Low-temperature PECVD deposition of highly conductive microcrystalline silicon thin films
Autor(a) principal: | |
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Data de Publicação: | 2014 |
Outros Autores: | , , , , , |
Tipo de documento: | Artigo de conferência |
Título da fonte: | Repositório Institucional do IPEN |
Texto Completo: | http://repositorio.ipen.br/handle/123456789/15380 |
id |
IPEN_59431817c93e84ffe869d0dc9bfe61bf |
---|---|
oai_identifier_str |
oai:repositorio.ipen.br:123456789/15380 |
network_acronym_str |
IPEN |
network_name_str |
Repositório Institucional do IPEN |
repository_id_str |
4510 |
spelling |
2014-11-17T17:55:16Z2014-11-18T19:03:53Z2015-04-01T20:55:05Z2014-11-17T17:55:16Z2014-11-18T19:03:53Z2015-04-01T20:55:05ZJune 10-12, 2002http://repositorio.ipen.br/handle/123456789/15380Made available in DSpace on 2014-11-17T17:55:16Z (GMT). No. of bitstreams: 0Made available in DSpace on 2014-11-18T19:03:53Z (GMT). No. of bitstreams: 0Made available in DSpace on 2015-04-01T20:55:05Z (GMT). No. of bitstreams: 0407-411openAccessinfo:eu-repo/semantics/openAccessPublicado em: Journal of Materials Science: Materials in Electronics, , v. 14, n. 5/7, p. 407-411, 2003reponame:Repositório Institucional do IPENinstname:Instituto de Pesquisas Energéticas e Nucleares (IPEN)instacron:IPENsiliconthin filmschemical vapor depositionplasmatemperature range 0273-0400 ktemperature range 0400-1000 kelectric conductivitystructural chemical analysishall effectimpedancespectroscopyLow-temperature PECVD deposition of highly conductive microcrystalline silicon thin filmsinfo:eu-repo/semantics/publishedVersioninfo:eu-repo/semantics/conferenceObjectIEspoo, FinlandNARDES, A.M.ANDRADE, A.M.FONSECA, F.J.DIRANI, E.A.T.MUCCILLO, R.MUCCILLO, E.N.S.INTERNATIONAL CONFERENCE ON MATERIALS FOR MICROELECTRONICS AND NANOENGINEERING, 4th097692002MUCCILLO, R.MUCCILLO, E.N.S.04-08Proceedings-12982-1-111651298NARDES, A.M.:-1:-1:SANDRADE, A.M.:2982:-1:NFONSECA, F.J.:-1:-1:NDIRANI, E.A.T.:-1:-1:NMUCCILLO, R.:1165:34:NMUCCILLO, E.N.S.:1298:34:NORIGINAL09769.pdf09769.pdfapplication/pdf468130http://repositorio.ipen.br/bitstream/123456789/15380/1/09769.pdf18849f24ce66e99eb96dc5ce5b4a7332MD51123456789/153802020-07-06 23:48:30.434oai:repositorio.ipen.br:123456789/15380Repositório InstitucionalPUBhttp://repositorio.ipen.br/oai/requestbibl@ipen.bropendoar:45102020-07-06T23:48:30Repositório Institucional do IPEN - Instituto de Pesquisas Energéticas e Nucleares (IPEN)false |
dc.title.pt_BR.fl_str_mv |
Low-temperature PECVD deposition of highly conductive microcrystalline silicon thin films |
title |
Low-temperature PECVD deposition of highly conductive microcrystalline silicon thin films |
spellingShingle |
Low-temperature PECVD deposition of highly conductive microcrystalline silicon thin films NARDES, A.M. silicon thin films chemical vapor deposition plasma temperature range 0273-0400 k temperature range 0400-1000 k electric conductivity structural chemical analysis hall effect impedance spectroscopy |
title_short |
Low-temperature PECVD deposition of highly conductive microcrystalline silicon thin films |
title_full |
Low-temperature PECVD deposition of highly conductive microcrystalline silicon thin films |
