Physical, structural and mechanical characterization of Ti1-xSixNy films
Autor(a) principal: | |
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Data de Publicação: | 1998 |
Outros Autores: | , , , |
Tipo de documento: | Artigo |
Idioma: | eng |
Título da fonte: | Repositório Científico de Acesso Aberto de Portugal (Repositórios Cientìficos) |
Texto Completo: | http://hdl.handle.net/10316/4325 |
Resumo: | Within the frame of this work, Ti1-xSixNy hard coatings with 0<=x<=0.37 and thicknesses ranging from 1.2 to 3.5 [mu]m, were prepared by r.f. reactive magnetron sputtering in an Ar/N2 gas mixture. X-ray diffraction and Fourier analysis of X-ray profiles were used to investigate the structure and grain size, and its correlation with hardness behaviour, as a function of the Si content, bias voltage and working gas (argon) flow rate. In this respect, the results show that a double cubic phase of NaCl type was developed with lattice parameters of 4.18 and 4.30 Ã…, revealing the (111) orientation for low Si content (x=0.05), (220) for intermediate Si contents (0.13<=x<=0.22) and (200) for the highest Si contents (0.30<=x<=0.37). Regarding the results of ultramicrohardness tests, and although all samples with 0.05<=x<=0.30 present a hardness value higher than 30 GPa, the Ti0.85Si0.15N1.03 revealed the highest hardness value, around 47 GPa, which is more than twice as high as that of common TiN. Furthermore, the study of hardness as a function of the applied bias voltage revealed that best results are achieved between -50 and 0 V. The variation in hardness as a function of the argon flow showed that best results in hardness are obtained when working with flow rates around 110 cm3/min. |
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Physical, structural and mechanical characterization of Ti1-xSixNy filmsHard coatingsTitanium and silicon nitrideGrain sizeTextureWithin the frame of this work, Ti1-xSixNy hard coatings with 0<=x<=0.37 and thicknesses ranging from 1.2 to 3.5 [mu]m, were prepared by r.f. reactive magnetron sputtering in an Ar/N2 gas mixture. X-ray diffraction and Fourier analysis of X-ray profiles were used to investigate the structure and grain size, and its correlation with hardness behaviour, as a function of the Si content, bias voltage and working gas (argon) flow rate. In this respect, the results show that a double cubic phase of NaCl type was developed with lattice parameters of 4.18 and 4.30 Ã…, revealing the (111) orientation for low Si content (x=0.05), (220) for intermediate Si contents (0.13<=x<=0.22) and (200) for the highest Si contents (0.30<=x<=0.37). Regarding the results of ultramicrohardness tests, and although all samples with 0.05<=x<=0.30 present a hardness value higher than 30 GPa, the Ti0.85Si0.15N1.03 revealed the highest hardness value, around 47 GPa, which is more than twice as high as that of common TiN. Furthermore, the study of hardness as a function of the applied bias voltage revealed that best results are achieved between -50 and 0 V. The variation in hardness as a function of the argon flow showed that best results in hardness are obtained when working with flow rates around 110 cm3/min.http://www.sciencedirect.com/science/article/B6TVV-3Y900PW-42/1/6ec2923d3bcdc8c26bed448c0d7d53f51998info:eu-repo/semantics/publishedVersioninfo:eu-repo/semantics/articleaplication/PDFhttp://hdl.handle.net/10316/4325http://hdl.handle.net/10316/4325engSurface and Coatings Technology. 108-109:1-3 (1998) 236-240Vaz, F.Rebouta, L.Ramos, S.Silva, M. F. daSoares, J. C.info:eu-repo/semantics/openAccessreponame:Repositório Científico de Acesso Aberto de Portugal (Repositórios Cientìficos)instname:Agência para a Sociedade do Conhecimento (UMIC) - FCT - Sociedade da Informaçãoinstacron:RCAAP2020-05-25T12:28:17Zoai:estudogeral.uc.pt:10316/4325Portal AgregadorONGhttps://www.rcaap.pt/oai/openaireopendoar:71602024-03-19T20:58:26.925824Repositório Científico de Acesso Aberto de Portugal (Repositórios Cientìficos) - Agência para a Sociedade do Conhecimento (UMIC) - FCT - Sociedade da Informaçãofalse |
dc.title.none.fl_str_mv |
Physical, structural and mechanical characterization of Ti1-xSixNy films |
