High-selectivity single-chip spectrometer in silicon for operation at visible part of the spectrum

Detalhes bibliográficos
Autor(a) principal: Correia, J. H.
Data de Publicação: 2000
Outros Autores: Bartek, M., Wolffenbuttel, R. F.
Tipo de documento: Artigo
Idioma: eng
Título da fonte: Repositório Científico de Acesso Aberto de Portugal (Repositórios Cientìficos)
Texto Completo: http://hdl.handle.net/1822/4139
Resumo: A microspectrometer has been realized based on an array of Fabry–Perot optical thin-film filters. The 16-channel microspectrometer is compatible with IC fabrication methods and operates in the visible spectral range with an interchannel shift of 6 nm. Each of the channels is sensitive in a single peak with full-width-half-maximum (FWHM) of 16 nm. Also aFWHMbelow 2 nm and finesse of 40 for narrow band operation is demonstrated. The device can easily be tuned during fabrication to cover a different spectral band only by adjusting the etching times without affecting the device layout. Such a device is extremely suitable for applications in microsystems because of its small size, high spectral selectivity, and low cost. Microspectrometers for the UV and IR regions are also feasible using this technique.
id RCAP_f6b8cc26bf08d2de65db1cdd1adc7f70
oai_identifier_str oai:repositorium.sdum.uminho.pt:1822/4139
network_acronym_str RCAP
network_name_str Repositório Científico de Acesso Aberto de Portugal (Repositórios Cientìficos)
repository_id_str 7160
spelling High-selectivity single-chip spectrometer in silicon for operation at visible part of the spectrumArray-type microspectrometerFabry–Perot etalonOptical filterVisible light detectorfinesseFWHMScience & TechnologyA microspectrometer has been realized based on an array of Fabry–Perot optical thin-film filters. The 16-channel microspectrometer is compatible with IC fabrication methods and operates in the visible spectral range with an interchannel shift of 6 nm. Each of the channels is sensitive in a single peak with full-width-half-maximum (FWHM) of 16 nm. Also aFWHMbelow 2 nm and finesse of 40 for narrow band operation is demonstrated. The device can easily be tuned during fabrication to cover a different spectral band only by adjusting the etching times without affecting the device layout. Such a device is extremely suitable for applications in microsystems because of its small size, high spectral selectivity, and low cost. Microspectrometers for the UV and IR regions are also feasible using this technique.Fundação para a Ciência e a Tecnologia (FCT)IEEEUniversidade do MinhoCorreia, J. H.Bartek, M.Wolffenbuttel, R. F.2000-032000-03-01T00:00:00Zinfo:eu-repo/semantics/publishedVersioninfo:eu-repo/semantics/articleapplication/pdfhttp://hdl.handle.net/1822/4139eng"IEEE Transactions on Electron Devices". ISSN 0018-9383. 47:3 (Mar. 2000) 553-559.0018-938310.1109/16.824727info:eu-repo/semantics/openAccessreponame:Repositório Científico de Acesso Aberto de Portugal (Repositórios Cientìficos)instname:Agência para a Sociedade do Conhecimento (UMIC) - FCT - Sociedade da Informaçãoinstacron:RCAAP2023-07-21T12:51:14Zoai:repositorium.sdum.uminho.pt:1822/4139Portal AgregadorONGhttps://www.rcaap.pt/oai/openaireopendoar:71602024-03-19T19:50:05.639183Repositório Científico de Acesso Aberto de Portugal (Repositórios Cientìficos) - Agência para a Sociedade do Conhecimento (UMIC) - FCT - Sociedade da Informaçãofalse
dc.title.none.fl_str_mv High-selectivity single-chip spectrometer in silicon for operation at visible part of the spectrum
title High-selectivity single-chip spectrometer in silicon for operation at visible part of the spectrum
spellingShingle High-selectivity single-chip spectrometer in silicon for operation at visible part of the spectrum
Correia, J. H.
