Photothermal study of RF-plasma polymerized hexamethyldisilazane thin films
Autor(a) principal: | |
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Data de Publicação: | 2015 |
Outros Autores: | , , , , , , |
Tipo de documento: | Artigo |
Idioma: | eng |
Título da fonte: | Repositório Institucional da UNESP |
Texto Completo: | http://dx.doi.org/10.1016/j.mssp.2015.03.035 http://hdl.handle.net/11449/171865 |
Resumo: | Plasma polymerization by RF excited low pressure plasmas is a powerful technique for synthesizing thin films for a wide range of applications such in microelectronics, biomaterials and aeronautical industries. Among these applications plasma polymerized hexamethyldisilazane (HMDSN here in) is a promising material due its biocompatibility, optical and electrical properties. In the present paper, we reported the thermal diffusivity measurements of plasma polymerized HMDSN thin films using the probe beam deflection technique (PBD). The samples are thermally thin and optically transparent, with thicknesses ranging from 170 to 600 nm, difficulting their thermal characterization by other photo-thermal techniques (photoacoustic and pyroelectric). PBD measurements were carried out with a diode (20 mW, λ=640 nm) and a HeNe (0.9 mW, λ=632 nm) laser, used as pump source and probe beam, respectively. The probe beam was focused close to the sample surface and its direction was perpendicular to the pump beam. The transverse PBD in skimming configuration is employed and the deflection signal is analyzed using the phase method for the determination of thermal diffusivity. The results show the decreasing of thermal diffusivity with the decreasing of film thickness. HMDSN film's thermal diffusivity values are reported in this paper for the first time being in the range of typical polymeric samples. |
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Photothermal study of RF-plasma polymerized hexamethyldisilazane thin filmsMirage effectPhoto-thermal beam deflectionPlasma-polymerized hexamethyldisilazane filmsThermal diffusivityPlasma polymerization by RF excited low pressure plasmas is a powerful technique for synthesizing thin films for a wide range of applications such in microelectronics, biomaterials and aeronautical industries. Among these applications plasma polymerized hexamethyldisilazane (HMDSN here in) is a promising material due its biocompatibility, optical and electrical properties. In the present paper, we reported the thermal diffusivity measurements of plasma polymerized HMDSN thin films using the probe beam deflection technique (PBD). The samples are thermally thin and optically transparent, with thicknesses ranging from 170 to 600 nm, difficulting their thermal characterization by other photo-thermal techniques (photoacoustic and pyroelectric). PBD measurements were carried out with a diode (20 mW, λ=640 nm) and a HeNe (0.9 mW, λ=632 nm) laser, used as pump source and probe beam, respectively. The probe beam was focused close to the sample surface and its direction was perpendicular to the pump beam. The transverse PBD in skimming configuration is employed and the deflection signal is analyzed using the phase method for the determination of thermal diffusivity. The results show the decreasing of thermal diffusivity with the decreasing of film thickness. HMDSN film's thermal diffusivity values are reported in this paper for the first time being in the range of typical polymeric samples.Consejo Nacional de Ciencia y TecnologíaUnidad Profesional Interdisciplinaria en Ingeniería y Tecnologías Avanzadas, Av.Inst. Politecnico Nacional No. 2580FEG-DFQ-UNESP, Campus de Guaratinguetá, Av. Ariberto Pereira da Cunha 333Escuela Superior de Física y Matemáticas, Av. Instituto Politécnico Nacional S/NDepartamento de Física, Centro de Investigación y de Estudios Avanzados, Instituto Politécnico Nacional, Av. Inst. Politecnico Nacional 2508Centro de Investigación en Biotecnología Aplicada, Carret. Est. Tecuexcomac-Tepetitla Km 1.5FEG-DFQ-UNESP, Campus de Guaratinguetá, Av. Ariberto Pereira da Cunha 333Unidad Profesional Interdisciplinaria en Ingeniería y Tecnologías AvanzadasUniversidade Estadual Paulista (Unesp)Escuela Superior de Física y MatemáticasCentro de Investigación en Biotecnología AplicadaJiménez-Pérez, J. L.Algatti, M. A. [UNESP]Cruz San Martin, V.Moreira Júnior, P. W.P. [UNESP]Mota, R. R.P. [UNESP]Correa Pacheco, Z. N.Cruz-Orea, A.Sánchez Ramírez, J. F.2018-12-11T16:57:30Z2018-12-11T16:57:30Z2015-06-03info:eu-repo/semantics/publishedVersioninfo:eu-repo/semantics/article223-228application/pdfhttp://dx.doi.org/10.1016/j.mssp.2015.03.035Materials Science in Semiconductor Processing, v. 37, p. 223-228.1369-8001http://hdl.handle.net/11449/17186510.1016/j.mssp.2015.03.0352-s2.0-849303836492-s2.0-84930383649.pdfScopusreponame:Repositório Institucional da UNESPinstname:Universidade Estadual Paulista (UNESP)instacron:UNESPengMaterials Science in Semiconductor Processing0,634info:eu-repo/semantics/openAccess2024-07-01T20:52:08Zoai:repositorio.unesp.br:11449/171865Repositório InstitucionalPUBhttp://repositorio.unesp.br/oai/requestopendoar:29462024-08-05T16:44:44.178497Repositório Institucional da UNESP - Universidade Estadual Paulista (UNESP)false |
