Oxide-cladding aluminum nitride photonic crystal slab: Design and investigation of material dispersion and fabrication induced disorder
Autor(a) principal: | |
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Data de Publicação: | 2016 |
Outros Autores: | , , , , |
Tipo de documento: | Artigo |
Idioma: | eng |
Título da fonte: | Repositório Institucional da UNESP |
Texto Completo: | http://dx.doi.org/10.1063/1.4939773 http://hdl.handle.net/11449/168327 |
Resumo: | Photonic crystal slabs with a lower-index material surrounding the core layer are an attractive choice to circumvent the drawbacks in the fabrication of membranes suspended in air. In this work we propose a photonic crystal (PhC) slab structure composed of a triangular pattern of air holes in a multilayer thin film of aluminum nitride embedded in silicon dioxide layers designed for operating around 450 nm wavelengths. We show the design of an ideal structure and analyze the effects of material dispersion based on a first-order correction perturbation theory approach using dielectric functions obtained by experimental measurements of the thin film materials. Numerical methods were used to investigate the effects of fabrication induced disorder of typical nanofabrication processes on the bandgap size and spectral response of the proposed device. Deviation in holes radii and positions were introduced in the proposed PhC slab model with a Gaussian distribution profile. Impacts of slope in holes sidewalls that might result from the dry etching of AlN were also evaluated. The results show that for operation at the midgap frequency, slope in holes sidewalls is more critical than displacements in holes sizes and positions. |
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Repositório Institucional da UNESP |
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Oxide-cladding aluminum nitride photonic crystal slab: Design and investigation of material dispersion and fabrication induced disorderPhotonic crystal slabs with a lower-index material surrounding the core layer are an attractive choice to circumvent the drawbacks in the fabrication of membranes suspended in air. In this work we propose a photonic crystal (PhC) slab structure composed of a triangular pattern of air holes in a multilayer thin film of aluminum nitride embedded in silicon dioxide layers designed for operating around 450 nm wavelengths. We show the design of an ideal structure and analyze the effects of material dispersion based on a first-order correction perturbation theory approach using dielectric functions obtained by experimental measurements of the thin film materials. Numerical methods were used to investigate the effects of fabrication induced disorder of typical nanofabrication processes on the bandgap size and spectral response of the proposed device. Deviation in holes radii and positions were introduced in the proposed PhC slab model with a Gaussian distribution profile. Impacts of slope in holes sidewalls that might result from the dry etching of AlN were also evaluated. The results show that for operation at the midgap frequency, slope in holes sidewalls is more critical than displacements in holes sizes and positions.Electronic Systems Engineering Department University of São PauloUNESP-São Paulo State UniversityDepartment of Physics Federal University of Minas GeraisUNESP-São Paulo State UniversityUniversidade de São Paulo (USP)Universidade Estadual Paulista (Unesp)Universidade Federal de Minas Gerais (UFMG)Melo, E. G.Carvalho, D. O. [UNESP]Ferlauto, A. S.Alvarado, M. A.Carreño, M. N.P.Alayo, M. I.2018-12-11T16:40:47Z2018-12-11T16:40:47Z2016-01-14info:eu-repo/semantics/publishedVersioninfo:eu-repo/semantics/articleapplication/pdfhttp://dx.doi.org/10.1063/1.4939773Journal of Applied Physics, v. 119, n. 2, 2016.1089-75500021-8979http://hdl.handle.net/11449/16832710.1063/1.49397732-s2.0-849555058832-s2.0-84955505883.pdfScopusreponame:Repositório Institucional da UNESPinstname:Universidade Estadual Paulista (UNESP)instacron:UNESPengJournal of Applied Physics0,7390,739info:eu-repo/semantics/openAccess2024-01-28T06:52:28Zoai:repositorio.unesp.br:11449/168327Repositório InstitucionalPUBhttp://repositorio.unesp.br/oai/requestopendoar:29462024-01-28T06:52:28Repositório Institucional da UNESP - Universidade Estadual Paulista (UNESP)false |
dc.title.none.fl_str_mv |
Oxide-cladding aluminum nitride photonic crystal slab: Design and investigation of material dispersion and fabrication induced disorder |
