Study of vanadium doped ZnO films prepared by dc reactive magnetron sputtering at different substrate temperatures

Detalhes bibliográficos
Autor(a) principal: Meng, Lijian
Data de Publicação: 2013
Outros Autores: Teixeira, Vasco, Santos, M. P.
Tipo de documento: Artigo
Idioma: eng
Título da fonte: Repositório Científico de Acesso Aberto de Portugal (Repositórios Cientìficos)
Texto Completo: http://hdl.handle.net/10400.22/3227
Resumo: ZnO films doped with vanadium (ZnO:V) have been prepared by dc reactive magnetron sputtering technique at different substrate temperatures (RT–500 C). The effects of the substrate temperature on ZnO:V films properties have been studied. XRD measurements show that only ZnO polycrystalline structure has been obtained, no V2O5 or VO2 crystal phase can be observed. It has been found that the film prepared at low substrate temperature has a preferred orientation along the (002) direction. As the substrate temperature is increased, the (002) peak intensity decreases. When the substrate temperature reaches the 500 C, the film shows a random orientation. SEM measurements show a clear formation of the nano-grains in the sample surface when the substrate temperature is higher than 400 C. The optical properties of the films have been studied by measuring the specular transmittance. The refractive index has been calculated by fitting the transmittance spectra using OJL model combined with harmonic oscillator.
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spelling Study of vanadium doped ZnO films prepared by dc reactive magnetron sputtering at different substrate temperaturesZinc OxideVanadium OxideThin FilmsSputteringOptical PropertiesZnO films doped with vanadium (ZnO:V) have been prepared by dc reactive magnetron sputtering technique at different substrate temperatures (RT–500 C). The effects of the substrate temperature on ZnO:V films properties have been studied. XRD measurements show that only ZnO polycrystalline structure has been obtained, no V2O5 or VO2 crystal phase can be observed. It has been found that the film prepared at low substrate temperature has a preferred orientation along the (002) direction. As the substrate temperature is increased, the (002) peak intensity decreases. When the substrate temperature reaches the 500 C, the film shows a random orientation. SEM measurements show a clear formation of the nano-grains in the sample surface when the substrate temperature is higher than 400 C. The optical properties of the films have been studied by measuring the specular transmittance. The refractive index has been calculated by fitting the transmittance spectra using OJL model combined with harmonic oscillator.American Scientific PublishersRepositório Científico do Instituto Politécnico do PortoMeng, LijianTeixeira, VascoSantos, M. P.2014-01-06T15:11:06Z20132013-01-01T00:00:00Zinfo:eu-repo/semantics/publishedVersioninfo:eu-repo/semantics/articleapplication/pdfhttp://hdl.handle.net/10400.22/3227eng1533-488010.1166/jnn.2013.6053metadata only accessinfo:eu-repo/semantics/openAccessreponame:Repositório Científico de Acesso Aberto de Portugal (Repositórios Cientìficos)instname:Agência para a Sociedade do Conhecimento (UMIC) - FCT - Sociedade da Informaçãoinstacron:RCAAP2023-03-13T12:43:00Zoai:recipp.ipp.pt:10400.22/3227Portal AgregadorONGhttps://www.rcaap.pt/oai/openaireopendoar:71602024-03-19T17:24:13.726095Repositório Científico de Acesso Aberto de Portugal (Repositórios Cientìficos) - Agência para a Sociedade do Conhecimento (UMIC) - FCT - Sociedade da Informaçãofalse
dc.title.none.fl_str_mv Study of vanadium doped ZnO films prepared by dc reactive magnetron sputtering at different substrate temperatures
title Study of vanadium doped ZnO films prepared by dc reactive magnetron sputtering at different substrate temperatures
spellingShingle Study of vanadium doped ZnO films prepared by dc reactive magnetron sputtering at different substrate temperatures
Meng, Lijian
Zinc Oxide
Vanadium Oxide
Thin Films
Sputtering
Optical Properties
title_short Study of vanadium doped ZnO films prepared by dc reactive magnetron sputtering at different substrate temperatures
title_full Study of vanadium doped ZnO films prepared by dc reactive magnetron sputtering at different substrate temperatures
title_fullStr Study of vanadium doped ZnO films prepared by dc reactive magnetron sputtering at different substrate temperatures
title_full_unstemmed Study of vanadium doped ZnO films prepared by dc reactive magnetron sputtering at different substrate temperatures
title_sort Study of vanadium doped ZnO films prepared by dc reactive magnetron sputtering at different substrate temperatures
author Meng, Lijian
author_facet Meng, Lijian
Teixeira, Vasco
Santos, M. P.