dc.title.none.fl_str_mv |
Photothermal study of RF-plasma polymerized hexamethyldisilazane thin films |
title |
Photothermal study of RF-plasma polymerized hexamethyldisilazane thin films |
spellingShingle |
Photothermal study of RF-plasma polymerized hexamethyldisilazane thin films Jiménez-Pérez, J. L. Mirage effect Photo-thermal beam deflection Plasma-polymerized hexamethyldisilazane films Thermal diffusivity |
title_short |
Photothermal study of RF-plasma polymerized hexamethyldisilazane thin films |
title_full |
Photothermal study of RF-plasma polymerized hexamethyldisilazane thin films |
title_fullStr |
Photothermal study of RF-plasma polymerized hexamethyldisilazane thin films |
title_full_unstemmed |
Photothermal study of RF-plasma polymerized hexamethyldisilazane thin films |
title_sort |
Photothermal study of RF-plasma polymerized hexamethyldisilazane thin films |
author |
Jiménez-Pérez, J. L. |
author_facet |
Jiménez-Pérez, J. L. Algatti, M. A. [UNESP] Cruz San Martin, V. Moreira Júnior, P. W.P. [UNESP] Mota, R. R.P. [UNESP] Correa Pacheco, Z. N. Cruz-Orea, A. Sánchez Ramírez, J. F. |
author_role |
author |
author2 |
Algatti, M. A. [UNESP] Cruz San Martin, V. Moreira Júnior, P. W.P. [UNESP] Mota, R. R.P. [UNESP] Correa Pacheco, Z. N. Cruz-Orea, A. Sánchez Ramírez, J. F. |
author2_role |
author author author author author author author |
dc.contributor.none.fl_str_mv |
Unidad Profesional Interdisciplinaria en Ingeniería y Tecnologías Avanzadas Universidade Estadual Paulista (Unesp) Escuela Superior de Física y Matemáticas Centro de Investigación en Biotecnología Aplicada |
dc.contributor.author.fl_str_mv |
Jiménez-Pérez, J. L. Algatti, M. A. [UNESP] Cruz San Martin, V. Moreira Júnior, P. W.P. [UNESP] Mota, R. R.P. [UNESP] Correa Pacheco, Z. N. Cruz-Orea, A. Sánchez Ramírez, J. F. |
dc.subject.por.fl_str_mv |
Mirage effect Photo-thermal beam deflection Plasma-polymerized hexamethyldisilazane films Thermal diffusivity |
topic |
Mirage effect Photo-thermal beam deflection Plasma-polymerized hexamethyldisilazane films Thermal diffusivity |
description |
Plasma polymerization by RF excited low pressure plasmas is a powerful technique for synthesizing thin films for a wide range of applications such in microelectronics, biomaterials and aeronautical industries. Among these applications plasma polymerized hexamethyldisilazane (HMDSN here in) is a promising material due its biocompatibility, optical and electrical properties. In the present paper, we reported the thermal diffusivity measurements of plasma polymerized HMDSN thin films using the probe beam deflection technique (PBD). The samples are thermally thin and optically transparent, with thicknesses ranging from 170 to 600 nm, difficulting their thermal characterization by other photo-thermal techniques (photoacoustic and pyroelectric). PBD measurements were carried out with a diode (20 mW, λ=640 nm) and a HeNe (0.9 mW, λ=632 nm) laser, used as pump source and probe beam, respectively. The probe beam was focused close to the sample surface and its direction was perpendicular to the pump beam. The transverse PBD in skimming configuration is employed and the deflection signal is analyzed using the phase method for the determination of thermal diffusivity. The results show the decreasing of thermal diffusivity with the decreasing of film thickness. HMDSN film's thermal diffusivity values are reported in this paper for the first time being in the range of typical polymeric samples. |
publishDate |
2015 |
dc.date.none.fl_str_mv |
2015-06-03 2018-12-11T16:57:30Z 2018-12-11T16:57:30Z |
dc.type.status.fl_str_mv |
info:eu-repo/semantics/publishedVersion |
dc.type.driver.fl_str_mv |
info:eu-repo/semantics/article |
format |
article |
status_str |
publishedVersion |
dc.identifier.uri.fl_str_mv |
http://dx.doi.org/10.1016/j.mssp.2015.03.035 Materials Science in Semiconductor Processing, v. 37, p. 223-228. 1369-8001 http://hdl.handle.net/11449/171865 10.1016/j.mssp.2015.03.035 2-s2.0-84930383649 2-s2.0-84930383649.pdf |
url |
http://dx.doi.org/10.1016/j.mssp.2015.03.035 http://hdl.handle.net/11449/171865 |
identifier_str_mv |
Materials Science in Semiconductor Processing, v. 37, p. 223-228. 1369-8001 10.1016/j.mssp.2015.03.035 2-s2.0-84930383649 2-s2.0-84930383649.pdf |
dc.language.iso.fl_str_mv |
eng |
language |
eng |
dc.relation.none.fl_str_mv |
Materials Science in Semiconductor Processing 0,634 |
dc.rights.driver.fl_str_mv |
info:eu-repo/semantics/openAccess |
eu_rights_str_mv |
openAccess |
dc.format.none.fl_str_mv |
223-228 application/pdf |
dc.source.none.fl_str_mv |
Scopus reponame:Repositório Institucional da UNESP instname:Universidade Estadual Paulista (UNESP) instacron:UNESP |
instname_str |
Universidade Estadual Paulista (UNESP) |
instacron_str |
UNESP |
institution |
UNESP |
reponame_str |
Repositório Institucional da UNESP |
collection |
Repositório Institucional da UNESP |
repository.name.fl_str_mv |
Repositório Institucional da UNESP - Universidade Estadual Paulista (UNESP) |
repository.mail.fl_str_mv |
|
_version_ |
1808128694666919936 |