title |
Physical, structural and mechanical characterization of Ti1-xSixNy films |
spellingShingle |
Physical, structural and mechanical characterization of Ti1-xSixNy films Vaz, F. Hard coatings Titanium and silicon nitride Grain size Texture |
title_short |
Physical, structural and mechanical characterization of Ti1-xSixNy films |
title_full |
Physical, structural and mechanical characterization of Ti1-xSixNy films |
title_fullStr |
Physical, structural and mechanical characterization of Ti1-xSixNy films |
title_full_unstemmed |
Physical, structural and mechanical characterization of Ti1-xSixNy films |
title_sort |
Physical, structural and mechanical characterization of Ti1-xSixNy films |
author |
Vaz, F. |
author_facet |
Vaz, F. Rebouta, L. Ramos, S. Silva, M. F. da Soares, J. C. |
author_role |
author |
author2 |
Rebouta, L. Ramos, S. Silva, M. F. da Soares, J. C. |
author2_role |
author author author author |
dc.contributor.author.fl_str_mv |
Vaz, F. Rebouta, L. Ramos, S. Silva, M. F. da Soares, J. C. |
dc.subject.por.fl_str_mv |
Hard coatings Titanium and silicon nitride Grain size Texture |
topic |
Hard coatings Titanium and silicon nitride Grain size Texture |
description |
Within the frame of this work, Ti1-xSixNy hard coatings with 0<=x<=0.37 and thicknesses ranging from 1.2 to 3.5 [mu]m, were prepared by r.f. reactive magnetron sputtering in an Ar/N2 gas mixture. X-ray diffraction and Fourier analysis of X-ray profiles were used to investigate the structure and grain size, and its correlation with hardness behaviour, as a function of the Si content, bias voltage and working gas (argon) flow rate. In this respect, the results show that a double cubic phase of NaCl type was developed with lattice parameters of 4.18 and 4.30 Ã…, revealing the (111) orientation for low Si content (x=0.05), (220) for intermediate Si contents (0.13<=x<=0.22) and (200) for the highest Si contents (0.30<=x<=0.37). Regarding the results of ultramicrohardness tests, and although all samples with 0.05<=x<=0.30 present a hardness value higher than 30 GPa, the Ti0.85Si0.15N1.03 revealed the highest hardness value, around 47 GPa, which is more than twice as high as that of common TiN. Furthermore, the study of hardness as a function of the applied bias voltage revealed that best results are achieved between -50 and 0 V. The variation in hardness as a function of the argon flow showed that best results in hardness are obtained when working with flow rates around 110 cm3/min. |
publishDate |
1998 |
dc.date.none.fl_str_mv |
1998 |
dc.type.status.fl_str_mv |
info:eu-repo/semantics/publishedVersion |
dc.type.driver.fl_str_mv |
info:eu-repo/semantics/article |
format |
article |
status_str |
publishedVersion |
dc.identifier.uri.fl_str_mv |
http://hdl.handle.net/10316/4325 http://hdl.handle.net/10316/4325 |
url |
http://hdl.handle.net/10316/4325 |
dc.language.iso.fl_str_mv |
eng |
language |
eng |
dc.relation.none.fl_str_mv |
Surface and Coatings Technology. 108-109:1-3 (1998) 236-240 |
dc.rights.driver.fl_str_mv |
info:eu-repo/semantics/openAccess |
eu_rights_str_mv |
openAccess |
dc.format.none.fl_str_mv |
aplication/PDF |
dc.source.none.fl_str_mv |
reponame:Repositório Científico de Acesso Aberto de Portugal (Repositórios Cientìficos) instname:Agência para a Sociedade do Conhecimento (UMIC) - FCT - Sociedade da Informação instacron:RCAAP |
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Agência para a Sociedade do Conhecimento (UMIC) - FCT - Sociedade da Informação |
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RCAAP |
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RCAAP |
reponame_str |
Repositório Científico de Acesso Aberto de Portugal (Repositórios Cientìficos) |
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Repositório Científico de Acesso Aberto de Portugal (Repositórios Cientìficos) |
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Repositório Científico de Acesso Aberto de Portugal (Repositórios Cientìficos) - Agência para a Sociedade do Conhecimento (UMIC) - FCT - Sociedade da Informação |
repository.mail.fl_str_mv |
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1799133875834716160 |