Produ????o e caracteriza????o de filmes finos de carbono pela t??cnica de Magnetron Sputtering

Detalhes bibliográficos
Autor(a) principal: SILVA, D.L.C.
Data de Publicação: 2016
Outros Autores: KASSAB, L.R.P., MARTINELLI, J.R., SANTOS, A.D., RIBEIRO, S.J.L., PILLIS, M.F., CONGRESSO BRASILEIRO DE CERAMICA, 59.
Tipo de documento: Artigo de conferência
Título da fonte: Repositório Institucional do IPEN
Texto Completo: http://repositorio.ipen.br/handle/123456789/25624
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spelling 2016-01-28T11:53:48Z2016-01-28T11:53:48Z17-20 de maio, 2015http://repositorio.ipen.br/handle/123456789/25624Submitted by Claudinei Pracidelli (cpracide@ipen.br) on 2016-01-28T11:53:48Z No. of bitstreams: 1 21533.pdf: 728916 bytes, checksum: 4601d158bb16a05db7933c0acff6c6f8 (MD5)Made available in DSpace on 2016-01-28T11:53:48Z (GMT). No. of bitstreams: 1 21533.pdf: 728916 bytes, checksum: 4601d158bb16a05db7933c0acff6c6f8 (MD5)3515-3525thin filmscarbonmagnetronssputteringsample preparationheat treatmentscrystallizationtransmission electron microscopyraman spectroscopyscanning electron microscopyProdu????o e caracteriza????o de filmes finos de carbono pela t??cnica de Magnetron Sputteringinfo:eu-repo/semantics/publishedVersioninfo:eu-repo/semantics/conferenceObjectCBCNBarra dos Coqueiros, SESILVA, D.L.C.KASSAB, L.R.P.MARTINELLI, J.R.SANTOS, A.D.RIBEIRO, S.J.L.PILLIS, M.F.CONGRESSO BRASILEIRO DE CERAMICA, 59.info:eu-repo/semantics/openAccessreponame:Repositório Institucional do IPENinstname:Instituto de Pesquisas Energéticas e Nucleares (IPEN)instacron:IPEN215332015SILVA, D.L.C.MARTINELLI, J.R.PILLIS, M.F.16-01Anais62001557630758KASSAB, L.R.P.:6200:-1:NMARTINELLI, J.R.:155:720:NSANTOS, A.D.:7630:-1:NPILLIS, M.F.:758:730:NORIGINAL21533.pdf21533.pdfapplication/pdf728916http://repositorio.ipen.br/bitstream/123456789/25624/1/21533.pdf4601d158bb16a05db7933c0acff6c6f8MD51LICENSElicense.txtlicense.txttext/plain; charset=utf-81748http://repositorio.ipen.br/bitstream/123456789/25624/2/license.txt8a4605be74aa9ea9d79846c1fba20a33MD52123456789/256242016-02-03 13:15:26.641oai:repositorio.ipen.br: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Repositório InstitucionalPUBhttp://repositorio.ipen.br/oai/requestbibl@ipen.bropendoar:45102016-02-03T13:15:26Repositório Institucional do IPEN - Instituto de Pesquisas Energéticas e Nucleares (IPEN)false
dc.title.pt_BR.fl_str_mv Produ????o e caracteriza????o de filmes finos de carbono pela t??cnica de Magnetron Sputtering
title Produ????o e caracteriza????o de filmes finos de carbono pela t??cnica de Magnetron Sputtering
spellingShingle Produ????o e caracteriza????o de filmes finos de carbono pela t??cnica de Magnetron Sputtering
SILVA, D.L.C.
thin films
carbon
magnetrons
sputtering
sample preparation
heat treatments
crystallization
transmission electron microscopy
raman spectroscopy
scanning electron microscopy
title_short Produ????o e caracteriza????o de filmes finos de carbono pela t??cnica de Magnetron Sputtering
title_full Produ????o e caracteriza????o de filmes finos de carbono pela t??cnica de Magnetron Sputtering
title_fullStr Produ????o e caracteriza????o de filmes finos de carbono pela t??cnica de Magnetron Sputtering
title_full_unstemmed Produ????o e caracteriza????o de filmes finos de carbono pela t??cnica de Magnetron Sputtering
title_sort Produ????o e caracteriza????o de filmes finos de carbono pela t??cnica de Magnetron Sputtering
author SILVA, D.L.C.
author_facet SILVA, D.L.C.
KASSAB, L.R.P.
MARTINELLI, J.R.
SANTOS, A.D.
RIBEIRO, S.J.L.
PILLIS, M.F.
CONGRESSO BRASILEIRO DE CERAMICA, 59.
author_role author
author2 KASSAB, L.R.P.
MARTINELLI, J.R.
SANTOS, A.D.
RIBEIRO, S.J.L.
PILLIS, M.F.
CONGRESSO BRASILEIRO DE CERAMICA, 59.
author2_role author
author
author
author
author
author
dc.contributor.author.fl_str_mv SILVA, D.L.C.
KASSAB, L.R.P.
MARTINELLI, J.R.
SANTOS, A.D.
RIBEIRO, S.J.L.
PILLIS, M.F.
CONGRESSO BRASILEIRO DE CERAMICA, 59.
dc.subject.por.fl_str_mv thin films
carbon
magnetrons
sputtering
sample preparation
heat treatments
crystallization
transmission electron microscopy
raman spectroscopy
scanning electron microscopy
topic thin films
carbon
magnetrons
sputtering
sample preparation
heat treatments
crystallization
transmission electron microscopy
raman spectroscopy
scanning electron microscopy
publishDate 2016
dc.date.evento.pt_BR.fl_str_mv 17-20 de maio, 2015
dc.date.accessioned.fl_str_mv 2016-01-28T11:53:48Z
dc.date.available.fl_str_mv 2016-01-28T11:53:48Z
dc.type.status.fl_str_mv info:eu-repo/semantics/publishedVersion
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