Effect of cage configuration in structural and optical properties of tin films grown by cathodic cage discharge

Detalhes bibliográficos
Autor(a) principal: Daudt,Natália de Freitas
Data de Publicação: 2013
Outros Autores: Barbosa,Júlio César Pereira, Macêdo,Marina de Oliveira Cardoso, Pereira,Marcelo Barbalho, Alves Junior,Clodomiro
Tipo de documento: Artigo
Idioma: eng
Título da fonte: Materials research (São Carlos. Online)
Texto Completo: http://old.scielo.br/scielo.php?script=sci_arttext&pid=S1516-14392013000400010
Resumo: Cathodic cage discharge was developed recently in order to eliminate phenomena as edge effect and overheating, which occurs during conventional processes. In this study, the effect of cage configuration in active species during the deposition process and optical properties of TiN film were studied. TiN compound was chosen because its optical properties are very sensitive to slight variations in microstructure and film thickness, becoming a good monitoring tool in fabrication process control. Cages were made of titanium and have different holes numbers and holes diameter. Electrical efficiency of the system and optical properties of TiN films were strongly influenced by experimental conditions. It was found that with more holes at the top of cage, deposition rate and crystallinity were higher, if compared to cages with a small number of holes at the top. On the other hand, the opposite behavior was observed when more holes were located at the sidewall of cage.
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spelling Effect of cage configuration in structural and optical properties of tin films grown by cathodic cage dischargecathodic cagethin filmstitanium nitrideOptical Emission Spectroscopyplasma depositionoptical propertiesCathodic cage discharge was developed recently in order to eliminate phenomena as edge effect and overheating, which occurs during conventional processes. In this study, the effect of cage configuration in active species during the deposition process and optical properties of TiN film were studied. TiN compound was chosen because its optical properties are very sensitive to slight variations in microstructure and film thickness, becoming a good monitoring tool in fabrication process control. Cages were made of titanium and have different holes numbers and holes diameter. Electrical efficiency of the system and optical properties of TiN films were strongly influenced by experimental conditions. It was found that with more holes at the top of cage, deposition rate and crystallinity were higher, if compared to cages with a small number of holes at the top. On the other hand, the opposite behavior was observed when more holes were located at the sidewall of cage.ABM, ABC, ABPol2013-08-01info:eu-repo/semantics/articleinfo:eu-repo/semantics/publishedVersiontext/htmlhttp://old.scielo.br/scielo.php?script=sci_arttext&pid=S1516-14392013000400010Materials Research v.16 n.4 2013reponame:Materials research (São Carlos. Online)instname:Universidade Federal de São Carlos (UFSCAR)instacron:ABM ABC ABPOL10.1590/S1516-14392013005000065info:eu-repo/semantics/openAccessDaudt,Natália de FreitasBarbosa,Júlio César PereiraMacêdo,Marina de Oliveira CardosoPereira,Marcelo BarbalhoAlves Junior,Clodomiroeng2013-08-02T00:00:00Zoai:scielo:S1516-14392013000400010Revistahttp://www.scielo.br/mrPUBhttps://old.scielo.br/oai/scielo-oai.phpdedz@power.ufscar.br1980-53731516-1439opendoar:2013-08-02T00:00Materials research (São Carlos. Online) - Universidade Federal de São Carlos (UFSCAR)false
dc.title.none.fl_str_mv Effect of cage configuration in structural and optical properties of tin films grown by cathodic cage discharge
title Effect of cage configuration in structural and optical properties of tin films grown by cathodic cage discharge
spellingShingle Effect of cage configuration in structural and optical properties of tin films grown by cathodic cage discharge
Daudt,Natália de Freitas
cathodic cage
thin films
titanium nitride
Optical Emission Spectroscopy
plasma deposition
optical properties
title_short Effect of cage configuration in structural and optical properties of tin films grown by cathodic cage discharge
title_full Effect of cage configuration in structural and optical properties of tin films grown by cathodic cage discharge
title_fullStr Effect of cage configuration in structural and optical properties of tin films grown by cathodic cage discharge
title_full_unstemmed Effect of cage configuration in structural and optical properties of tin films grown by cathodic cage discharge
title_sort Effect of cage configuration in structural and optical properties of tin films grown by cathodic cage discharge
author Daudt,Natália de Freitas
author_facet Daudt,Natália de Freitas
Barbosa,Júlio César Pereira
Macêdo,Marina de Oliveira Cardoso
Pereira,Marcelo Barbalho
Alves Junior,Clodomiro
author_role author
author2 Barbosa,Júlio César Pereira
Macêdo,Marina de Oliveira Cardoso
Pereira,Marcelo Barbalho
Alves Junior,Clodomiro
author2_role author
author
author
author
dc.contributor.author.fl_str_mv Daudt,Natália de Freitas
Barbosa,Júlio César Pereira
Macêdo,Marina de Oliveira Cardoso
Pereira,Marcelo Barbalho
Alves Junior,Clodomiro
dc.subject.por.fl_str_mv cathodic cage
thin films
titanium nitride
Optical Emission Spectroscopy
plasma deposition
optical properties
topic cathodic cage
thin films
titanium nitride
Optical Emission Spectroscopy
plasma deposition
optical properties
description Cathodic cage discharge was developed recently in order to eliminate phenomena as edge effect and overheating, which occurs during conventional processes. In this study, the effect of cage configuration in active species during the deposition process and optical properties of TiN film were studied. TiN compound was chosen because its optical properties are very sensitive to slight variations in microstructure and film thickness, becoming a good monitoring tool in fabrication process control. Cages were made of titanium and have different holes numbers and holes diameter. Electrical efficiency of the system and optical properties of TiN films were strongly influenced by experimental conditions. It was found that with more holes at the top of cage, deposition rate and crystallinity were higher, if compared to cages with a small number of holes at the top. On the other hand, the opposite behavior was observed when more holes were located at the sidewall of cage.
publishDate 2013
dc.date.none.fl_str_mv 2013-08-01
dc.type.driver.fl_str_mv info:eu-repo/semantics/article
dc.type.status.fl_str_mv info:eu-repo/semantics/publishedVersion
format article
status_str publishedVersion
dc.identifier.uri.fl_str_mv http://old.scielo.br/scielo.php?script=sci_arttext&pid=S1516-14392013000400010
url http://old.scielo.br/scielo.php?script=sci_arttext&pid=S1516-14392013000400010
dc.language.iso.fl_str_mv eng
language eng
dc.relation.none.fl_str_mv 10.1590/S1516-14392013005000065
dc.rights.driver.fl_str_mv info:eu-repo/semantics/openAccess
eu_rights_str_mv openAccess
dc.format.none.fl_str_mv text/html
dc.publisher.none.fl_str_mv ABM, ABC, ABPol
publisher.none.fl_str_mv ABM, ABC, ABPol
dc.source.none.fl_str_mv Materials Research v.16 n.4 2013
reponame:Materials research (São Carlos. Online)
instname:Universidade Federal de São Carlos (UFSCAR)
instacron:ABM ABC ABPOL
instname_str Universidade Federal de São Carlos (UFSCAR)
instacron_str ABM ABC ABPOL
institution ABM ABC ABPOL
reponame_str Materials research (São Carlos. Online)
collection Materials research (São Carlos. Online)
repository.name.fl_str_mv Materials research (São Carlos. Online) - Universidade Federal de São Carlos (UFSCAR)
repository.mail.fl_str_mv dedz@power.ufscar.br
_version_ 1754212662902784000

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