On-chip array of thermoelectric peltier microcoolers

Detalhes bibliográficos
Autor(a) principal: Gonçalves, L. M.
Data de Publicação: 2008
Outros Autores: Rocha, J. G., Couto, Carlos, Alpuim, P., Correia, J. H.
Tipo de documento: Artigo
Idioma: eng
Título da fonte: Repositório Científico de Acesso Aberto de Portugal (Repositórios Cientìficos)
Texto Completo: http://hdl.handle.net/1822/8395
Resumo: This article reports on the theoretical modelling, the Finite Element Modelling (FEM) simulation, the fabrication process and preliminary results of the first on-chip thermoelectric microcooler array (64 pixels arranged in a 8×8 array), with each pixel independently controlled. This microcooler array uses co-evaporated V–VI compounds of Bi2Te3 and Sb2Te3 as thermoelectric layers, and can be fabricated using planar thin-film technology, lithography and wet etching, on top of a silicon wafer where the CMOS electronic circuits were previously made.
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spelling On-chip array of thermoelectric peltier microcoolersThermoelectricPeltierEnergy harvesting.Bi2Te3microcoolertellurideBi Te 2 3Science & TechnologyThis article reports on the theoretical modelling, the Finite Element Modelling (FEM) simulation, the fabrication process and preliminary results of the first on-chip thermoelectric microcooler array (64 pixels arranged in a 8×8 array), with each pixel independently controlled. This microcooler array uses co-evaporated V–VI compounds of Bi2Te3 and Sb2Te3 as thermoelectric layers, and can be fabricated using planar thin-film technology, lithography and wet etching, on top of a silicon wafer where the CMOS electronic circuits were previously made.ElsevierUniversidade do MinhoGonçalves, L. M.Rocha, J. G.Couto, CarlosAlpuim, P.Correia, J. H.2008-072008-07-01T00:00:00Zinfo:eu-repo/semantics/publishedVersioninfo:eu-repo/semantics/articleapplication/pdfhttp://hdl.handle.net/1822/8395eng"Sensors and Actuators, A : Physical". ISSN 0924-4247. A145-146 (July 2008) 75-80.0924-424710.1016/j.sna.2007.10.062www.sciencedirect.cominfo:eu-repo/semantics/openAccessreponame:Repositório Científico de Acesso Aberto de Portugal (Repositórios Cientìficos)instname:Agência para a Sociedade do Conhecimento (UMIC) - FCT - Sociedade da Informaçãoinstacron:RCAAP2023-07-21T12:46:21Zoai:repositorium.sdum.uminho.pt:1822/8395Portal AgregadorONGhttps://www.rcaap.pt/oai/openaireopendoar:71602024-03-19T19:44:20.240134Repositório Científico de Acesso Aberto de Portugal (Repositórios Cientìficos) - Agência para a Sociedade do Conhecimento (UMIC) - FCT - Sociedade da Informaçãofalse
dc.title.none.fl_str_mv On-chip array of thermoelectric peltier microcoolers
title On-chip array of thermoelectric peltier microcoolers
spellingShingle On-chip array of thermoelectric peltier microcoolers
Gonçalves, L. M.
Thermoelectric
Peltier
Energy harvesting.
Bi2Te3
microcooler
telluride
Bi Te 2 3
Science & Technology
title_short On-chip array of thermoelectric peltier microcoolers
title_full On-chip array of thermoelectric peltier microcoolers
title_fullStr On-chip array of thermoelectric peltier microcoolers
title_full_unstemmed On-chip array of thermoelectric peltier microcoolers
title_sort On-chip array of thermoelectric peltier microcoolers
author Gonçalves, L. M.
author_facet Gonçalves, L. M.
Rocha, J. G.
Couto, Carlos
Alpuim, P.
Correia, J. H.
author_role author
author2 Rocha, J. G.
Couto, Carlos
Alpuim, P.
Correia, J. H.
author2_role author
author
author
author
dc.contributor.none.fl_str_mv Universidade do Minho
dc.contributor.author.fl_str_mv Gonçalves, L. M.
Rocha, J. G.
Couto, Carlos
Alpuim, P.
Correia, J. H.
dc.subject.por.fl_str_mv Thermoelectric
Peltier
Energy harvesting.
Bi2Te3
microcooler
telluride
Bi Te 2 3
Science & Technology
topic Thermoelectric
Peltier
Energy harvesting.
Bi2Te3
microcooler
telluride
Bi Te 2 3
Science & Technology
description This article reports on the theoretical modelling, the Finite Element Modelling (FEM) simulation, the fabrication process and preliminary results of the first on-chip thermoelectric microcooler array (64 pixels arranged in a 8×8 array), with each pixel independently controlled. This microcooler array uses co-evaporated V–VI compounds of Bi2Te3 and Sb2Te3 as thermoelectric layers, and can be fabricated using planar thin-film technology, lithography and wet etching, on top of a silicon wafer where the CMOS electronic circuits were previously made.
publishDate 2008
dc.date.none.fl_str_mv 2008-07
2008-07-01T00:00:00Z
dc.type.status.fl_str_mv info:eu-repo/semantics/publishedVersion
dc.type.driver.fl_str_mv info:eu-repo/semantics/article
format article
status_str publishedVersion
dc.identifier.uri.fl_str_mv http://hdl.handle.net/1822/8395
url http://hdl.handle.net/1822/8395
dc.language.iso.fl_str_mv eng
language eng
dc.relation.none.fl_str_mv "Sensors and Actuators, A : Physical". ISSN 0924-4247. A145-146 (July 2008) 75-80.
0924-4247
10.1016/j.sna.2007.10.062
www.sciencedirect.com
dc.rights.driver.fl_str_mv info:eu-repo/semantics/openAccess
eu_rights_str_mv openAccess
dc.format.none.fl_str_mv application/pdf
dc.publisher.none.fl_str_mv Elsevier
publisher.none.fl_str_mv Elsevier
dc.source.none.fl_str_mv reponame:Repositório Científico de Acesso Aberto de Portugal (Repositórios Cientìficos)
instname:Agência para a Sociedade do Conhecimento (UMIC) - FCT - Sociedade da Informação
instacron:RCAAP
instname_str Agência para a Sociedade do Conhecimento (UMIC) - FCT - Sociedade da Informação
instacron_str RCAAP
institution RCAAP
reponame_str Repositório Científico de Acesso Aberto de Portugal (Repositórios Cientìficos)
collection Repositório Científico de Acesso Aberto de Portugal (Repositórios Cientìficos)
repository.name.fl_str_mv Repositório Científico de Acesso Aberto de Portugal (Repositórios Cientìficos) - Agência para a Sociedade do Conhecimento (UMIC) - FCT - Sociedade da Informação
repository.mail.fl_str_mv
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