Experimental-numerical Technique to Evaluate the Thickness of TiN Thin Film
Autor(a) principal: | |
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Data de Publicação: | 2019 |
Outros Autores: | , |
Tipo de documento: | Artigo |
Idioma: | eng |
Título da fonte: | Materials research (São Carlos. Online) |
Texto Completo: | http://old.scielo.br/scielo.php?script=sci_arttext&pid=S1516-14392019000500201 |
Resumo: | In this study, the numerical analysis of instrumented indentation testing was combined with the experimental procedure to evaluate the mechanical properties and thickness of a titanium nitride (TiN) film deposited on titanium substrate (Ti) by plasma processing. TiN film thickness is an important parameter for the surface treatment industry. In numerical analysis, the finite elements method (FEM) was applied using Marc™ commercial software. Initially, the mechanical properties of the film and substrate were determined using a numerical-experimental methodology, combining the results of indentation testing with a Berkovich indenter and the same numerical simulation for both the film and substrate. Next, the behavior of instrumented Vickers hardness as a function of maximum indenter penetration depth (hmax) was compared with the numerical results of this hardness as a function of the ratio between penetration depth and film thickness (hmax/t). Both curves were fitted using power law equations, which calculated film thickness applying a new convergence algorithm. Finally, it also was shown that the film thickness obtained agrees with the experimental range reported in the literature. |
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Materials research (São Carlos. Online) |
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Experimental-numerical Technique to Evaluate the Thickness of TiN Thin FilmExperimental-numerical analysisTiN filmindentation testingfilm thicknessFEMIn this study, the numerical analysis of instrumented indentation testing was combined with the experimental procedure to evaluate the mechanical properties and thickness of a titanium nitride (TiN) film deposited on titanium substrate (Ti) by plasma processing. TiN film thickness is an important parameter for the surface treatment industry. In numerical analysis, the finite elements method (FEM) was applied using Marc™ commercial software. Initially, the mechanical properties of the film and substrate were determined using a numerical-experimental methodology, combining the results of indentation testing with a Berkovich indenter and the same numerical simulation for both the film and substrate. Next, the behavior of instrumented Vickers hardness as a function of maximum indenter penetration depth (hmax) was compared with the numerical results of this hardness as a function of the ratio between penetration depth and film thickness (hmax/t). Both curves were fitted using power law equations, which calculated film thickness applying a new convergence algorithm. Finally, it also was shown that the film thickness obtained agrees with the experimental range reported in the literature.ABM, ABC, ABPol2019-01-01info:eu-repo/semantics/articleinfo:eu-repo/semantics/publishedVersiontext/htmlhttp://old.scielo.br/scielo.php?script=sci_arttext&pid=S1516-14392019000500201Materials Research v.22 n.5 2019reponame:Materials research (São Carlos. Online)instname:Universidade Federal de São Carlos (UFSCAR)instacron:ABM ABC ABPOL10.1590/1980-5373-mr-2018-0283info:eu-repo/semantics/openAccessDias,Avelino Manuel da SilvaSilva,Everton Carneiro daLibório,Maxwell Santanaeng2019-09-04T00:00:00Zoai:scielo:S1516-14392019000500201Revistahttp://www.scielo.br/mrPUBhttps://old.scielo.br/oai/scielo-oai.phpdedz@power.ufscar.br1980-53731516-1439opendoar:2019-09-04T00:00Materials research (São Carlos. Online) - Universidade Federal de São Carlos (UFSCAR)false |
dc.title.none.fl_str_mv |
Experimental-numerical Technique to Evaluate the Thickness of TiN Thin Film |