title_fullStr |
Low-temperature PECVD deposition of highly conductive microcrystalline silicon thin films |
title_full_unstemmed |
Low-temperature PECVD deposition of highly conductive microcrystalline silicon thin films |
title_sort |
Low-temperature PECVD deposition of highly conductive microcrystalline silicon thin films |
author |
NARDES, A.M. |
author_facet |
NARDES, A.M. ANDRADE, A.M. FONSECA, F.J. DIRANI, E.A.T. MUCCILLO, R. MUCCILLO, E.N.S. INTERNATIONAL CONFERENCE ON MATERIALS FOR MICROELECTRONICS AND NANOENGINEERING, 4th |
author_role |
author |
author2 |
ANDRADE, A.M. FONSECA, F.J. DIRANI, E.A.T. MUCCILLO, R. MUCCILLO, E.N.S. INTERNATIONAL CONFERENCE ON MATERIALS FOR MICROELECTRONICS AND NANOENGINEERING, 4th |
author2_role |
author author author author author author |
dc.contributor.author.fl_str_mv |
NARDES, A.M. ANDRADE, A.M. FONSECA, F.J. DIRANI, E.A.T. MUCCILLO, R. MUCCILLO, E.N.S. INTERNATIONAL CONFERENCE ON MATERIALS FOR MICROELECTRONICS AND NANOENGINEERING, 4th |
dc.subject.por.fl_str_mv |
silicon thin films chemical vapor deposition plasma temperature range 0273-0400 k temperature range 0400-1000 k electric conductivity structural chemical analysis hall effect impedance spectroscopy |
topic |
silicon thin films chemical vapor deposition plasma temperature range 0273-0400 k temperature range 0400-1000 k electric conductivity structural chemical analysis hall effect impedance spectroscopy |
publishDate |
2014 |
dc.date.evento.pt_BR.fl_str_mv |
June 10-12, 2002 |
dc.date.accessioned.fl_str_mv |
2014-11-17T17:55:16Z 2014-11-18T19:03:53Z 2015-04-01T20:55:05Z |
dc.date.available.fl_str_mv |
2014-11-17T17:55:16Z 2014-11-18T19:03:53Z 2015-04-01T20:55:05Z |
dc.type.status.fl_str_mv |
info:eu-repo/semantics/publishedVersion |
dc.type.driver.fl_str_mv |
info:eu-repo/semantics/conferenceObject |
format |
conferenceObject |
status_str |
publishedVersion |
dc.identifier.uri.fl_str_mv |
http://repositorio.ipen.br/handle/123456789/15380 |
url |
http://repositorio.ipen.br/handle/123456789/15380 |
dc.rights.driver.fl_str_mv |
openAccess info:eu-repo/semantics/openAccess |
rights_invalid_str_mv |
openAccess |
eu_rights_str_mv |
openAccess |
dc.format.none.fl_str_mv |
407-411 |
dc.coverage.pt_BR.fl_str_mv |
I |
dc.source.pt_BR.fl_str_mv |
Publicado em: Journal of Materials Science: Materials in Electronics, , v. 14, n. 5/7, p. 407-411, 2003 |
dc.source.none.fl_str_mv |
reponame:Repositório Institucional do IPEN instname:Instituto de Pesquisas Energéticas e Nucleares (IPEN) instacron:IPEN |
instname_str |
Instituto de Pesquisas Energéticas e Nucleares (IPEN) |
instacron_str |
IPEN |
institution |
IPEN |
reponame_str |
Repositório Institucional do IPEN |
collection |
Repositório Institucional do IPEN |
bitstream.url.fl_str_mv |
http://repositorio.ipen.br/bitstream/123456789/15380/1/09769.pdf |
bitstream.checksum.fl_str_mv |
18849f24ce66e99eb96dc5ce5b4a7332 |
bitstream.checksumAlgorithm.fl_str_mv |
MD5 |
repository.name.fl_str_mv |
Repositório Institucional do IPEN - Instituto de Pesquisas Energéticas e Nucleares (IPEN) |
repository.mail.fl_str_mv |
bibl@ipen.br |
_version_ |
1767254203918450688 |