Double sheaths in RF discharges
Autor(a) principal: | |
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Data de Publicação: | 2005 |
Outros Autores: | , |
Tipo de documento: | Artigo |
Idioma: | eng |
Título da fonte: | Repositório Científico de Acesso Aberto de Portugal (Repositórios Cientìficos) |
Texto Completo: | http://hdl.handle.net/1822/3014 |
Resumo: | This paper analyzes the formation of double spacecharge sheaths, associated to the development of double ionization structures in radio frequency discharges. A simulation tool is used to generate space-time images of the ionization rate in hydrogen and in helium, obtained by inducing artificial modifications in the mobility of charged particles, with these gases |
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7160 |
spelling |
Double sheaths in RF dischargesDischarge modelingPlasma sheathsRadio frequency dischargesfield inversionheliumhydrogenradio frequency (RF) dischargesScience & TechnologyThis paper analyzes the formation of double spacecharge sheaths, associated to the development of double ionization structures in radio frequency discharges. A simulation tool is used to generate space-time images of the ionization rate in hydrogen and in helium, obtained by inducing artificial modifications in the mobility of charged particles, with these gasesIEEEUniversidade do MinhoMarques, L.Gousset, G.Alves, L. L.2005-042005-04-01T00:00:00Zinfo:eu-repo/semantics/publishedVersioninfo:eu-repo/semantics/articleapplication/pdfhttp://hdl.handle.net/1822/3014eng"IEEE Transactions on Plasma Science". ISSN 0093-3813. 33:2 pt. 1 (2005) 358-359.0093-381310.1109/TPS.2005.845130http://ieeexplore.ieee.org/iel5/27/30692/01420475.pdf?tp=&arnumber=1420475&isnumber=30692info:eu-repo/semantics/openAccessreponame:Repositório Científico de Acesso Aberto de Portugal (Repositórios Cientìficos)instname:Agência para a Sociedade do Conhecimento (UMIC) - FCT - Sociedade da Informaçãoinstacron:RCAAP2024-05-11T04:25:26Zoai:repositorium.sdum.uminho.pt:1822/3014Portal AgregadorONGhttps://www.rcaap.pt/oai/openairemluisa.alvim@gmail.comopendoar:71602024-05-11T04:25:26Repositório Científico de Acesso Aberto de Portugal (Repositórios Cientìficos) - Agência para a Sociedade do Conhecimento (UMIC) - FCT - Sociedade da Informaçãofalse |
dc.title.none.fl_str_mv |
Double sheaths in RF discharges |
title |
Double sheaths in RF discharges |
spellingShingle |
Double sheaths in RF discharges Marques, L. Discharge modeling Plasma sheaths Radio frequency discharges field inversion helium hydrogen radio frequency (RF) discharges Science & Technology |
title_short |
Double sheaths in RF discharges |
title_full |
Double sheaths in RF discharges |
title_fullStr |
Double sheaths in RF discharges |
title_full_unstemmed |
Double sheaths in RF discharges |
title_sort |
Double sheaths in RF discharges |
author |
Marques, L. |
author_facet |
Marques, L. Gousset, G. Alves, L. L. |
author_role |
author |
author2 |
Gousset, G. Alves, L. L. |
author2_role |
author author |
dc.contributor.none.fl_str_mv |
Universidade do Minho |
dc.contributor.author.fl_str_mv |
Marques, L. Gousset, G. Alves, L. L. |
dc.subject.por.fl_str_mv |
Discharge modeling Plasma sheaths Radio frequency discharges field inversion helium hydrogen radio frequency (RF) discharges Science & Technology |
topic |
Discharge modeling Plasma sheaths Radio frequency discharges field inversion helium hydrogen radio frequency (RF) discharges Science & Technology |
description |
This paper analyzes the formation of double spacecharge sheaths, associated to the development of double ionization structures in radio frequency discharges. A simulation tool is used to generate space-time images of the ionization rate in hydrogen and in helium, obtained by inducing artificial modifications in the mobility of charged particles, with these gases |
publishDate |
2005 |
dc.date.none.fl_str_mv |
2005-04 2005-04-01T00:00:00Z |
dc.type.status.fl_str_mv |
info:eu-repo/semantics/publishedVersion |
dc.type.driver.fl_str_mv |
info:eu-repo/semantics/article |
format |
article |
status_str |
publishedVersion |
dc.identifier.uri.fl_str_mv |
http://hdl.handle.net/1822/3014 |
url |
http://hdl.handle.net/1822/3014 |
dc.language.iso.fl_str_mv |
eng |
language |
eng |
dc.relation.none.fl_str_mv |
"IEEE Transactions on Plasma Science". ISSN 0093-3813. 33:2 pt. 1 (2005) 358-359. 0093-3813 10.1109/TPS.2005.845130 http://ieeexplore.ieee.org/iel5/27/30692/01420475.pdf?tp=&arnumber=1420475&isnumber=30692 |
dc.rights.driver.fl_str_mv |
info:eu-repo/semantics/openAccess |
eu_rights_str_mv |
openAccess |
dc.format.none.fl_str_mv |
application/pdf |
dc.publisher.none.fl_str_mv |
IEEE |
publisher.none.fl_str_mv |
IEEE |
dc.source.none.fl_str_mv |
reponame:Repositório Científico de Acesso Aberto de Portugal (Repositórios Cientìficos) instname:Agência para a Sociedade do Conhecimento (UMIC) - FCT - Sociedade da Informação instacron:RCAAP |
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Agência para a Sociedade do Conhecimento (UMIC) - FCT - Sociedade da Informação |
instacron_str |
RCAAP |
institution |
RCAAP |
reponame_str |
Repositório Científico de Acesso Aberto de Portugal (Repositórios Cientìficos) |
collection |
Repositório Científico de Acesso Aberto de Portugal (Repositórios Cientìficos) |
repository.name.fl_str_mv |
Repositório Científico de Acesso Aberto de Portugal (Repositórios Cientìficos) - Agência para a Sociedade do Conhecimento (UMIC) - FCT - Sociedade da Informação |
repository.mail.fl_str_mv |
mluisa.alvim@gmail.com |
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1817544305299947520 |