title |
Oxide-cladding aluminum nitride photonic crystal slab: Design and investigation of material dispersion and fabrication induced disorder |
spellingShingle |
Oxide-cladding aluminum nitride photonic crystal slab: Design and investigation of material dispersion and fabrication induced disorder Melo, E. G. |
title_short |
Oxide-cladding aluminum nitride photonic crystal slab: Design and investigation of material dispersion and fabrication induced disorder |
title_full |
Oxide-cladding aluminum nitride photonic crystal slab: Design and investigation of material dispersion and fabrication induced disorder |
title_fullStr |
Oxide-cladding aluminum nitride photonic crystal slab: Design and investigation of material dispersion and fabrication induced disorder |
title_full_unstemmed |
Oxide-cladding aluminum nitride photonic crystal slab: Design and investigation of material dispersion and fabrication induced disorder |
title_sort |
Oxide-cladding aluminum nitride photonic crystal slab: Design and investigation of material dispersion and fabrication induced disorder |
author |
Melo, E. G. |
author_facet |
Melo, E. G. Carvalho, D. O. [UNESP] Ferlauto, A. S. Alvarado, M. A. Carreño, M. N.P. Alayo, M. I. |
author_role |
author |
author2 |
Carvalho, D. O. [UNESP] Ferlauto, A. S. Alvarado, M. A. Carreño, M. N.P. Alayo, M. I. |
author2_role |
author author author author author |
dc.contributor.none.fl_str_mv |
Universidade de São Paulo (USP) Universidade Estadual Paulista (Unesp) Universidade Federal de Minas Gerais (UFMG) |
dc.contributor.author.fl_str_mv |
Melo, E. G. Carvalho, D. O. [UNESP] Ferlauto, A. S. Alvarado, M. A. Carreño, M. N.P. Alayo, M. I. |
description |
Photonic crystal slabs with a lower-index material surrounding the core layer are an attractive choice to circumvent the drawbacks in the fabrication of membranes suspended in air. In this work we propose a photonic crystal (PhC) slab structure composed of a triangular pattern of air holes in a multilayer thin film of aluminum nitride embedded in silicon dioxide layers designed for operating around 450 nm wavelengths. We show the design of an ideal structure and analyze the effects of material dispersion based on a first-order correction perturbation theory approach using dielectric functions obtained by experimental measurements of the thin film materials. Numerical methods were used to investigate the effects of fabrication induced disorder of typical nanofabrication processes on the bandgap size and spectral response of the proposed device. Deviation in holes radii and positions were introduced in the proposed PhC slab model with a Gaussian distribution profile. Impacts of slope in holes sidewalls that might result from the dry etching of AlN were also evaluated. The results show that for operation at the midgap frequency, slope in holes sidewalls is more critical than displacements in holes sizes and positions. |
publishDate |
2016 |
dc.date.none.fl_str_mv |
2016-01-14 2018-12-11T16:40:47Z 2018-12-11T16:40:47Z |
dc.type.status.fl_str_mv |
info:eu-repo/semantics/publishedVersion |
dc.type.driver.fl_str_mv |
info:eu-repo/semantics/article |
format |
article |
status_str |
publishedVersion |
dc.identifier.uri.fl_str_mv |
http://dx.doi.org/10.1063/1.4939773 Journal of Applied Physics, v. 119, n. 2, 2016. 1089-7550 0021-8979 http://hdl.handle.net/11449/168327 10.1063/1.4939773 2-s2.0-84955505883 2-s2.0-84955505883.pdf |
url |
http://dx.doi.org/10.1063/1.4939773 http://hdl.handle.net/11449/168327 |
identifier_str_mv |
Journal of Applied Physics, v. 119, n. 2, 2016. 1089-7550 0021-8979 10.1063/1.4939773 2-s2.0-84955505883 2-s2.0-84955505883.pdf |
dc.language.iso.fl_str_mv |
eng |
language |
eng |
dc.relation.none.fl_str_mv |
Journal of Applied Physics 0,739 0,739 |
dc.rights.driver.fl_str_mv |
info:eu-repo/semantics/openAccess |
eu_rights_str_mv |
openAccess |
dc.format.none.fl_str_mv |
application/pdf |
dc.source.none.fl_str_mv |
Scopus reponame:Repositório Institucional da UNESP instname:Universidade Estadual Paulista (UNESP) instacron:UNESP |
instname_str |
Universidade Estadual Paulista (UNESP) |
instacron_str |
UNESP |
institution |
UNESP |
reponame_str |
Repositório Institucional da UNESP |
collection |
Repositório Institucional da UNESP |
repository.name.fl_str_mv |
Repositório Institucional da UNESP - Universidade Estadual Paulista (UNESP) |
repository.mail.fl_str_mv |
|
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1799965753550569472 |