author_role author
author2 Teixeira, Vasco
Santos, M. P.
author2_role author
author
dc.contributor.none.fl_str_mv Repositório Científico do Instituto Politécnico do Porto
dc.contributor.author.fl_str_mv Meng, Lijian
Teixeira, Vasco
Santos, M. P.
dc.subject.por.fl_str_mv Zinc Oxide
Vanadium Oxide
Thin Films
Sputtering
Optical Properties
topic Zinc Oxide
Vanadium Oxide
Thin Films
Sputtering
Optical Properties
description ZnO films doped with vanadium (ZnO:V) have been prepared by dc reactive magnetron sputtering technique at different substrate temperatures (RT–500 C). The effects of the substrate temperature on ZnO:V films properties have been studied. XRD measurements show that only ZnO polycrystalline structure has been obtained, no V2O5 or VO2 crystal phase can be observed. It has been found that the film prepared at low substrate temperature has a preferred orientation along the (002) direction. As the substrate temperature is increased, the (002) peak intensity decreases. When the substrate temperature reaches the 500 C, the film shows a random orientation. SEM measurements show a clear formation of the nano-grains in the sample surface when the substrate temperature is higher than 400 C. The optical properties of the films have been studied by measuring the specular transmittance. The refractive index has been calculated by fitting the transmittance spectra using OJL model combined with harmonic oscillator.
publishDate 2013
dc.date.none.fl_str_mv 2013
2013-01-01T00:00:00Z
2014-01-06T15:11:06Z
dc.type.status.fl_str_mv info:eu-repo/semantics/publishedVersion
dc.type.driver.fl_str_mv info:eu-repo/semantics/article
format article
status_str publishedVersion
dc.identifier.uri.fl_str_mv http://hdl.handle.net/10400.22/3227
url http://hdl.handle.net/10400.22/3227
dc.language.iso.fl_str_mv eng
language eng
dc.relation.none.fl_str_mv 1533-4880
10.1166/jnn.2013.6053
dc.rights.driver.fl_str_mv metadata only access
info:eu-repo/semantics/openAccess
rights_invalid_str_mv metadata only access
eu_rights_str_mv openAccess
dc.format.none.fl_str_mv application/pdf
dc.publisher.none.fl_str_mv American Scientific Publishers
publisher.none.fl_str_mv American Scientific Publishers
dc.source.none.fl_str_mv reponame:Repositório Científico de Acesso Aberto de Portugal (Repositórios Cientìficos)
instname:Agência para a Sociedade do Conhecimento (UMIC) - FCT - Sociedade da Informação
instacron:RCAAP
instname_str Agência para a Sociedade do Conhecimento (UMIC) - FCT - Sociedade da Informação
instacron_str RCAAP
institution RCAAP
reponame_str Repositório Científico de Acesso Aberto de Portugal (Repositórios Cientìficos)
collection Repositório Científico de Acesso Aberto de Portugal (Repositórios Cientìficos)
repository.name.fl_str_mv Repositório Científico de Acesso Aberto de Portugal (Repositórios Cientìficos) - Agência para a Sociedade do Conhecimento (UMIC) - FCT - Sociedade da Informação
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