Physical and mechanical properties of Ti1 - xSixN films

Detalhes bibliográficos
Autor(a) principal: Vaz, F.
Data de Publicação: 1998
Outros Autores: Rebouta, L., Ramos, S., Cavaleiro, A., Silva, M. F. da, Soares, J. C.
Tipo de documento: Artigo
Idioma: eng
Título da fonte: Repositório Científico de Acesso Aberto de Portugal (Repositórios Cientìficos)
Texto Completo: http://hdl.handle.net/10316/4327
Resumo: Ti1 - xSixN coatings with 0 <- x <- 0.30 and thicknesses ranging from 1.2 to 3.3 [mu]m, were deposited on to polished high-speed steel substrates by r.f. reactive magnetron sputtering. The atomic composition of the samples was measured by Rutherford backscatering spectrometry (RBS), and the texture was determined by X-ray diffraction (XRD). Great improvements in hardness and adhesion behaviour were obtained when compared to TiN. Hardness results and adhesion behaviour as a function of the Si content will be shown and discussed. The Ti0.85Si0.15N sample presented the best results with a hardness value of about 36 GPa and a critical load for total failure around 70 N.
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spelling Physical and mechanical properties of Ti1 - xSixN filmsRutherford back-scattering spectrometrySiliconTitaniumX-ray diffractionTi1 - xSixN coatings with 0 <- x <- 0.30 and thicknesses ranging from 1.2 to 3.3 [mu]m, were deposited on to polished high-speed steel substrates by r.f. reactive magnetron sputtering. The atomic composition of the samples was measured by Rutherford backscatering spectrometry (RBS), and the texture was determined by X-ray diffraction (XRD). Great improvements in hardness and adhesion behaviour were obtained when compared to TiN. Hardness results and adhesion behaviour as a function of the Si content will be shown and discussed. The Ti0.85Si0.15N sample presented the best results with a hardness value of about 36 GPa and a critical load for total failure around 70 N.http://www.sciencedirect.com/science/article/B6TVV-3TMWPHC-T/1/5b63de63f84a6eebf3669ec2ed9928ee1998info:eu-repo/semantics/publishedVersioninfo:eu-repo/semantics/articleaplication/PDFhttp://hdl.handle.net/10316/4327http://hdl.handle.net/10316/4327engSurface and Coatings Technology. 100-101:(1998) 110-115Vaz, F.Rebouta, L.Ramos, S.Cavaleiro, A.Silva, M. F. daSoares, J. C.info:eu-repo/semantics/openAccessreponame:Repositório Científico de Acesso Aberto de Portugal (Repositórios Cientìficos)instname:Agência para a Sociedade do Conhecimento (UMIC) - FCT - Sociedade da Informaçãoinstacron:RCAAP2020-05-25T12:28:18Zoai:estudogeral.uc.pt:10316/4327Portal AgregadorONGhttps://www.rcaap.pt/oai/openaireopendoar:71602024-03-19T20:58:26.972466Repositório Científico de Acesso Aberto de Portugal (Repositórios Cientìficos) - Agência para a Sociedade do Conhecimento (UMIC) - FCT - Sociedade da Informaçãofalse
dc.title.none.fl_str_mv Physical and mechanical properties of Ti1 - xSixN films
title Physical and mechanical properties of Ti1 - xSixN films
spellingShingle Physical and mechanical properties of Ti1 - xSixN films
Vaz, F.
Rutherford back-scattering spectrometry
Silicon
Titanium
X-ray diffraction
title_short Physical and mechanical properties of Ti1 - xSixN films
title_full Physical and mechanical properties of Ti1 - xSixN films
title_fullStr Physical and mechanical properties of Ti1 - xSixN films
title_full_unstemmed Physical and mechanical properties of Ti1 - xSixN films
title_sort Physical and mechanical properties of Ti1 - xSixN films
author Vaz, F.
author_facet Vaz, F.
Rebouta, L.
Ramos, S.
Cavaleiro, A.
Silva, M. F. da
Soares, J. C.
author_role author
author2 Rebouta, L.
Ramos, S.
Cavaleiro, A.
Silva, M. F. da
Soares, J. C.
author2_role author
author
author
author
author
dc.contributor.author.fl_str_mv Vaz, F.
Rebouta, L.
Ramos, S.
Cavaleiro, A.
Silva, M. F. da
Soares, J. C.
dc.subject.por.fl_str_mv Rutherford back-scattering spectrometry
Silicon
Titanium
X-ray diffraction
topic Rutherford back-scattering spectrometry
Silicon
Titanium
X-ray diffraction
description Ti1 - xSixN coatings with 0 <- x <- 0.30 and thicknesses ranging from 1.2 to 3.3 [mu]m, were deposited on to polished high-speed steel substrates by r.f. reactive magnetron sputtering. The atomic composition of the samples was measured by Rutherford backscatering spectrometry (RBS), and the texture was determined by X-ray diffraction (XRD). Great improvements in hardness and adhesion behaviour were obtained when compared to TiN. Hardness results and adhesion behaviour as a function of the Si content will be shown and discussed. The Ti0.85Si0.15N sample presented the best results with a hardness value of about 36 GPa and a critical load for total failure around 70 N.
publishDate 1998
dc.date.none.fl_str_mv 1998
dc.type.status.fl_str_mv info:eu-repo/semantics/publishedVersion
dc.type.driver.fl_str_mv info:eu-repo/semantics/article
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dc.identifier.uri.fl_str_mv http://hdl.handle.net/10316/4327
http://hdl.handle.net/10316/4327
url http://hdl.handle.net/10316/4327
dc.language.iso.fl_str_mv eng
language eng
dc.relation.none.fl_str_mv Surface and Coatings Technology. 100-101:(1998) 110-115
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eu_rights_str_mv openAccess
dc.format.none.fl_str_mv aplication/PDF
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