Photothermal study of RF-plasma polymerized hexamethyldisilazane thin films

Detalhes bibliográficos
Autor(a) principal: Jiménez-Pérez, J. L.
Data de Publicação: 2015
Outros Autores: Algatti, M. A. [UNESP], Cruz San Martin, V., Moreira Júnior, P. W.P. [UNESP], Mota, R. R.P. [UNESP], Correa Pacheco, Z. N., Cruz-Orea, A., Sánchez Ramírez, J. F.
Tipo de documento: Artigo
Idioma: eng
Título da fonte: Repositório Institucional da UNESP
Texto Completo: http://dx.doi.org/10.1016/j.mssp.2015.03.035
http://hdl.handle.net/11449/171865
Resumo: Plasma polymerization by RF excited low pressure plasmas is a powerful technique for synthesizing thin films for a wide range of applications such in microelectronics, biomaterials and aeronautical industries. Among these applications plasma polymerized hexamethyldisilazane (HMDSN here in) is a promising material due its biocompatibility, optical and electrical properties. In the present paper, we reported the thermal diffusivity measurements of plasma polymerized HMDSN thin films using the probe beam deflection technique (PBD). The samples are thermally thin and optically transparent, with thicknesses ranging from 170 to 600 nm, difficulting their thermal characterization by other photo-thermal techniques (photoacoustic and pyroelectric). PBD measurements were carried out with a diode (20 mW, λ=640 nm) and a HeNe (0.9 mW, λ=632 nm) laser, used as pump source and probe beam, respectively. The probe beam was focused close to the sample surface and its direction was perpendicular to the pump beam. The transverse PBD in skimming configuration is employed and the deflection signal is analyzed using the phase method for the determination of thermal diffusivity. The results show the decreasing of thermal diffusivity with the decreasing of film thickness. HMDSN film's thermal diffusivity values are reported in this paper for the first time being in the range of typical polymeric samples.
id UNSP_f0b23ef89fce08828a081a177324e312
oai_identifier_str oai:repositorio.unesp.br:11449/171865
network_acronym_str UNSP
network_name_str Repositório Institucional da UNESP
repository_id_str 2946
spelling Photothermal study of RF-plasma polymerized hexamethyldisilazane thin filmsMirage effectPhoto-thermal beam deflectionPlasma-polymerized hexamethyldisilazane filmsThermal diffusivityPlasma polymerization by RF excited low pressure plasmas is a powerful technique for synthesizing thin films for a wide range of applications such in microelectronics, biomaterials and aeronautical industries. Among these applications plasma polymerized hexamethyldisilazane (HMDSN here in) is a promising material due its biocompatibility, optical and electrical properties. In the present paper, we reported the thermal diffusivity measurements of plasma polymerized HMDSN thin films using the probe beam deflection technique (PBD). The samples are thermally thin and optically transparent, with thicknesses ranging from 170 to 600 nm, difficulting their thermal characterization by other photo-thermal techniques (photoacoustic and pyroelectric). PBD measurements were carried out with a diode (20 mW, λ=640 nm) and a HeNe (0.9 mW, λ=632 nm) laser, used as pump source and probe beam, respectively. The probe beam was focused close to the sample surface and its direction was perpendicular to the pump beam. The transverse PBD in skimming configuration is employed and the deflection signal is analyzed using the phase method for the determination of thermal diffusivity. The results show the decreasing of thermal diffusivity with the decreasing of film thickness. HMDSN film's thermal diffusivity values are reported in this paper for the first time being in the range of typical polymeric samples.Consejo Nacional de Ciencia y TecnologíaUnidad Profesional Interdisciplinaria en Ingeniería y Tecnologías Avanzadas, Av.Inst. Politecnico Nacional No. 2580FEG-DFQ-UNESP, Campus de Guaratinguetá, Av. Ariberto Pereira da Cunha 333Escuela Superior de Física y Matemáticas, Av. Instituto Politécnico Nacional S/NDepartamento de Física, Centro de Investigación y de Estudios Avanzados, Instituto Politécnico Nacional, Av. Inst. Politecnico Nacional 2508Centro de Investigación en Biotecnología Aplicada, Carret. Est. Tecuexcomac-Tepetitla Km 1.5FEG-DFQ-UNESP, Campus de Guaratinguetá, Av. Ariberto Pereira da Cunha 333Unidad Profesional Interdisciplinaria en Ingeniería y Tecnologías AvanzadasUniversidade Estadual Paulista (Unesp)Escuela Superior de Física y MatemáticasCentro de Investigación en Biotecnología AplicadaJiménez-Pérez, J. L.Algatti, M. A. [UNESP]Cruz San Martin, V.Moreira Júnior, P. W.P. [UNESP]Mota, R. R.P. [UNESP]Correa Pacheco, Z. N.Cruz-Orea, A.Sánchez Ramírez, J. F.2018-12-11T16:57:30Z2018-12-11T16:57:30Z2015-06-03info:eu-repo/semantics/publishedVersioninfo:eu-repo/semantics/article223-228application/pdfhttp://dx.doi.org/10.1016/j.mssp.2015.03.035Materials Science in Semiconductor Processing, v. 37, p. 223-228.1369-8001http://hdl.handle.net/11449/17186510.1016/j.mssp.2015.03.0352-s2.0-849303836492-s2.0-84930383649.pdfScopusreponame:Repositório Institucional da UNESPinstname:Universidade Estadual Paulista (UNESP)instacron:UNESPengMaterials Science in Semiconductor Processing0,634info:eu-repo/semantics/openAccess2024-07-01T20:52:08Zoai:repositorio.unesp.br:11449/171865Repositório InstitucionalPUBhttp://repositorio.unesp.br/oai/requestopendoar:29462024-08-05T16:44:44.178497Repositório Institucional da UNESP - Universidade Estadual Paulista (UNESP)false
dc.title.none.fl_str_mv Photothermal study of RF-plasma polymerized hexamethyldisilazane thin films
title Photothermal study of RF-plasma polymerized hexamethyldisilazane thin films
spellingShingle Photothermal study of RF-plasma polymerized hexamethyldisilazane thin films
Jiménez-Pérez, J. L.
