Characterization of TiCN thin films deposited by Dc-Pulsed PACVD using methane precursor
Autor(a) principal: | |
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Data de Publicação: | 2014 |
Outros Autores: | , , |
Tipo de documento: | Artigo |
Idioma: | eng |
Título da fonte: | Materials research (São Carlos. Online) |
Texto Completo: | http://old.scielo.br/scielo.php?script=sci_arttext&pid=S1516-14392014000600037 |
Resumo: | Titanium carbonitride (TiCN) thin films were deposited on hot-work steel (DIN 1.2606) by plasma-assisted chemical vapor deposition (PACVD) and the influence of different CH4/ (CH4+N2) gas flow ratio, on the layer mechanical properties, were investigated. SEM studies indicated that the growth rate is decreased by increasing the CH4/ (CH4+N2) gas flow ratio. It was found that the Ti(C, N) layers have different stoichiometry, TiC30N70 and TiC70N30 for 0.5 and 0.66 gas flow ratio. Grazing incidence x-ray diffraction (GIXRD), X-ray Photoelectron spectroscopy (XPS), scanning electron microscopy (SEM) and atomic force microscopy (AFM) were used to evaluate the microstructures as well as the morphological property such as roughness. It was also revealed that by increasing the flow ratio, the grain size of the TiCN thin films is increased. A hardness of 2180 HV0.05 was obtained when the layer was fabricated at the lower flow ratios. |
id |
ABMABCABPOL-1_e1d6e249f25b4be785095a8fbd6927da |
---|---|
oai_identifier_str |
oai:scielo:S1516-14392014000600037 |
network_acronym_str |
ABMABCABPOL-1 |
network_name_str |
Materials research (São Carlos. Online) |
repository_id_str |
|
spelling |
Characterization of TiCN thin films deposited by Dc-Pulsed PACVD using methane precursorPACVDTiCNtribologythin filmTitanium carbonitride (TiCN) thin films were deposited on hot-work steel (DIN 1.2606) by plasma-assisted chemical vapor deposition (PACVD) and the influence of different CH4/ (CH4+N2) gas flow ratio, on the layer mechanical properties, were investigated. SEM studies indicated that the growth rate is decreased by increasing the CH4/ (CH4+N2) gas flow ratio. It was found that the Ti(C, N) layers have different stoichiometry, TiC30N70 and TiC70N30 for 0.5 and 0.66 gas flow ratio. Grazing incidence x-ray diffraction (GIXRD), X-ray Photoelectron spectroscopy (XPS), scanning electron microscopy (SEM) and atomic force microscopy (AFM) were used to evaluate the microstructures as well as the morphological property such as roughness. It was also revealed that by increasing the flow ratio, the grain size of the TiCN thin films is increased. A hardness of 2180 HV0.05 was obtained when the layer was fabricated at the lower flow ratios.ABM, ABC, ABPol2014-12-01info:eu-repo/semantics/articleinfo:eu-repo/semantics/publishedVersiontext/htmlhttp://old.scielo.br/scielo.php?script=sci_arttext&pid=S1516-14392014000600037Materials Research v.17 n.6 2014reponame:Materials research (São Carlos. Online)instname:Universidade Federal de São Carlos (UFSCAR)instacron:ABM ABC ABPOL10.1590/1516-1439.309514info:eu-repo/semantics/openAccessShafiei,Seyed Mohammad MahdiDivandari,MehdiBoutorabi,Seyed Mohammad AliNaghizadeh,Rahimeng2015-02-10T00:00:00Zoai:scielo:S1516-14392014000600037Revistahttp://www.scielo.br/mrPUBhttps://old.scielo.br/oai/scielo-oai.phpdedz@power.ufscar.br1980-53731516-1439opendoar:2015-02-10T00:00Materials research (São Carlos. Online) - Universidade Federal de São Carlos (UFSCAR)false |
dc.title.none.fl_str_mv |
Characterization of TiCN thin films deposited by Dc-Pulsed PACVD using methane precursor |
title |
