Modelling the influence of frequency in a low pressure capacitively coupled hydrogen discharge

Detalhes bibliográficos
Autor(a) principal: Marques, L.
Data de Publicação: 2002
Outros Autores: Jolly, Jacques, Gousset, G., Alves, L. L.
Tipo de documento: Artigo
Idioma: eng
Título da fonte: Repositório Científico de Acesso Aberto de Portugal (Repositórios Cientìficos)
Texto Completo: http://hdl.handle.net/1822/3016
Resumo: This paper investigates the dependence of plasma density and self-bias voltage with excitation frequency (13.56-40.68 MHz) using a two-dimensional (2D) fluid model in a low pressure (300 mTorr) radio frequency (RF) capacitively coupled hydrogen discharge. A comparison with experimental results reveals that the model predicts the correct trends of density and self-bias voltage variation with driving frequency
id RCAP_3e926560d4ca59227f479f59c87bb4d4
oai_identifier_str oai:repositorium.sdum.uminho.pt:1822/3016
network_acronym_str RCAP
network_name_str Repositório Científico de Acesso Aberto de Portugal (Repositórios Cientìficos)
repository_id_str 7160
spelling Modelling the influence of frequency in a low pressure capacitively coupled hydrogen dischargeCapacitively coupled dischargeHydrogen plasmaThis paper investigates the dependence of plasma density and self-bias voltage with excitation frequency (13.56-40.68 MHz) using a two-dimensional (2D) fluid model in a low pressure (300 mTorr) radio frequency (RF) capacitively coupled hydrogen discharge. A comparison with experimental results reveals that the model predicts the correct trends of density and self-bias voltage variation with driving frequencyEscampig Scientific CommitteeUniversidade do MinhoMarques, L.Jolly, JacquesGousset, G.Alves, L. L.2002-062002-06-01T00:00:00Zinfo:eu-repo/semantics/publishedVersioninfo:eu-repo/semantics/articleapplication/pdfhttp://hdl.handle.net/1822/3016engSADEGHI, N. ; SUGAI, H., ed. lit. - "Joint conference : European Conference on Atomic and Molecular Physics of Ionized Gases, 16 ; International Conference on Reactive Plasmas, 5, Grenoble, 2002". [Paris] : ESCAMPIG Scientific Committee, 2002. vol. 2. p. 291-292.info:eu-repo/semantics/openAccessreponame:Repositório Científico de Acesso Aberto de Portugal (Repositórios Cientìficos)instname:Agência para a Sociedade do Conhecimento (UMIC) - FCT - Sociedade da Informaçãoinstacron:RCAAP2023-07-21T12:10:52Zoai:repositorium.sdum.uminho.pt:1822/3016Portal AgregadorONGhttps://www.rcaap.pt/oai/openaireopendoar:71602024-03-19T19:02:33.191343Repositório Científico de Acesso Aberto de Portugal (Repositórios Cientìficos) - Agência para a Sociedade do Conhecimento (UMIC) - FCT - Sociedade da Informaçãofalse
dc.title.none.fl_str_mv Modelling the influence of frequency in a low pressure capacitively coupled hydrogen discharge
title Modelling the influence of frequency in a low pressure capacitively coupled hydrogen discharge
spellingShingle Modelling the influence of frequency in a low pressure capacitively coupled hydrogen discharge
Marques, L.
Capacitively coupled discharge
Hydrogen plasma
title_short Modelling the influence of frequency in a low pressure capacitively coupled hydrogen discharge
title_full Modelling the influence of frequency in a low pressure capacitively coupled hydrogen discharge
title_fullStr Modelling the influence of frequency in a low pressure capacitively coupled hydrogen discharge
title_full_unstemmed Modelling the influence of frequency in a low pressure capacitively coupled hydrogen discharge
title_sort Modelling the influence of frequency in a low pressure capacitively coupled hydrogen discharge
author Marques, L.
author_facet Marques, L.
Jolly, Jacques
Gousset, G.
Alves, L. L.
author_role author
author2 Jolly, Jacques
Gousset, G.
Alves, L. L.
author2_role author
author
author
dc.contributor.none.fl_str_mv Universidade do Minho
dc.contributor.author.fl_str_mv Marques, L.
Jolly, Jacques
Gousset, G.
Alves, L. L.
dc.subject.por.fl_str_mv Capacitively coupled discharge
Hydrogen plasma
topic Capacitively coupled discharge
Hydrogen plasma
description This paper investigates the dependence of plasma density and self-bias voltage with excitation frequency (13.56-40.68 MHz) using a two-dimensional (2D) fluid model in a low pressure (300 mTorr) radio frequency (RF) capacitively coupled hydrogen discharge. A comparison with experimental results reveals that the model predicts the correct trends of density and self-bias voltage variation with driving frequency
publishDate 2002
dc.date.none.fl_str_mv 2002-06
2002-06-01T00:00:00Z
dc.type.status.fl_str_mv info:eu-repo/semantics/publishedVersion
dc.type.driver.fl_str_mv info:eu-repo/semantics/article
format article
status_str publishedVersion
dc.identifier.uri.fl_str_mv http://hdl.handle.net/1822/3016
url http://hdl.handle.net/1822/3016
dc.language.iso.fl_str_mv eng
language eng
dc.relation.none.fl_str_mv SADEGHI, N. ; SUGAI, H., ed. lit. - "Joint conference : European Conference on Atomic and Molecular Physics of Ionized Gases, 16 ; International Conference on Reactive Plasmas, 5, Grenoble, 2002". [Paris] : ESCAMPIG Scientific Committee, 2002. vol. 2. p. 291-292.
dc.rights.driver.fl_str_mv info:eu-repo/semantics/openAccess
eu_rights_str_mv openAccess
dc.format.none.fl_str_mv application/pdf
dc.publisher.none.fl_str_mv Escampig Scientific Committee
publisher.none.fl_str_mv Escampig Scientific Committee
dc.source.none.fl_str_mv reponame:Repositório Científico de Acesso Aberto de Portugal (Repositórios Cientìficos)
instname:Agência para a Sociedade do Conhecimento (UMIC) - FCT - Sociedade da Informação
instacron:RCAAP
instname_str Agência para a Sociedade do Conhecimento (UMIC) - FCT - Sociedade da Informação
instacron_str RCAAP
institution RCAAP
reponame_str Repositório Científico de Acesso Aberto de Portugal (Repositórios Cientìficos)
collection Repositório Científico de Acesso Aberto de Portugal (Repositórios Cientìficos)
repository.name.fl_str_mv Repositório Científico de Acesso Aberto de Portugal (Repositórios Cientìficos) - Agência para a Sociedade do Conhecimento (UMIC) - FCT - Sociedade da Informação
repository.mail.fl_str_mv
_version_ 1799132428063735808

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