Array-type microspectrometer
Fabry–Perot etalon
Optical filter
Visible light detector
finesse
FWHM
Science & Technology
title_short High-selectivity single-chip spectrometer in silicon for operation at visible part of the spectrum
title_full High-selectivity single-chip spectrometer in silicon for operation at visible part of the spectrum
title_fullStr High-selectivity single-chip spectrometer in silicon for operation at visible part of the spectrum
title_full_unstemmed High-selectivity single-chip spectrometer in silicon for operation at visible part of the spectrum
title_sort High-selectivity single-chip spectrometer in silicon for operation at visible part of the spectrum
author Correia, J. H.
author_facet Correia, J. H.
Bartek, M.
Wolffenbuttel, R. F.
author_role author
author2 Bartek, M.
Wolffenbuttel, R. F.
author2_role author
author
dc.contributor.none.fl_str_mv Universidade do Minho
dc.contributor.author.fl_str_mv Correia, J. H.
Bartek, M.
Wolffenbuttel, R. F.
dc.subject.por.fl_str_mv Array-type microspectrometer
Fabry–Perot etalon
Optical filter
Visible light detector
finesse
FWHM
Science & Technology
topic Array-type microspectrometer
Fabry–Perot etalon
Optical filter
Visible light detector
finesse
FWHM
Science & Technology
description A microspectrometer has been realized based on an array of Fabry–Perot optical thin-film filters. The 16-channel microspectrometer is compatible with IC fabrication methods and operates in the visible spectral range with an interchannel shift of 6 nm. Each of the channels is sensitive in a single peak with full-width-half-maximum (FWHM) of 16 nm. Also aFWHMbelow 2 nm and finesse of 40 for narrow band operation is demonstrated. The device can easily be tuned during fabrication to cover a different spectral band only by adjusting the etching times without affecting the device layout. Such a device is extremely suitable for applications in microsystems because of its small size, high spectral selectivity, and low cost. Microspectrometers for the UV and IR regions are also feasible using this technique.
publishDate 2000
dc.date.none.fl_str_mv 2000-03
2000-03-01T00:00:00Z
dc.type.status.fl_str_mv info:eu-repo/semantics/publishedVersion
dc.type.driver.fl_str_mv info:eu-repo/semantics/article
format article
status_str publishedVersion
dc.identifier.uri.fl_str_mv http://hdl.handle.net/1822/4139
url http://hdl.handle.net/1822/4139
dc.language.iso.fl_str_mv eng
language eng
dc.relation.none.fl_str_mv "IEEE Transactions on Electron Devices". ISSN 0018-9383. 47:3 (Mar. 2000) 553-559.
0018-9383
10.1109/16.824727
dc.rights.driver.fl_str_mv info:eu-repo/semantics/openAccess
eu_rights_str_mv openAccess
dc.format.none.fl_str_mv application/pdf
dc.publisher.none.fl_str_mv IEEE
publisher.none.fl_str_mv IEEE
dc.source.none.fl_str_mv reponame:Repositório Científico de Acesso Aberto de Portugal (Repositórios Cientìficos)
instname:Agência para a Sociedade do Conhecimento (UMIC) - FCT - Sociedade da Informação
instacron:RCAAP
instname_str Agência para a Sociedade do Conhecimento (UMIC) - FCT - Sociedade da Informação
instacron_str RCAAP
institution RCAAP
reponame_str Repositório Científico de Acesso Aberto de Portugal (Repositórios Cientìficos)
collection Repositório Científico de Acesso Aberto de Portugal (Repositórios Cientìficos)
repository.name.fl_str_mv Repositório Científico de Acesso Aberto de Portugal (Repositórios Cientìficos) - Agência para a Sociedade do Conhecimento (UMIC) - FCT - Sociedade da Informação
repository.mail.fl_str_mv
_version_ 1799133084252110848

Registros relacionados