Mirage effect
Photo-thermal beam deflection
Plasma-polymerized hexamethyldisilazane films
Thermal diffusivity
title_short Photothermal study of RF-plasma polymerized hexamethyldisilazane thin films
title_full Photothermal study of RF-plasma polymerized hexamethyldisilazane thin films
title_fullStr Photothermal study of RF-plasma polymerized hexamethyldisilazane thin films
title_full_unstemmed Photothermal study of RF-plasma polymerized hexamethyldisilazane thin films
title_sort Photothermal study of RF-plasma polymerized hexamethyldisilazane thin films
author Jiménez-Pérez, J. L.
author_facet Jiménez-Pérez, J. L.
Algatti, M. A. [UNESP]
Cruz San Martin, V.
Moreira Júnior, P. W.P. [UNESP]
Mota, R. R.P. [UNESP]
Correa Pacheco, Z. N.
Cruz-Orea, A.
Sánchez Ramírez, J. F.
author_role author
author2 Algatti, M. A. [UNESP]
Cruz San Martin, V.
Moreira Júnior, P. W.P. [UNESP]
Mota, R. R.P. [UNESP]
Correa Pacheco, Z. N.
Cruz-Orea, A.
Sánchez Ramírez, J. F.
author2_role author
author
author
author
author
author
author
dc.contributor.none.fl_str_mv Unidad Profesional Interdisciplinaria en Ingeniería y Tecnologías Avanzadas
Universidade Estadual Paulista (Unesp)
Escuela Superior de Física y Matemáticas
Centro de Investigación en Biotecnología Aplicada
dc.contributor.author.fl_str_mv Jiménez-Pérez, J. L.
Algatti, M. A. [UNESP]
Cruz San Martin, V.
Moreira Júnior, P. W.P. [UNESP]
Mota, R. R.P. [UNESP]
Correa Pacheco, Z. N.
Cruz-Orea, A.
Sánchez Ramírez, J. F.
dc.subject.por.fl_str_mv Mirage effect
Photo-thermal beam deflection
Plasma-polymerized hexamethyldisilazane films
Thermal diffusivity
topic Mirage effect
Photo-thermal beam deflection
Plasma-polymerized hexamethyldisilazane films
Thermal diffusivity
description Plasma polymerization by RF excited low pressure plasmas is a powerful technique for synthesizing thin films for a wide range of applications such in microelectronics, biomaterials and aeronautical industries. Among these applications plasma polymerized hexamethyldisilazane (HMDSN here in) is a promising material due its biocompatibility, optical and electrical properties. In the present paper, we reported the thermal diffusivity measurements of plasma polymerized HMDSN thin films using the probe beam deflection technique (PBD). The samples are thermally thin and optically transparent, with thicknesses ranging from 170 to 600 nm, difficulting their thermal characterization by other photo-thermal techniques (photoacoustic and pyroelectric). PBD measurements were carried out with a diode (20 mW, λ=640 nm) and a HeNe (0.9 mW, λ=632 nm) laser, used as pump source and probe beam, respectively. The probe beam was focused close to the sample surface and its direction was perpendicular to the pump beam. The transverse PBD in skimming configuration is employed and the deflection signal is analyzed using the phase method for the determination of thermal diffusivity. The results show the decreasing of thermal diffusivity with the decreasing of film thickness. HMDSN film's thermal diffusivity values are reported in this paper for the first time being in the range of typical polymeric samples.
publishDate 2015
dc.date.none.fl_str_mv 2015-06-03
2018-12-11T16:57:30Z
2018-12-11T16:57:30Z
dc.type.status.fl_str_mv info:eu-repo/semantics/publishedVersion
dc.type.driver.fl_str_mv info:eu-repo/semantics/article
format article
status_str publishedVersion
dc.identifier.uri.fl_str_mv http://dx.doi.org/10.1016/j.mssp.2015.03.035
Materials Science in Semiconductor Processing, v. 37, p. 223-228.
1369-8001
http://hdl.handle.net/11449/171865
10.1016/j.mssp.2015.03.035
2-s2.0-84930383649
2-s2.0-84930383649.pdf
url http://dx.doi.org/10.1016/j.mssp.2015.03.035
http://hdl.handle.net/11449/171865
identifier_str_mv Materials Science in Semiconductor Processing, v. 37, p. 223-228.
1369-8001
10.1016/j.mssp.2015.03.035
2-s2.0-84930383649
2-s2.0-84930383649.pdf
dc.language.iso.fl_str_mv eng
language eng
dc.relation.none.fl_str_mv Materials Science in Semiconductor Processing
0,634
dc.rights.driver.fl_str_mv info:eu-repo/semantics/openAccess
eu_rights_str_mv openAccess
dc.format.none.fl_str_mv 223-228
application/pdf
dc.source.none.fl_str_mv Scopus
reponame:Repositório Institucional da UNESP
instname:Universidade Estadual Paulista (UNESP)
instacron:UNESP
instname_str Universidade Estadual Paulista (UNESP)
instacron_str UNESP
institution UNESP
reponame_str Repositório Institucional da UNESP
collection Repositório Institucional da UNESP
repository.name.fl_str_mv Repositório Institucional da UNESP - Universidade Estadual Paulista (UNESP)
repository.mail.fl_str_mv
_version_ 1808128694666919936