Resonant accelerometer based on double-ended tuning fork and a force amplification mechanism

Detalhes bibliográficos
Autor(a) principal: Moreira, Eurico Esteves
Data de Publicação: 2018
Outros Autores: Kuhlmann, Burkhard, Gaspar, João, Rocha, Luís Alexandre Machado
Idioma: eng
Título da fonte: Repositório Científico de Acesso Aberto de Portugal (Repositórios Cientìficos)
Texto Completo: http://hdl.handle.net/1822/60857
Resumo: Resonant accelerometers are an alternative to amplitude modulated devices due to their higher integration capabilities, since they are encapsulated in vacuum and are stable at low pressures. Vacuum is required for some sensors (i.e., gyroscopes) but amplitude modulated accelerometers tend to be unstable under such conditions and therefore cannot be integrated in the same package. Herewith, a device composed by double-ended tuning fork resonators (DETF) and a force amplification mechanism for sensitivity enhancement is presented. Characterization of the fabricated devices was performed, and the design was successfully validated. A sensitivity close to 80 Hz/g was experimentally measured and the DETF characterization for different driving (AC) and bias voltages (DC) is also presented.
id RCAP_4c76db1281448c37fc27ca928a474cee
oai_identifier_str oai:repositorium.sdum.uminho.pt:1822/60857
network_acronym_str RCAP
network_name_str Repositório Científico de Acesso Aberto de Portugal (Repositórios Cientìficos)
repository_id_str 7160
spelling Resonant accelerometer based on double-ended tuning fork and a force amplification mechanismResonant accelerometers are an alternative to amplitude modulated devices due to their higher integration capabilities, since they are encapsulated in vacuum and are stable at low pressures. Vacuum is required for some sensors (i.e., gyroscopes) but amplitude modulated accelerometers tend to be unstable under such conditions and therefore cannot be integrated in the same package. Herewith, a device composed by double-ended tuning fork resonators (DETF) and a force amplification mechanism for sensitivity enhancement is presented. Characterization of the fabricated devices was performed, and the design was successfully validated. A sensitivity close to 80 Hz/g was experimentally measured and the DETF characterization for different driving (AC) and bias voltages (DC) is also presented.The first author is supported by FCT– Fundação para a Ciência e Tecnologia through the grant PDE/BDE/114564/2016. This work is supported by FCT with the reference project UID/EEA/04436/2013, COMPETE 2020 with the code POCI-01-0145-FEDER-006941.info:eu-repo/semantics/publishedVersionMultidisciplinary Digital Publishing InstituteUniversidade do MinhoMoreira, Eurico EstevesKuhlmann, BurkhardGaspar, JoãoRocha, Luís Alexandre Machado2018-11-132018-11-13T00:00:00Zconference paperinfo:eu-repo/semantics/publishedVersionapplication/pdfhttp://hdl.handle.net/1822/60857eng2504-390010.3390/proceedings2131030info:eu-repo/semantics/openAccessreponame:Repositório Científico de Acesso Aberto de Portugal (Repositórios Cientìficos)instname:Agência para a Sociedade do Conhecimento (UMIC) - FCT - Sociedade da Informaçãoinstacron:RCAAP2024-05-11T05:59:32Zoai:repositorium.sdum.uminho.pt:1822/60857Portal AgregadorONGhttps://www.rcaap.pt/oai/openairemluisa.alvim@gmail.comopendoar:71602024-05-11T05:59:32Repositório Científico de Acesso Aberto de Portugal (Repositórios Cientìficos) - Agência para a Sociedade do Conhecimento (UMIC) - FCT - Sociedade da Informaçãofalse
dc.title.none.fl_str_mv Resonant accelerometer based on double-ended tuning fork and a force amplification mechanism
title Resonant accelerometer based on double-ended tuning fork and a force amplification mechanism
spellingShingle Resonant accelerometer based on double-ended tuning fork and a force amplification mechanism
Moreira, Eurico Esteves
title_short Resonant accelerometer based on double-ended tuning fork and a force amplification mechanism
title_full Resonant accelerometer based on double-ended tuning fork and a force amplification mechanism
title_fullStr Resonant accelerometer based on double-ended tuning fork and a force amplification mechanism
title_full_unstemmed Resonant accelerometer based on double-ended tuning fork and a force amplification mechanism
title_sort Resonant accelerometer based on double-ended tuning fork and a force amplification mechanism
author Moreira, Eurico Esteves
author_facet Moreira, Eurico Esteves
Kuhlmann, Burkhard
Gaspar, João
Rocha, Luís Alexandre Machado
author_role author
author2 Kuhlmann, Burkhard
Gaspar, João
Rocha, Luís Alexandre Machado
author2_role author
author
author
dc.contributor.none.fl_str_mv Universidade do Minho
dc.contributor.author.fl_str_mv Moreira, Eurico Esteves
Kuhlmann, Burkhard
Gaspar, João
Rocha, Luís Alexandre Machado
description Resonant accelerometers are an alternative to amplitude modulated devices due to their higher integration capabilities, since they are encapsulated in vacuum and are stable at low pressures. Vacuum is required for some sensors (i.e., gyroscopes) but amplitude modulated accelerometers tend to be unstable under such conditions and therefore cannot be integrated in the same package. Herewith, a device composed by double-ended tuning fork resonators (DETF) and a force amplification mechanism for sensitivity enhancement is presented. Characterization of the fabricated devices was performed, and the design was successfully validated. A sensitivity close to 80 Hz/g was experimentally measured and the DETF characterization for different driving (AC) and bias voltages (DC) is also presented.
publishDate 2018
dc.date.none.fl_str_mv 2018-11-13
2018-11-13T00:00:00Z
dc.type.driver.fl_str_mv conference paper
dc.type.status.fl_str_mv info:eu-repo/semantics/publishedVersion
status_str publishedVersion
dc.identifier.uri.fl_str_mv http://hdl.handle.net/1822/60857
url http://hdl.handle.net/1822/60857
dc.language.iso.fl_str_mv eng
language eng
dc.relation.none.fl_str_mv 2504-3900
10.3390/proceedings2131030
dc.rights.driver.fl_str_mv info:eu-repo/semantics/openAccess
eu_rights_str_mv openAccess
dc.format.none.fl_str_mv application/pdf
dc.publisher.none.fl_str_mv Multidisciplinary Digital Publishing Institute
publisher.none.fl_str_mv Multidisciplinary Digital Publishing Institute
dc.source.none.fl_str_mv reponame:Repositório Científico de Acesso Aberto de Portugal (Repositórios Cientìficos)
instname:Agência para a Sociedade do Conhecimento (UMIC) - FCT - Sociedade da Informação
instacron:RCAAP
instname_str Agência para a Sociedade do Conhecimento (UMIC) - FCT - Sociedade da Informação
instacron_str RCAAP
institution RCAAP
reponame_str Repositório Científico de Acesso Aberto de Portugal (Repositórios Cientìficos)
collection Repositório Científico de Acesso Aberto de Portugal (Repositórios Cientìficos)
repository.name.fl_str_mv Repositório Científico de Acesso Aberto de Portugal (Repositórios Cientìficos) - Agência para a Sociedade do Conhecimento (UMIC) - FCT - Sociedade da Informação
repository.mail.fl_str_mv mluisa.alvim@gmail.com
_version_ 1817544812107137024

Registros relacionados