A planar thermoelectric power generator for integration in wearable microsystems
Autor(a) principal: | |
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Data de Publicação: | 2010 |
Outros Autores: | , , |
Tipo de documento: | Artigo |
Idioma: | eng |
Título da fonte: | Repositório Científico de Acesso Aberto de Portugal (Repositórios Cientìficos) |
Texto Completo: | http://hdl.handle.net/1822/11980 |
Resumo: | A technique for IC-compatible fabrication of a planar (in-plane) thermoelectric (TE) power generator using a thermopile composed of n-type bismuth telluride (Bi2Te3) and p-type antimony telluride (Sb2Te3) thin-films is presented. The research demonstrates that the thermal co-evaporation of bismuth/antimony (Bi/Sb) and telluride (Te) is the most suitable deposition technique. The measurements showed TE performance properties of the deposited thin-films that are comparable to those reported for the same materials in the bulk form. The measurements showed absolute values of the Seebeck coefficient in the range 91–248 VK−1, an electrical resistivity in the 7.6–39.1 m range and a thermal conduction between 1.3 and 1.8Wm−1 K−1. The best resulting figures-of-merit, ZT, at room temperatures were 0.97 and 0.56 (equivalent to power-factors, PF, of 4.87×10−3 and 2.8×10−3WK−1m−2) for the Bi2Te3 and Sb2Te3 thin-films, respectively. The IC-compatibility and the dependence of the TE performance on technological details, such as photolithography and wet etching used for patterning the thin-films have also been investigated. The converter dimensions for best performance were analysed and a prototype of a planar TE power generator was fabricated. |
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A planar thermoelectric power generator for integration in wearable microsystemsThermoelectricPeltierMicrocoolerTellurideEnergy harvestingScience & TechnologyA technique for IC-compatible fabrication of a planar (in-plane) thermoelectric (TE) power generator using a thermopile composed of n-type bismuth telluride (Bi2Te3) and p-type antimony telluride (Sb2Te3) thin-films is presented. The research demonstrates that the thermal co-evaporation of bismuth/antimony (Bi/Sb) and telluride (Te) is the most suitable deposition technique. The measurements showed TE performance properties of the deposited thin-films that are comparable to those reported for the same materials in the bulk form. The measurements showed absolute values of the Seebeck coefficient in the range 91–248 VK−1, an electrical resistivity in the 7.6–39.1 m range and a thermal conduction between 1.3 and 1.8Wm−1 K−1. The best resulting figures-of-merit, ZT, at room temperatures were 0.97 and 0.56 (equivalent to power-factors, PF, of 4.87×10−3 and 2.8×10−3WK−1m−2) for the Bi2Te3 and Sb2Te3 thin-films, respectively. The IC-compatibility and the dependence of the TE performance on technological details, such as photolithography and wet etching used for patterning the thin-films have also been investigated. The converter dimensions for best performance were analysed and a prototype of a planar TE power generator was fabricated.ElsevierUniversidade do MinhoCarmo, João Paulo PereiraGonçalves, L. M.Wolffenbuttel, R. F.Correia, J. H.2010-05-012010-05-01T00:00:00Zinfo:eu-repo/semantics/publishedVersioninfo:eu-repo/semantics/articleapplication/pdfhttp://hdl.handle.net/1822/11980eng"Sensors and Actuators A : Physical". 161:1-2 (June 2010) 199-204.0924-424710.1016/j.sna.2010.05.010info:eu-repo/semantics/openAccessreponame:Repositório Científico de Acesso Aberto de Portugal (Repositórios Cientìficos)instname:Agência para a Sociedade do Conhecimento (UMIC) - FCT - Sociedade da Informaçãoinstacron:RCAAP2023-07-21T12:26:47Zoai:repositorium.sdum.uminho.pt:1822/11980Portal AgregadorONGhttps://www.rcaap.pt/oai/openaireopendoar:71602024-03-19T19:21:16.039365Repositório Científico de Acesso Aberto de Portugal (Repositórios Cientìficos) - Agência para a Sociedade do Conhecimento (UMIC) - FCT - Sociedade da Informaçãofalse |
dc.title.none.fl_str_mv |
A planar thermoelectric power generator for integration in wearable microsystems |
title |
A planar thermoelectric power generator for integration in wearable microsystems |
