with 1/1 stoichiometry were prepared by a spin-coating from polymeric precursor method. The films deposited on silicon (100) substrates, were thermally treated from 400° to 600°C for 3 hours in order to study the influence of thermal treatment on the crystallinity, microstructure, grain size and roughness. X-ray diffraction (XRD) results showed that LiNbO3 phase crystallizes at low temperature (400°C). It was observed by scanning electron microscopy (SEM) that it is possible to obtain dense thin films at temperatures around 500°C. The atomic force microscopy (AFM) results showed that the grain size and roughness are strongly influenced by the annealing temperature. |
| publishDate |
2001 |
| dc.date.none.fl_str_mv |
2001-12-01 2014-05-27T11:20:19Z 2014-05-27T11:20:19Z |
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info:eu-repo/semantics/publishedVersion |
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info:eu-repo/semantics/article |
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article |
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publishedVersion |
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http://boletines.secv.es/upload/20090505112758.200140275.pdf http://dx.doi.org/10.3989/cyv.2001.v40.i4.736 Boletin de la Sociedad Espanola de Ceramica y Vidrio, v. 40, n. 4, p. 275-278, 2001. 0366-3175 http://hdl.handle.net/11449/66617 10.3989/cyv.2001.v40.i4.736 WOS:000170998600005 2-s2.0-52549107746 2-s2.0-52549107746.pdf 9128353103083394 |
| url |
http://boletines.secv.es/upload/20090505112758.200140275.pdf http://dx.doi.org/10.3989/cyv.2001.v40.i4.736 http://hdl.handle.net/11449/66617 |
| identifier_str_mv |
Boletin de la Sociedad Espanola de Ceramica y Vidrio, v. 40, n. 4, p. 275-278, 2001. 0366-3175 10.3989/cyv.2001.v40.i4.736 WOS:000170998600005 2-s2.0-52549107746 2-s2.0-52549107746.pdf 9128353103083394 |
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spa |
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spa |
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Boletin de la Sociedad Espanola de Ceramica y Vidrio 1.049 0,264 |
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info:eu-repo/semantics/openAccess |
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openAccess |
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275-278 application/pdf |
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Scopus reponame:Repositório Institucional da UNESP instname:Universidade Estadual Paulista (UNESP) instacron:UNESP |
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Universidade Estadual Paulista (UNESP) |
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UNESP |
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UNESP |
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Repositório Institucional da UNESP |
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Repositório Institucional da UNESP |
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Repositório Institucional da UNESP - Universidade Estadual Paulista (UNESP) |
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1808128663869194240 |