Characterization of Thin Carbon Films Produced by the Magnetron Sputtering Technique

Detalhes bibliográficos
Autor(a) principal: Silva,Danilo Lopes Costa e
Data de Publicação: 2016
Outros Autores: Kassab,Luciana Reyes Pires, Martinelli,Jose Roberto, Santos,Antonio Domingues dos, Ribeiro,Sidney José Lima, Santos,Moliria Vieira dos
Tipo de documento: Artigo
Idioma: eng
Título da fonte: Materials research (São Carlos. Online)
Texto Completo: http://old.scielo.br/scielo.php?script=sci_arttext&pid=S1516-14392016000300669
Resumo: Thin carbon films containing both amorphous and crystalline structures were produced by RF magnetron sputtering. The depositions of the carbon films were performed on Co buffer layers previously deposited on c-plane (0001) sapphire substrates. The thin carbon films were characterized by high-resolution transmission electron microscopy (HRTEM), X-ray diffraction (XRD), Raman spectroscopy, energy dispersive X-ray spectroscopy (EDS), and field emission scanning electron microscope (FEG-SEM). The Raman spectra confirmed the presence of amorphous and crystalline structures by the existence of an intense D band separated from the G band, indicating early stages of crystallization. The interplanar distance corresponding to the graphite structures was determined by using HRTEM micrographs.
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spelling Characterization of Thin Carbon Films Produced by the Magnetron Sputtering TechniqueCarbon filmsGrapheneSputtered carbonGraphiteThin carbon films containing both amorphous and crystalline structures were produced by RF magnetron sputtering. The depositions of the carbon films were performed on Co buffer layers previously deposited on c-plane (0001) sapphire substrates. The thin carbon films were characterized by high-resolution transmission electron microscopy (HRTEM), X-ray diffraction (XRD), Raman spectroscopy, energy dispersive X-ray spectroscopy (EDS), and field emission scanning electron microscope (FEG-SEM). The Raman spectra confirmed the presence of amorphous and crystalline structures by the existence of an intense D band separated from the G band, indicating early stages of crystallization. The interplanar distance corresponding to the graphite structures was determined by using HRTEM micrographs.ABM, ABC, ABPol2016-06-01info:eu-repo/semantics/articleinfo:eu-repo/semantics/publishedVersiontext/htmlhttp://old.scielo.br/scielo.php?script=sci_arttext&pid=S1516-14392016000300669Materials Research v.19 n.3 2016reponame:Materials research (São Carlos. Online)instname:Universidade Federal de São Carlos (UFSCAR)instacron:ABM ABC ABPOL10.1590/1980-5373-MR-2015-0058info:eu-repo/semantics/openAccessSilva,Danilo Lopes Costa eKassab,Luciana Reyes PiresMartinelli,Jose RobertoSantos,Antonio Domingues dosRibeiro,Sidney José LimaSantos,Moliria Vieira doseng2016-05-19T00:00:00Zoai:scielo:S1516-14392016000300669Revistahttp://www.scielo.br/mrPUBhttps://old.scielo.br/oai/scielo-oai.phpdedz@power.ufscar.br1980-53731516-1439opendoar:2016-05-19T00:00Materials research (São Carlos. Online) - Universidade Federal de São Carlos (UFSCAR)false
dc.title.none.fl_str_mv Characterization of Thin Carbon Films Produced by the Magnetron Sputtering Technique
title Characterization of Thin Carbon Films Produced by the Magnetron Sputtering Technique
spellingShingle Characterization of Thin Carbon Films Produced by the Magnetron Sputtering Technique
Silva,Danilo Lopes Costa e
Carbon films
Graphene
Sputtered carbon
Graphite
title_short Characterization of Thin Carbon Films Produced by the Magnetron Sputtering Technique
title_full Characterization of Thin Carbon Films Produced by the Magnetron Sputtering Technique
title_fullStr Characterization of Thin Carbon Films Produced by the Magnetron Sputtering Technique
title_full_unstemmed Characterization of Thin Carbon Films Produced by the Magnetron Sputtering Technique
title_sort Characterization of Thin Carbon Films Produced by the Magnetron Sputtering Technique
author Silva,Danilo Lopes Costa e
author_facet Silva,Danilo Lopes Costa e
Kassab,Luciana Reyes Pires
Martinelli,Jose Roberto
Santos,Antonio Domingues dos
Ribeiro,Sidney José Lima
Santos,Moliria Vieira dos
author_role author
author2 Kassab,Luciana Reyes Pires
Martinelli,Jose Roberto
Santos,Antonio Domingues dos
Ribeiro,Sidney José Lima
Santos,Moliria Vieira dos
author2_role author
author
author
author
author
dc.contributor.author.fl_str_mv Silva,Danilo Lopes Costa e
Kassab,Luciana Reyes Pires
Martinelli,Jose Roberto
Santos,Antonio Domingues dos
Ribeiro,Sidney José Lima
Santos,Moliria Vieira dos
dc.subject.por.fl_str_mv Carbon films
Graphene
Sputtered carbon
Graphite
topic Carbon films
Graphene
Sputtered carbon
Graphite
description Thin carbon films containing both amorphous and crystalline structures were produced by RF magnetron sputtering. The depositions of the carbon films were performed on Co buffer layers previously deposited on c-plane (0001) sapphire substrates. The thin carbon films were characterized by high-resolution transmission electron microscopy (HRTEM), X-ray diffraction (XRD), Raman spectroscopy, energy dispersive X-ray spectroscopy (EDS), and field emission scanning electron microscope (FEG-SEM). The Raman spectra confirmed the presence of amorphous and crystalline structures by the existence of an intense D band separated from the G band, indicating early stages of crystallization. The interplanar distance corresponding to the graphite structures was determined by using HRTEM micrographs.
publishDate 2016
dc.date.none.fl_str_mv 2016-06-01
dc.type.driver.fl_str_mv info:eu-repo/semantics/article
dc.type.status.fl_str_mv info:eu-repo/semantics/publishedVersion
format article
status_str publishedVersion
dc.identifier.uri.fl_str_mv http://old.scielo.br/scielo.php?script=sci_arttext&pid=S1516-14392016000300669
url http://old.scielo.br/scielo.php?script=sci_arttext&pid=S1516-14392016000300669
dc.language.iso.fl_str_mv eng
language eng
dc.relation.none.fl_str_mv 10.1590/1980-5373-MR-2015-0058
dc.rights.driver.fl_str_mv info:eu-repo/semantics/openAccess
eu_rights_str_mv openAccess
dc.format.none.fl_str_mv text/html
dc.publisher.none.fl_str_mv ABM, ABC, ABPol
publisher.none.fl_str_mv ABM, ABC, ABPol
dc.source.none.fl_str_mv Materials Research v.19 n.3 2016
reponame:Materials research (São Carlos. Online)
instname:Universidade Federal de São Carlos (UFSCAR)
instacron:ABM ABC ABPOL
instname_str Universidade Federal de São Carlos (UFSCAR)
instacron_str ABM ABC ABPOL
institution ABM ABC ABPOL
reponame_str Materials research (São Carlos. Online)
collection Materials research (São Carlos. Online)
repository.name.fl_str_mv Materials research (São Carlos. Online) - Universidade Federal de São Carlos (UFSCAR)
repository.mail.fl_str_mv dedz@power.ufscar.br
_version_ 1754212668321824768

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