Characterization of TiCN thin films deposited by Dc-Pulsed PACVD using methane precursor |
spellingShingle |
Characterization of TiCN thin films deposited by Dc-Pulsed PACVD using methane precursor Shafiei,Seyed Mohammad Mahdi PACVD TiCN tribology thin film |
title_short |
Characterization of TiCN thin films deposited by Dc-Pulsed PACVD using methane precursor |
title_full |
Characterization of TiCN thin films deposited by Dc-Pulsed PACVD using methane precursor |
title_fullStr |
Characterization of TiCN thin films deposited by Dc-Pulsed PACVD using methane precursor |
title_full_unstemmed |
Characterization of TiCN thin films deposited by Dc-Pulsed PACVD using methane precursor |
title_sort |
Characterization of TiCN thin films deposited by Dc-Pulsed PACVD using methane precursor |
author |
Shafiei,Seyed Mohammad Mahdi |
author_facet |
Shafiei,Seyed Mohammad Mahdi Divandari,Mehdi Boutorabi,Seyed Mohammad Ali Naghizadeh,Rahim |
author_role |
author |
author2 |
Divandari,Mehdi Boutorabi,Seyed Mohammad Ali Naghizadeh,Rahim |
author2_role |
author author author |
dc.contributor.author.fl_str_mv |
Shafiei,Seyed Mohammad Mahdi Divandari,Mehdi Boutorabi,Seyed Mohammad Ali Naghizadeh,Rahim |
dc.subject.por.fl_str_mv |
PACVD TiCN tribology thin film |
topic |
PACVD TiCN tribology thin film |
description |
Titanium carbonitride (TiCN) thin films were deposited on hot-work steel (DIN 1.2606) by plasma-assisted chemical vapor deposition (PACVD) and the influence of different CH4/ (CH4+N2) gas flow ratio, on the layer mechanical properties, were investigated. SEM studies indicated that the growth rate is decreased by increasing the CH4/ (CH4+N2) gas flow ratio. It was found that the Ti(C, N) layers have different stoichiometry, TiC30N70 and TiC70N30 for 0.5 and 0.66 gas flow ratio. Grazing incidence x-ray diffraction (GIXRD), X-ray Photoelectron spectroscopy (XPS), scanning electron microscopy (SEM) and atomic force microscopy (AFM) were used to evaluate the microstructures as well as the morphological property such as roughness. It was also revealed that by increasing the flow ratio, the grain size of the TiCN thin films is increased. A hardness of 2180 HV0.05 was obtained when the layer was fabricated at the lower flow ratios. |
publishDate |
2014 |
dc.date.none.fl_str_mv |
2014-12-01 |
dc.type.driver.fl_str_mv |
info:eu-repo/semantics/article |
dc.type.status.fl_str_mv |
info:eu-repo/semantics/publishedVersion |
format |
article |
status_str |
publishedVersion |
dc.identifier.uri.fl_str_mv |
http://old.scielo.br/scielo.php?script=sci_arttext&pid=S1516-14392014000600037 |
url |
http://old.scielo.br/scielo.php?script=sci_arttext&pid=S1516-14392014000600037 |
dc.language.iso.fl_str_mv |
eng |
language |
eng |
dc.relation.none.fl_str_mv |
10.1590/1516-1439.309514 |
dc.rights.driver.fl_str_mv |
info:eu-repo/semantics/openAccess |
eu_rights_str_mv |
openAccess |
dc.format.none.fl_str_mv |
text/html |
dc.publisher.none.fl_str_mv |
ABM, ABC, ABPol |
publisher.none.fl_str_mv |
ABM, ABC, ABPol |
dc.source.none.fl_str_mv |
Materials Research v.17 n.6 2014 reponame:Materials research (São Carlos. Online) instname:Universidade Federal de São Carlos (UFSCAR) instacron:ABM ABC ABPOL |
instname_str |
Universidade Federal de São Carlos (UFSCAR) |
instacron_str |
ABM ABC ABPOL |
institution |
ABM ABC ABPOL |
reponame_str |
Materials research (São Carlos. Online) |
collection |
Materials research (São Carlos. Online) |
repository.name.fl_str_mv |
Materials research (São Carlos. Online) - Universidade Federal de São Carlos (UFSCAR) |
repository.mail.fl_str_mv |
dedz@power.ufscar.br |
_version_ |
1754212664570019840 |