Physical and mechanical properties of Ti1 - xSixN films
Autor(a) principal: | |
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Data de Publicação: | 1998 |
Outros Autores: | , , , , |
Tipo de documento: | Artigo |
Idioma: | eng |
Título da fonte: | Repositório Científico de Acesso Aberto de Portugal (Repositórios Cientìficos) |
Texto Completo: | http://hdl.handle.net/10316/4327 |
Resumo: | Ti1 - xSixN coatings with 0 <- x <- 0.30 and thicknesses ranging from 1.2 to 3.3 [mu]m, were deposited on to polished high-speed steel substrates by r.f. reactive magnetron sputtering. The atomic composition of the samples was measured by Rutherford backscatering spectrometry (RBS), and the texture was determined by X-ray diffraction (XRD). Great improvements in hardness and adhesion behaviour were obtained when compared to TiN. Hardness results and adhesion behaviour as a function of the Si content will be shown and discussed. The Ti0.85Si0.15N sample presented the best results with a hardness value of about 36 GPa and a critical load for total failure around 70 N. |
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Physical and mechanical properties of Ti1 - xSixN filmsRutherford back-scattering spectrometrySiliconTitaniumX-ray diffractionTi1 - xSixN coatings with 0 <- x <- 0.30 and thicknesses ranging from 1.2 to 3.3 [mu]m, were deposited on to polished high-speed steel substrates by r.f. reactive magnetron sputtering. The atomic composition of the samples was measured by Rutherford backscatering spectrometry (RBS), and the texture was determined by X-ray diffraction (XRD). Great improvements in hardness and adhesion behaviour were obtained when compared to TiN. Hardness results and adhesion behaviour as a function of the Si content will be shown and discussed. The Ti0.85Si0.15N sample presented the best results with a hardness value of about 36 GPa and a critical load for total failure around 70 N.http://www.sciencedirect.com/science/article/B6TVV-3TMWPHC-T/1/5b63de63f84a6eebf3669ec2ed9928ee1998info:eu-repo/semantics/publishedVersioninfo:eu-repo/semantics/articleaplication/PDFhttp://hdl.handle.net/10316/4327http://hdl.handle.net/10316/4327engSurface and Coatings Technology. 100-101:(1998) 110-115Vaz, F.Rebouta, L.Ramos, S.Cavaleiro, A.Silva, M. F. daSoares, J. C.info:eu-repo/semantics/openAccessreponame:Repositório Científico de Acesso Aberto de Portugal (Repositórios Cientìficos)instname:Agência para a Sociedade do Conhecimento (UMIC) - FCT - Sociedade da Informaçãoinstacron:RCAAP2020-05-25T12:28:18Zoai:estudogeral.uc.pt:10316/4327Portal AgregadorONGhttps://www.rcaap.pt/oai/openaireopendoar:71602024-03-19T20:58:26.972466Repositório Científico de Acesso Aberto de Portugal (Repositórios Cientìficos) - Agência para a Sociedade do Conhecimento (UMIC) - FCT - Sociedade da Informaçãofalse |
dc.title.none.fl_str_mv |
Physical and mechanical properties of Ti1 - xSixN films |
title |
Physical and mechanical properties of Ti1 - xSixN films |
spellingShingle |
Physical and mechanical properties of Ti1 - xSixN films Vaz, F. Rutherford back-scattering spectrometry Silicon Titanium X-ray diffraction |
title_short |
Physical and mechanical properties of Ti1 - xSixN films |
title_full |
Physical and mechanical properties of Ti1 - xSixN films |
title_fullStr |
Physical and mechanical properties of Ti1 - xSixN films |
title_full_unstemmed |
Physical and mechanical properties of Ti1 - xSixN films |
title_sort |
Physical and mechanical properties of Ti1 - xSixN films |
author |
Vaz, F. |
author_facet |
Vaz, F. Rebouta, L. Ramos, S. Cavaleiro, A. Silva, M. F. da Soares, J. C. |
author_role |
author |
author2 |
Rebouta, L. Ramos, S. Cavaleiro, A. Silva, M. F. da Soares, J. C. |
author2_role |
author author author author author |
dc.contributor.author.fl_str_mv |
Vaz, F. Rebouta, L. Ramos, S. Cavaleiro, A. Silva, M. F. da Soares, J. C. |
dc.subject.por.fl_str_mv |
Rutherford back-scattering spectrometry Silicon Titanium X-ray diffraction |
topic |
Rutherford back-scattering spectrometry Silicon Titanium X-ray diffraction |
description |
Ti1 - xSixN coatings with 0 <- x <- 0.30 and thicknesses ranging from 1.2 to 3.3 [mu]m, were deposited on to polished high-speed steel substrates by r.f. reactive magnetron sputtering. The atomic composition of the samples was measured by Rutherford backscatering spectrometry (RBS), and the texture was determined by X-ray diffraction (XRD). Great improvements in hardness and adhesion behaviour were obtained when compared to TiN. Hardness results and adhesion behaviour as a function of the Si content will be shown and discussed. The Ti0.85Si0.15N sample presented the best results with a hardness value of about 36 GPa and a critical load for total failure around 70 N. |
publishDate |
1998 |
dc.date.none.fl_str_mv |
1998 |
dc.type.status.fl_str_mv |
info:eu-repo/semantics/publishedVersion |
dc.type.driver.fl_str_mv |
info:eu-repo/semantics/article |
format |
article |
status_str |
publishedVersion |
dc.identifier.uri.fl_str_mv |
http://hdl.handle.net/10316/4327 http://hdl.handle.net/10316/4327 |
url |
http://hdl.handle.net/10316/4327 |
dc.language.iso.fl_str_mv |
eng |
language |
eng |
dc.relation.none.fl_str_mv |
Surface and Coatings Technology. 100-101:(1998) 110-115 |
dc.rights.driver.fl_str_mv |
info:eu-repo/semantics/openAccess |
eu_rights_str_mv |
openAccess |
dc.format.none.fl_str_mv |
aplication/PDF |
dc.source.none.fl_str_mv |
reponame:Repositório Científico de Acesso Aberto de Portugal (Repositórios Cientìficos) instname:Agência para a Sociedade do Conhecimento (UMIC) - FCT - Sociedade da Informação instacron:RCAAP |
instname_str |
Agência para a Sociedade do Conhecimento (UMIC) - FCT - Sociedade da Informação |
instacron_str |
RCAAP |
institution |
RCAAP |
reponame_str |
Repositório Científico de Acesso Aberto de Portugal (Repositórios Cientìficos) |
collection |
Repositório Científico de Acesso Aberto de Portugal (Repositórios Cientìficos) |
repository.name.fl_str_mv |
Repositório Científico de Acesso Aberto de Portugal (Repositórios Cientìficos) - Agência para a Sociedade do Conhecimento (UMIC) - FCT - Sociedade da Informação |
repository.mail.fl_str_mv |
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1799133875836813312 |