Small-size MEMS accelerometer encapsulated in vacuum using Sigma-Delta modulation

Detalhes bibliográficos
Autor(a) principal: Lima, Vasco António Lourenço
Data de Publicação: 2020
Outros Autores: Cabral, Jorge, Kuhlmann, Burkhard, Gaspar, Joao, Rocha, Luís Alexandre Machado
Idioma: eng
Título da fonte: Repositório Científico de Acesso Aberto de Portugal (Repositórios Cientìficos)
Texto Completo: http://hdl.handle.net/1822/71130
Resumo: A vacuum encapsulated MEMS accelerometer using Sigma-Delta modulation is here presented. Three different modulation orders (second, third, and fourth) were implemented in a field-programable gate array (FPGA), enabling flexibility for tuning the loop parameters in real-time. Three devices were measured, and the results are in good agreement with simulations performed in Simulink. A noise figure of 123 μg/√Hz for a bandwidth of 400 Hz and a range of at least ±1 g was experimentally measured. A figure of merit considering device size and bandwidth is proposed, highlighting the relevance of the results for the current state of the art.
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spelling Small-size MEMS accelerometer encapsulated in vacuum using Sigma-Delta modulationaccelerometerMEMSSigma-DeltavacuumScience & TechnologyA vacuum encapsulated MEMS accelerometer using Sigma-Delta modulation is here presented. Three different modulation orders (second, third, and fourth) were implemented in a field-programable gate array (FPGA), enabling flexibility for tuning the loop parameters in real-time. Three devices were measured, and the results are in good agreement with simulations performed in Simulink. A noise figure of 123 μg/√Hz for a bandwidth of 400 Hz and a range of at least ±1 g was experimentally measured. A figure of merit considering device size and bandwidth is proposed, highlighting the relevance of the results for the current state of the art.FCT - Fundação para a Ciência e a Tecnologia (PDE/BDE/114563/2016)Institute of Electrical and Electronics Engineers Inc.Universidade do MinhoLima, Vasco António LourençoCabral, JorgeKuhlmann, BurkhardGaspar, JoaoRocha, Luís Alexandre Machado20202020-01-01T00:00:00Zconference paperinfo:eu-repo/semantics/publishedVersionapplication/pdfhttp://hdl.handle.net/1822/71130engV. Lima, J. Cabral, B. Kuhlmann, J. Gaspar and L. A. Rocha, "Small-size MEMS Accelerometer Encapsulated in Vacuum Using Sigma-Delta Modulation," 2020 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL), Hiroshima, Japan, 2020, pp. 1-4, doi: 10.1109/INERTIAL48129.2020.9090096.97817281298392377-346410.1109/INERTIAL48129.2020.9090096https://ieeexplore.ieee.org/document/9090096info:eu-repo/semantics/openAccessreponame:Repositório Científico de Acesso Aberto de Portugal (Repositórios Cientìficos)instname:Agência para a Sociedade do Conhecimento (UMIC) - FCT - Sociedade da Informaçãoinstacron:RCAAP2024-05-11T05:56:23Zoai:repositorium.sdum.uminho.pt:1822/71130Portal AgregadorONGhttps://www.rcaap.pt/oai/openairemluisa.alvim@gmail.comopendoar:71602024-05-11T05:56:23Repositório Científico de Acesso Aberto de Portugal (Repositórios Cientìficos) - Agência para a Sociedade do Conhecimento (UMIC) - FCT - Sociedade da Informaçãofalse
dc.title.none.fl_str_mv Small-size MEMS accelerometer encapsulated in vacuum using Sigma-Delta modulation
title Small-size MEMS accelerometer encapsulated in vacuum using Sigma-Delta modulation
spellingShingle Small-size MEMS accelerometer encapsulated in vacuum using Sigma-Delta modulation
Lima, Vasco António Lourenço
accelerometer
MEMS
Sigma-Delta
vacuum
Science & Technology
