Bulk-micromachined tunable fabry–perot microinterferometer for the visible spectral range

Detalhes bibliográficos
Autor(a) principal: Correia, J. H.
Data de Publicação: 1999
Outros Autores: Bartek, M., Wolffenbuttel, R. F.
Tipo de documento: Artigo
Idioma: eng
Título da fonte: Repositório Científico de Acesso Aberto de Portugal (Repositórios Cientìficos)
Texto Completo: http://hdl.handle.net/1822/3775
Resumo: The design, fabrication and measured characteristics of a bulk-micromachined tunable Fabry–Perot microinterferometer (FPMI) for the visible spectral range are presented. The FPMI is formed by two parallel 40 nm thick silver mirrors supported by a 300 nm low tensile stress silicon nitride membrane with a square aperture (side length of 2 mm) and initial cavity gap of 1.2 µm. One of the mirrors is fixed, the other is under tension on a movable Si frame, which is electrostatically deflected, using several distributed electrodes, to control cavity spacing and mirror parallelism. Performance achieved is: high flatness of the mirrors (λ/10 for the visible part of the spectrum), low control voltages (<21 V for 450 nm deflection) and simple fabrication.
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spelling Bulk-micromachined tunable fabry–perot microinterferometer for the visible spectral rangeInterferometer Fabry–PerotSpectrometerFWHMFinesseThe design, fabrication and measured characteristics of a bulk-micromachined tunable Fabry–Perot microinterferometer (FPMI) for the visible spectral range are presented. The FPMI is formed by two parallel 40 nm thick silver mirrors supported by a 300 nm low tensile stress silicon nitride membrane with a square aperture (side length of 2 mm) and initial cavity gap of 1.2 µm. One of the mirrors is fixed, the other is under tension on a movable Si frame, which is electrostatically deflected, using several distributed electrodes, to control cavity spacing and mirror parallelism. Performance achieved is: high flatness of the mirrors (λ/10 for the visible part of the spectrum), low control voltages (<21 V for 450 nm deflection) and simple fabrication.Fundação para a Ciência e Tecnologia (FCT)ElsevierUniversidade do MinhoCorreia, J. H.Bartek, M.Wolffenbuttel, R. F.19991999-01-01T00:00:00Zinfo:eu-repo/semantics/publishedVersioninfo:eu-repo/semantics/articleapplication/pdfhttp://hdl.handle.net/1822/3775eng"Sensors and actuators A : Physical". ISSN 0924-4247. 76 (1999) 191-196.0924-4247info:eu-repo/semantics/openAccessreponame:Repositório Científico de Acesso Aberto de Portugal (Repositórios Cientìficos)instname:Agência para a Sociedade do Conhecimento (UMIC) - FCT - Sociedade da Informaçãoinstacron:RCAAP2023-07-21T12:27:28Zoai:repositorium.sdum.uminho.pt:1822/3775Portal AgregadorONGhttps://www.rcaap.pt/oai/openaireopendoar:71602024-03-19T19:22:03.847085Repositório Científico de Acesso Aberto de Portugal (Repositórios Cientìficos) - Agência para a Sociedade do Conhecimento (UMIC) - FCT - Sociedade da Informaçãofalse
dc.title.none.fl_str_mv Bulk-micromachined tunable fabry–perot microinterferometer for the visible spectral range
title Bulk-micromachined tunable fabry–perot microinterferometer for the visible spectral range
spellingShingle Bulk-micromachined tunable fabry–perot microinterferometer for the visible spectral range
Correia, J. H.
Interferometer Fabry–Perot
Spectrometer
FWHM
Finesse
title_short Bulk-micromachined tunable fabry–perot microinterferometer for the visible spectral range
title_full Bulk-micromachined tunable fabry–perot microinterferometer for the visible spectral range
title_fullStr Bulk-micromachined tunable fabry–perot microinterferometer for the visible spectral range
title_full_unstemmed Bulk-micromachined tunable fabry–perot microinterferometer for the visible spectral range
title_sort Bulk-micromachined tunable fabry–perot microinterferometer for the visible spectral range
author Correia, J. H.
author_facet Correia, J. H.
Bartek, M.
Wolffenbuttel, R. F.
author_role author
author2 Bartek, M.
Wolffenbuttel, R. F.
author2_role author
author
dc.contributor.none.fl_str_mv Universidade do Minho
dc.contributor.author.fl_str_mv Correia, J. H.
Bartek, M.
Wolffenbuttel, R. F.
dc.subject.por.fl_str_mv Interferometer Fabry–Perot
Spectrometer
FWHM
Finesse
topic Interferometer Fabry–Perot
Spectrometer
FWHM
Finesse
description The design, fabrication and measured characteristics of a bulk-micromachined tunable Fabry–Perot microinterferometer (FPMI) for the visible spectral range are presented. The FPMI is formed by two parallel 40 nm thick silver mirrors supported by a 300 nm low tensile stress silicon nitride membrane with a square aperture (side length of 2 mm) and initial cavity gap of 1.2 µm. One of the mirrors is fixed, the other is under tension on a movable Si frame, which is electrostatically deflected, using several distributed electrodes, to control cavity spacing and mirror parallelism. Performance achieved is: high flatness of the mirrors (λ/10 for the visible part of the spectrum), low control voltages (<21 V for 450 nm deflection) and simple fabrication.
publishDate 1999
dc.date.none.fl_str_mv 1999
1999-01-01T00:00:00Z
dc.type.status.fl_str_mv info:eu-repo/semantics/publishedVersion
dc.type.driver.fl_str_mv info:eu-repo/semantics/article
format article
status_str publishedVersion
dc.identifier.uri.fl_str_mv http://hdl.handle.net/1822/3775
url http://hdl.handle.net/1822/3775
dc.language.iso.fl_str_mv eng
language eng
dc.relation.none.fl_str_mv "Sensors and actuators A : Physical". ISSN 0924-4247. 76 (1999) 191-196.
0924-4247
dc.rights.driver.fl_str_mv info:eu-repo/semantics/openAccess
eu_rights_str_mv openAccess
dc.format.none.fl_str_mv application/pdf
dc.publisher.none.fl_str_mv Elsevier
publisher.none.fl_str_mv Elsevier
dc.source.none.fl_str_mv reponame:Repositório Científico de Acesso Aberto de Portugal (Repositórios Cientìficos)
instname:Agência para a Sociedade do Conhecimento (UMIC) - FCT - Sociedade da Informação
instacron:RCAAP
instname_str Agência para a Sociedade do Conhecimento (UMIC) - FCT - Sociedade da Informação
instacron_str RCAAP
institution RCAAP
reponame_str Repositório Científico de Acesso Aberto de Portugal (Repositórios Cientìficos)
collection Repositório Científico de Acesso Aberto de Portugal (Repositórios Cientìficos)
repository.name.fl_str_mv Repositório Científico de Acesso Aberto de Portugal (Repositórios Cientìficos) - Agência para a Sociedade do Conhecimento (UMIC) - FCT - Sociedade da Informação
repository.mail.fl_str_mv
_version_ 1799132689966563328

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