Influence of vibrational kinetics in a low pressure capacitively coupled hydrogen discharge

Detalhes bibliográficos
Autor(a) principal: Marques, L.
Data de Publicação: 2003
Outros Autores: Salabas, A., Gousset, G., Alves, L. L.
Tipo de documento: Artigo
Idioma: eng
Título da fonte: Repositório Científico de Acesso Aberto de Portugal (Repositórios Cientìficos)
Texto Completo: http://hdl.handle.net/1822/4385
Resumo: In this paper we present the self consistent coupling of a 2D model of a parallel plate radio frequency discharge in pure hydrogen with a homogeneous chemical kinetics model including H2(X1Σg+,v=0..14) molecules and hydrogen atoms H(n=1-5). The model can estimate the ground state atomic hydrogen density and it was found that the vibrational kinetics changes the H3+ ion density and coupled power to the discharge about 40% when comparing with previous estimates using a simplified kinetics.
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spelling Influence of vibrational kinetics in a low pressure capacitively coupled hydrogen dischargeModellingRFVibrationalHydrogenPlasmaIn this paper we present the self consistent coupling of a 2D model of a parallel plate radio frequency discharge in pure hydrogen with a homogeneous chemical kinetics model including H2(X1Σg+,v=0..14) molecules and hydrogen atoms H(n=1-5). The model can estimate the ground state atomic hydrogen density and it was found that the vibrational kinetics changes the H3+ ion density and coupled power to the discharge about 40% when comparing with previous estimates using a simplified kinetics.International Union of Pure and Applied ChemistryUniversidade do MinhoMarques, L.Salabas, A.Gousset, G.Alves, L. L.2003-08-212003-08-21T00:00:00Zinfo:eu-repo/semantics/publishedVersioninfo:eu-repo/semantics/articleapplication/pdfhttp://hdl.handle.net/1822/4385engAGOSTINO, R. [et al.], ed. lit. – “ISPC : proceedings of the International Symposium on Plasma Chemistry, 16, Taormina, Italia, 2003”. [S.l.] : International Union of Pure and Applied Chemistry, 2003. p. 274.info:eu-repo/semantics/openAccessreponame:Repositório Científico de Acesso Aberto de Portugal (Repositórios Cientìficos)instname:Agência para a Sociedade do Conhecimento (UMIC) - FCT - Sociedade da Informaçãoinstacron:RCAAP2023-07-21T12:53:34Zoai:repositorium.sdum.uminho.pt:1822/4385Portal AgregadorONGhttps://www.rcaap.pt/oai/openaireopendoar:71602024-03-19T19:52:58.278108Repositório Científico de Acesso Aberto de Portugal (Repositórios Cientìficos) - Agência para a Sociedade do Conhecimento (UMIC) - FCT - Sociedade da Informaçãofalse
dc.title.none.fl_str_mv Influence of vibrational kinetics in a low pressure capacitively coupled hydrogen discharge
title Influence of vibrational kinetics in a low pressure capacitively coupled hydrogen discharge
spellingShingle Influence of vibrational kinetics in a low pressure capacitively coupled hydrogen discharge
Marques, L.
Modelling
RF
Vibrational
Hydrogen
Plasma
title_short Influence of vibrational kinetics in a low pressure capacitively coupled hydrogen discharge
title_full Influence of vibrational kinetics in a low pressure capacitively coupled hydrogen discharge
title_fullStr Influence of vibrational kinetics in a low pressure capacitively coupled hydrogen discharge
title_full_unstemmed Influence of vibrational kinetics in a low pressure capacitively coupled hydrogen discharge
title_sort Influence of vibrational kinetics in a low pressure capacitively coupled hydrogen discharge
author Marques, L.
author_facet Marques, L.
Salabas, A.
Gousset, G.
Alves, L. L.
author_role author
author2 Salabas, A.
Gousset, G.
Alves, L. L.
author2_role author
author
author
dc.contributor.none.fl_str_mv Universidade do Minho
dc.contributor.author.fl_str_mv Marques, L.
Salabas, A.
Gousset, G.
Alves, L. L.
dc.subject.por.fl_str_mv Modelling
RF
Vibrational
Hydrogen
Plasma
topic Modelling
RF
Vibrational
Hydrogen
Plasma
description In this paper we present the self consistent coupling of a 2D model of a parallel plate radio frequency discharge in pure hydrogen with a homogeneous chemical kinetics model including H2(X1Σg+,v=0..14) molecules and hydrogen atoms H(n=1-5). The model can estimate the ground state atomic hydrogen density and it was found that the vibrational kinetics changes the H3+ ion density and coupled power to the discharge about 40% when comparing with previous estimates using a simplified kinetics.
publishDate 2003
dc.date.none.fl_str_mv 2003-08-21
2003-08-21T00:00:00Z
dc.type.status.fl_str_mv info:eu-repo/semantics/publishedVersion
dc.type.driver.fl_str_mv info:eu-repo/semantics/article
format article
status_str publishedVersion
dc.identifier.uri.fl_str_mv http://hdl.handle.net/1822/4385
url http://hdl.handle.net/1822/4385
dc.language.iso.fl_str_mv eng
language eng
dc.relation.none.fl_str_mv AGOSTINO, R. [et al.], ed. lit. – “ISPC : proceedings of the International Symposium on Plasma Chemistry, 16, Taormina, Italia, 2003”. [S.l.] : International Union of Pure and Applied Chemistry, 2003. p. 274.
dc.rights.driver.fl_str_mv info:eu-repo/semantics/openAccess
eu_rights_str_mv openAccess
dc.format.none.fl_str_mv application/pdf
dc.publisher.none.fl_str_mv International Union of Pure and Applied Chemistry
publisher.none.fl_str_mv International Union of Pure and Applied Chemistry
dc.source.none.fl_str_mv reponame:Repositório Científico de Acesso Aberto de Portugal (Repositórios Cientìficos)
instname:Agência para a Sociedade do Conhecimento (UMIC) - FCT - Sociedade da Informação
instacron:RCAAP
instname_str Agência para a Sociedade do Conhecimento (UMIC) - FCT - Sociedade da Informação
instacron_str RCAAP
institution RCAAP
reponame_str Repositório Científico de Acesso Aberto de Portugal (Repositórios Cientìficos)
collection Repositório Científico de Acesso Aberto de Portugal (Repositórios Cientìficos)
repository.name.fl_str_mv Repositório Científico de Acesso Aberto de Portugal (Repositórios Cientìficos) - Agência para a Sociedade do Conhecimento (UMIC) - FCT - Sociedade da Informação
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