spellingShingle |
A planar thermoelectric power generator for integration in wearable microsystems Carmo, João Paulo Pereira Thermoelectric Peltier Microcooler Telluride Energy harvesting Science & Technology |
title_short |
A planar thermoelectric power generator for integration in wearable microsystems |
title_full |
A planar thermoelectric power generator for integration in wearable microsystems |
title_fullStr |
A planar thermoelectric power generator for integration in wearable microsystems |
title_full_unstemmed |
A planar thermoelectric power generator for integration in wearable microsystems |
title_sort |
A planar thermoelectric power generator for integration in wearable microsystems |
author |
Carmo, João Paulo Pereira |
author_facet |
Carmo, João Paulo Pereira Gonçalves, L. M. Wolffenbuttel, R. F. Correia, J. H. |
author_role |
author |
author2 |
Gonçalves, L. M. Wolffenbuttel, R. F. Correia, J. H. |
author2_role |
author author author |
dc.contributor.none.fl_str_mv |
Universidade do Minho |
dc.contributor.author.fl_str_mv |
Carmo, João Paulo Pereira Gonçalves, L. M. Wolffenbuttel, R. F. Correia, J. H. |
dc.subject.por.fl_str_mv |
Thermoelectric Peltier Microcooler Telluride Energy harvesting Science & Technology |
topic |
Thermoelectric Peltier Microcooler Telluride Energy harvesting Science & Technology |
description |
A technique for IC-compatible fabrication of a planar (in-plane) thermoelectric (TE) power generator using a thermopile composed of n-type bismuth telluride (Bi2Te3) and p-type antimony telluride (Sb2Te3) thin-films is presented. The research demonstrates that the thermal co-evaporation of bismuth/antimony (Bi/Sb) and telluride (Te) is the most suitable deposition technique. The measurements showed TE performance properties of the deposited thin-films that are comparable to those reported for the same materials in the bulk form. The measurements showed absolute values of the Seebeck coefficient in the range 91–248 VK−1, an electrical resistivity in the 7.6–39.1 m range and a thermal conduction between 1.3 and 1.8Wm−1 K−1. The best resulting figures-of-merit, ZT, at room temperatures were 0.97 and 0.56 (equivalent to power-factors, PF, of 4.87×10−3 and 2.8×10−3WK−1m−2) for the Bi2Te3 and Sb2Te3 thin-films, respectively. The IC-compatibility and the dependence of the TE performance on technological details, such as photolithography and wet etching used for patterning the thin-films have also been investigated. The converter dimensions for best performance were analysed and a prototype of a planar TE power generator was fabricated. |
publishDate |
2010 |
dc.date.none.fl_str_mv |
2010-05-01 2010-05-01T00:00:00Z |
dc.type.status.fl_str_mv |
info:eu-repo/semantics/publishedVersion |
dc.type.driver.fl_str_mv |
info:eu-repo/semantics/article |
format |
article |
status_str |
publishedVersion |
dc.identifier.uri.fl_str_mv |
http://hdl.handle.net/1822/11980 |
url |
http://hdl.handle.net/1822/11980 |
dc.language.iso.fl_str_mv |
eng |
language |
eng |
dc.relation.none.fl_str_mv |
"Sensors and Actuators A : Physical". 161:1-2 (June 2010) 199-204. 0924-4247 10.1016/j.sna.2010.05.010 |
dc.rights.driver.fl_str_mv |
info:eu-repo/semantics/openAccess |
eu_rights_str_mv |
openAccess |
dc.format.none.fl_str_mv |
application/pdf |
dc.publisher.none.fl_str_mv |
Elsevier |
publisher.none.fl_str_mv |
Elsevier |
dc.source.none.fl_str_mv |
reponame:Repositório Científico de Acesso Aberto de Portugal (Repositórios Cientìficos) instname:Agência para a Sociedade do Conhecimento (UMIC) - FCT - Sociedade da Informação instacron:RCAAP |
instname_str |
Agência para a Sociedade do Conhecimento (UMIC) - FCT - Sociedade da Informação |
instacron_str |
RCAAP |
institution |
RCAAP |
reponame_str |
Repositório Científico de Acesso Aberto de Portugal (Repositórios Cientìficos) |
collection |
Repositório Científico de Acesso Aberto de Portugal (Repositórios Cientìficos) |
repository.name.fl_str_mv |
Repositório Científico de Acesso Aberto de Portugal (Repositórios Cientìficos) - Agência para a Sociedade do Conhecimento (UMIC) - FCT - Sociedade da Informação |
repository.mail.fl_str_mv |
|
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1799132678654525440 |