title_short Small-size MEMS accelerometer encapsulated in vacuum using Sigma-Delta modulation
title_full Small-size MEMS accelerometer encapsulated in vacuum using Sigma-Delta modulation
title_fullStr Small-size MEMS accelerometer encapsulated in vacuum using Sigma-Delta modulation
title_full_unstemmed Small-size MEMS accelerometer encapsulated in vacuum using Sigma-Delta modulation
title_sort Small-size MEMS accelerometer encapsulated in vacuum using Sigma-Delta modulation
author Lima, Vasco António Lourenço
author_facet Lima, Vasco António Lourenço
Cabral, Jorge
Kuhlmann, Burkhard
Gaspar, Joao
Rocha, Luís Alexandre Machado
author_role author
author2 Cabral, Jorge
Kuhlmann, Burkhard
Gaspar, Joao
Rocha, Luís Alexandre Machado
author2_role author
author
author
author
dc.contributor.none.fl_str_mv Universidade do Minho
dc.contributor.author.fl_str_mv Lima, Vasco António Lourenço
Cabral, Jorge
Kuhlmann, Burkhard
Gaspar, Joao
Rocha, Luís Alexandre Machado
dc.subject.por.fl_str_mv accelerometer
MEMS
Sigma-Delta
vacuum
Science & Technology
topic accelerometer
MEMS
Sigma-Delta
vacuum
Science & Technology
description A vacuum encapsulated MEMS accelerometer using Sigma-Delta modulation is here presented. Three different modulation orders (second, third, and fourth) were implemented in a field-programable gate array (FPGA), enabling flexibility for tuning the loop parameters in real-time. Three devices were measured, and the results are in good agreement with simulations performed in Simulink. A noise figure of 123 μg/√Hz for a bandwidth of 400 Hz and a range of at least ±1 g was experimentally measured. A figure of merit considering device size and bandwidth is proposed, highlighting the relevance of the results for the current state of the art.
publishDate 2020
dc.date.none.fl_str_mv 2020
2020-01-01T00:00:00Z
dc.type.driver.fl_str_mv conference paper
dc.type.status.fl_str_mv info:eu-repo/semantics/publishedVersion
status_str publishedVersion
dc.identifier.uri.fl_str_mv http://hdl.handle.net/1822/71130
url http://hdl.handle.net/1822/71130
dc.language.iso.fl_str_mv eng
language eng
dc.relation.none.fl_str_mv V. Lima, J. Cabral, B. Kuhlmann, J. Gaspar and L. A. Rocha, "Small-size MEMS Accelerometer Encapsulated in Vacuum Using Sigma-Delta Modulation," 2020 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL), Hiroshima, Japan, 2020, pp. 1-4, doi: 10.1109/INERTIAL48129.2020.9090096.
9781728129839
2377-3464
10.1109/INERTIAL48129.2020.9090096
https://ieeexplore.ieee.org/document/9090096
dc.rights.driver.fl_str_mv info:eu-repo/semantics/openAccess
eu_rights_str_mv openAccess
dc.format.none.fl_str_mv application/pdf
dc.publisher.none.fl_str_mv Institute of Electrical and Electronics Engineers Inc.
publisher.none.fl_str_mv Institute of Electrical and Electronics Engineers Inc.
dc.source.none.fl_str_mv reponame:Repositório Científico de Acesso Aberto de Portugal (Repositórios Cientìficos)
instname:Agência para a Sociedade do Conhecimento (UMIC) - FCT - Sociedade da Informação
instacron:RCAAP
instname_str Agência para a Sociedade do Conhecimento (UMIC) - FCT - Sociedade da Informação
instacron_str RCAAP
institution RCAAP
reponame_str Repositório Científico de Acesso Aberto de Portugal (Repositórios Cientìficos)
collection Repositório Científico de Acesso Aberto de Portugal (Repositórios Cientìficos)
repository.name.fl_str_mv Repositório Científico de Acesso Aberto de Portugal (Repositórios Cientìficos) - Agência para a Sociedade do Conhecimento (UMIC) - FCT - Sociedade da Informação
repository.mail.fl_str_mv mluisa.alvim@gmail.com
_version_ 1817544793675268096

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