title |
Experimental-numerical Technique to Evaluate the Thickness of TiN Thin Film |
spellingShingle |
Experimental-numerical Technique to Evaluate the Thickness of TiN Thin Film Dias,Avelino Manuel da Silva Experimental-numerical analysis TiN film indentation testing film thickness FEM |
title_short |
Experimental-numerical Technique to Evaluate the Thickness of TiN Thin Film |
title_full |
Experimental-numerical Technique to Evaluate the Thickness of TiN Thin Film |
title_fullStr |
Experimental-numerical Technique to Evaluate the Thickness of TiN Thin Film |
title_full_unstemmed |
Experimental-numerical Technique to Evaluate the Thickness of TiN Thin Film |
title_sort |
Experimental-numerical Technique to Evaluate the Thickness of TiN Thin Film |
author |
Dias,Avelino Manuel da Silva |
author_facet |
Dias,Avelino Manuel da Silva Silva,Everton Carneiro da Libório,Maxwell Santana |
author_role |
author |
author2 |
Silva,Everton Carneiro da Libório,Maxwell Santana |
author2_role |
author author |
dc.contributor.author.fl_str_mv |
Dias,Avelino Manuel da Silva Silva,Everton Carneiro da Libório,Maxwell Santana |
dc.subject.por.fl_str_mv |
Experimental-numerical analysis TiN film indentation testing film thickness FEM |
topic |
Experimental-numerical analysis TiN film indentation testing film thickness FEM |
description |
In this study, the numerical analysis of instrumented indentation testing was combined with the experimental procedure to evaluate the mechanical properties and thickness of a titanium nitride (TiN) film deposited on titanium substrate (Ti) by plasma processing. TiN film thickness is an important parameter for the surface treatment industry. In numerical analysis, the finite elements method (FEM) was applied using Marc™ commercial software. Initially, the mechanical properties of the film and substrate were determined using a numerical-experimental methodology, combining the results of indentation testing with a Berkovich indenter and the same numerical simulation for both the film and substrate. Next, the behavior of instrumented Vickers hardness as a function of maximum indenter penetration depth (hmax) was compared with the numerical results of this hardness as a function of the ratio between penetration depth and film thickness (hmax/t). Both curves were fitted using power law equations, which calculated film thickness applying a new convergence algorithm. Finally, it also was shown that the film thickness obtained agrees with the experimental range reported in the literature. |
publishDate |
2019 |
dc.date.none.fl_str_mv |
2019-01-01 |
dc.type.driver.fl_str_mv |
info:eu-repo/semantics/article |
dc.type.status.fl_str_mv |
info:eu-repo/semantics/publishedVersion |
format |
article |
status_str |
publishedVersion |
dc.identifier.uri.fl_str_mv |
http://old.scielo.br/scielo.php?script=sci_arttext&pid=S1516-14392019000500201 |
url |
http://old.scielo.br/scielo.php?script=sci_arttext&pid=S1516-14392019000500201 |
dc.language.iso.fl_str_mv |
eng |
language |
eng |
dc.relation.none.fl_str_mv |
10.1590/1980-5373-mr-2018-0283 |
dc.rights.driver.fl_str_mv |
info:eu-repo/semantics/openAccess |
eu_rights_str_mv |
openAccess |
dc.format.none.fl_str_mv |
text/html |
dc.publisher.none.fl_str_mv |
ABM, ABC, ABPol |
publisher.none.fl_str_mv |
ABM, ABC, ABPol |
dc.source.none.fl_str_mv |
Materials Research v.22 n.5 2019 reponame:Materials research (São Carlos. Online) instname:Universidade Federal de São Carlos (UFSCAR) instacron:ABM ABC ABPOL |
instname_str |
Universidade Federal de São Carlos (UFSCAR) |
instacron_str |
ABM ABC ABPOL |
institution |
ABM ABC ABPOL |
reponame_str |
Materials research (São Carlos. Online) |
collection |
Materials research (São Carlos. Online) |
repository.name.fl_str_mv |
Materials research (São Carlos. Online) - Universidade Federal de São Carlos (UFSCAR) |
repository.mail.fl_str_mv |
dedz@power.ufscar.br |
_version_ |
1754212674976088064 |