Deposition of diamond films for electronic devices

Detalhes bibliográficos
Autor(a) principal: Mukherjee, Debarati
Data de Publicação: 2020
Idioma: eng
Título da fonte: Repositório Científico de Acesso Aberto de Portugal (Repositórios Cientìficos)
Texto Completo: http://hdl.handle.net/10773/29666
Resumo: This PhD thesis presents details about the usage of diamond in electronics. It presents a review of the properties of diamond and the mechanisms of its growth using hot filament chemical vapour deposition (HFCVD). Presented in the thesis are the experimental details and discussions that follow from it about the optimization of the deposition technique and the growth of diamond on various electronically relevant substrates. The discussions present an analysis of the parameters typically involved in the HFCVD, particularly the pre-treatment that the substrates receive- namely, the novel nucleation procedure (NNP), as well as growth temperatures and plasma chemistry and how they affect the characteristics of the thus-grown films. Extensive morphological and spectroscopic analysis has been made in order to characterise these films.
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spelling Deposition of diamond films for electronic devicesHFCVDPolycrystalline diamondNNPSiSAWHEMTsHigh power electronic devicesThis PhD thesis presents details about the usage of diamond in electronics. It presents a review of the properties of diamond and the mechanisms of its growth using hot filament chemical vapour deposition (HFCVD). Presented in the thesis are the experimental details and discussions that follow from it about the optimization of the deposition technique and the growth of diamond on various electronically relevant substrates. The discussions present an analysis of the parameters typically involved in the HFCVD, particularly the pre-treatment that the substrates receive- namely, the novel nucleation procedure (NNP), as well as growth temperatures and plasma chemistry and how they affect the characteristics of the thus-grown films. Extensive morphological and spectroscopic analysis has been made in order to characterise these films.Este trabalho discute a utilização de diamante em aplicações electrónicas. É apresentada uma revisão detalhada das propriedades de diamante e dos respectivos mecanismos de crescimento utilizando deposição química a partir da fase vapor com filament quente (hot filament chemical vapour deposition - HFCVD). Os detalhes experimentais relativos à otimização desta técnica tendo em vista o crescimento de diamante em vários substratos com relevância em eletrónica são apresentados e discutidos com detalhe. A discussão inclui a análise dos parâmetros tipicamente envolvidos em HFCVD, em particular do pré-tratamento que o substrato recebe e que é conhecido na literatura como "novel nucleation procedure" (NNP), assim como das temperaturas de crescimento e da química do plasma, bem como a influência de todos estes parâmetros nas características finais dos filmes. A caracterização morfológica dos filmes envolveu técnicas de microscopia e espetroscopia.2020-012020-01-01T00:00:00Z2022-02-26T00:00:00Zdoctoral thesisinfo:eu-repo/semantics/publishedVersionapplication/pdfhttp://hdl.handle.net/10773/29666TID:101583354engMukherjee, Debaratiinfo:eu-repo/semantics/embargoedAccessreponame:Repositório Científico de Acesso Aberto de Portugal (Repositórios Cientìficos)instname:Agência para a Sociedade do Conhecimento (UMIC) - FCT - Sociedade da Informaçãoinstacron:RCAAP2024-05-06T04:28:18Zoai:ria.ua.pt:10773/29666Portal AgregadorONGhttps://www.rcaap.pt/oai/openairemluisa.alvim@gmail.comopendoar:71602024-05-06T04:28:18Repositório Científico de Acesso Aberto de Portugal (Repositórios Cientìficos) - Agência para a Sociedade do Conhecimento (UMIC) - FCT - Sociedade da Informaçãofalse
dc.title.none.fl_str_mv Deposition of diamond films for electronic devices
title Deposition of diamond films for electronic devices
spellingShingle Deposition of diamond films for electronic devices
Mukherjee, Debarati
HFCVD
Polycrystalline diamond
NNP
Si
SAW
HEMTs
High power electronic devices
title_short Deposition of diamond films for electronic devices
title_full Deposition of diamond films for electronic devices
title_fullStr Deposition of diamond films for electronic devices
title_full_unstemmed Deposition of diamond films for electronic devices
title_sort Deposition of diamond films for electronic devices
author Mukherjee, Debarati
author_facet Mukherjee, Debarati
author_role author
dc.contributor.author.fl_str_mv Mukherjee, Debarati
dc.subject.por.fl_str_mv HFCVD
Polycrystalline diamond
NNP
Si
SAW
HEMTs
High power electronic devices
topic HFCVD
Polycrystalline diamond
NNP
Si
SAW
HEMTs
High power electronic devices
description This PhD thesis presents details about the usage of diamond in electronics. It presents a review of the properties of diamond and the mechanisms of its growth using hot filament chemical vapour deposition (HFCVD). Presented in the thesis are the experimental details and discussions that follow from it about the optimization of the deposition technique and the growth of diamond on various electronically relevant substrates. The discussions present an analysis of the parameters typically involved in the HFCVD, particularly the pre-treatment that the substrates receive- namely, the novel nucleation procedure (NNP), as well as growth temperatures and plasma chemistry and how they affect the characteristics of the thus-grown films. Extensive morphological and spectroscopic analysis has been made in order to characterise these films.
publishDate 2020
dc.date.none.fl_str_mv 2020-01
2020-01-01T00:00:00Z
2022-02-26T00:00:00Z
dc.type.driver.fl_str_mv doctoral thesis
dc.type.status.fl_str_mv info:eu-repo/semantics/publishedVersion
status_str publishedVersion
dc.identifier.uri.fl_str_mv http://hdl.handle.net/10773/29666
TID:101583354
url http://hdl.handle.net/10773/29666
identifier_str_mv TID:101583354
dc.language.iso.fl_str_mv eng
language eng
dc.rights.driver.fl_str_mv info:eu-repo/semantics/embargoedAccess
eu_rights_str_mv embargoedAccess
dc.format.none.fl_str_mv application/pdf
dc.source.none.fl_str_mv reponame:Repositório Científico de Acesso Aberto de Portugal (Repositórios Cientìficos)
instname:Agência para a Sociedade do Conhecimento (UMIC) - FCT - Sociedade da Informação
instacron:RCAAP
instname_str Agência para a Sociedade do Conhecimento (UMIC) - FCT - Sociedade da Informação
instacron_str RCAAP
institution RCAAP
reponame_str Repositório Científico de Acesso Aberto de Portugal (Repositórios Cientìficos)
collection Repositório Científico de Acesso Aberto de Portugal (Repositórios Cientìficos)
repository.name.fl_str_mv Repositório Científico de Acesso Aberto de Portugal (Repositórios Cientìficos) - Agência para a Sociedade do Conhecimento (UMIC) - FCT - Sociedade da Informação
repository.mail.fl_str_mv mluisa.alvim@gmail.com
_version_ 1817543758244216832

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