Parylene C as a Multipurpose Material for Electronics and Microfluidics

Detalhes bibliográficos
Autor(a) principal: Coelho, Beatriz J.
Data de Publicação: 2023
Outros Autores: Pinto, Joana V., Martins, Jorge, Rovisco, Ana, Barquinha, Pedro, Fortunato, Elvira, Baptista, Pedro V., Martins, Rodrigo, Igreja, Rui
Tipo de documento: Artigo
Idioma: eng
Título da fonte: Repositório Científico de Acesso Aberto de Portugal (Repositórios Cientìficos)
Texto Completo: http://hdl.handle.net/10362/154774
Resumo: Publisher Copyright: © 2023 by the authors.
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spelling Parylene C as a Multipurpose Material for Electronics and Microfluidicsdielectricelectronic devicesencapsulationParylene Csubstratethermal characterizationXRD characterizationChemistry(all)Polymers and PlasticsPublisher Copyright: © 2023 by the authors.Poly(p-xylylene) derivatives, widely known as Parylenes, have been considerably adopted by the scientific community for several applications, ranging from simple passive coatings to active device components. Here, we explore the thermal, structural, and electrical properties of Parylene C, and further present a variety of electronic devices featuring this polymer: transistors, capacitors, and digital microfluidic (DMF) devices. We evaluate transistors produced with Parylene C as a dielectric, substrate, and encapsulation layer, either semitransparent or fully transparent. Such transistors exhibit steep transfer curves and subthreshold slopes of 0.26 V/dec, negligible gate leak currents, and fair mobilities. Furthermore, we characterize MIM (metal–insulator–metal) structures with Parylene C as a dielectric and demonstrate the functionality of the polymer deposited in single and double layers under temperature and AC signal stimuli, mimicking the DMF stimuli. Applying temperature generally leads to a decrease in the capacitance of the dielectric layer, whereas applying an AC signal leads to an increase in said capacitance for double-layered Parylene C only. By applying the two stimuli, the capacitance seems to suffer from a balanced influence of both the separated stimuli. Lastly, we demonstrate that DMF devices with double-layered Parylene C allow for faster droplet motion and enable long nucleic acid amplification reactions.DCM - Departamento de Ciência dos MateriaisCENIMAT-i3N - Centro de Investigação de Materiais (Lab. Associado I3N)UCIBIO - Applied Molecular Biosciences UnitDCV - Departamento de Ciências da VidaUNINOVA-Instituto de Desenvolvimento de Novas TecnologiasRUNCoelho, Beatriz J.Pinto, Joana V.Martins, JorgeRovisco, AnaBarquinha, PedroFortunato, ElviraBaptista, Pedro V.Martins, RodrigoIgreja, Rui2023-07-03T22:17:29Z2023-05-122023-05-12T00:00:00Zinfo:eu-repo/semantics/publishedVersioninfo:eu-repo/semantics/article23application/pdfhttp://hdl.handle.net/10362/154774eng2073-4360PURE: 65211657https://doi.org/10.3390/polym15102277info:eu-repo/semantics/openAccessreponame:Repositório Científico de Acesso Aberto de Portugal (Repositórios Cientìficos)instname:Agência para a Sociedade do Conhecimento (UMIC) - FCT - Sociedade da Informaçãoinstacron:RCAAP2024-03-11T05:37:13Zoai:run.unl.pt:10362/154774Portal AgregadorONGhttps://www.rcaap.pt/oai/openaireopendoar:71602024-03-20T03:55:44.943747Repositório Científico de Acesso Aberto de Portugal (Repositórios Cientìficos) - Agência para a Sociedade do Conhecimento (UMIC) - FCT - Sociedade da Informaçãofalse
dc.title.none.fl_str_mv Parylene C as a Multipurpose Material for Electronics and Microfluidics
title Parylene C as a Multipurpose Material for Electronics and Microfluidics
spellingShingle Parylene C as a Multipurpose Material for Electronics and Microfluidics
Coelho, Beatriz J.
dielectric
electronic devices
encapsulation
Parylene C
substrate
thermal characterization
XRD characterization
Chemistry(all)
Polymers and Plastics
title_short Parylene C as a Multipurpose Material for Electronics and Microfluidics
title_full Parylene C as a Multipurpose Material for Electronics and Microfluidics
title_fullStr Parylene C as a Multipurpose Material for Electronics and Microfluidics
title_full_unstemmed Parylene C as a Multipurpose Material for Electronics and Microfluidics
title_sort Parylene C as a Multipurpose Material for Electronics and Microfluidics
author Coelho, Beatriz J.
author_facet Coelho, Beatriz J.
Pinto, Joana V.
Martins, Jorge
Rovisco, Ana
Barquinha, Pedro
Fortunato, Elvira
Baptista, Pedro V.
Martins, Rodrigo
Igreja, Rui
author_role author
author2 Pinto, Joana V.
Martins, Jorge
Rovisco, Ana
Barquinha, Pedro
Fortunato, Elvira
Baptista, Pedro V.
Martins, Rodrigo
Igreja, Rui
author2_role author
author
author
author
author
author
author
author
dc.contributor.none.fl_str_mv DCM - Departamento de Ciência dos Materiais
CENIMAT-i3N - Centro de Investigação de Materiais (Lab. Associado I3N)
UCIBIO - Applied Molecular Biosciences Unit
DCV - Departamento de Ciências da Vida
UNINOVA-Instituto de Desenvolvimento de Novas Tecnologias
RUN
dc.contributor.author.fl_str_mv Coelho, Beatriz J.
Pinto, Joana V.
Martins, Jorge
Rovisco, Ana
Barquinha, Pedro
Fortunato, Elvira
Baptista, Pedro V.
Martins, Rodrigo
Igreja, Rui
dc.subject.por.fl_str_mv dielectric
electronic devices
encapsulation
Parylene C
substrate
thermal characterization
XRD characterization
Chemistry(all)
Polymers and Plastics
topic dielectric
electronic devices
encapsulation
Parylene C
substrate
thermal characterization
XRD characterization
Chemistry(all)
Polymers and Plastics
description Publisher Copyright: © 2023 by the authors.
publishDate 2023
dc.date.none.fl_str_mv 2023-07-03T22:17:29Z
2023-05-12
2023-05-12T00:00:00Z
dc.type.status.fl_str_mv info:eu-repo/semantics/publishedVersion
dc.type.driver.fl_str_mv info:eu-repo/semantics/article
format article
status_str publishedVersion
dc.identifier.uri.fl_str_mv http://hdl.handle.net/10362/154774
url http://hdl.handle.net/10362/154774
dc.language.iso.fl_str_mv eng
language eng
dc.relation.none.fl_str_mv 2073-4360
PURE: 65211657
https://doi.org/10.3390/polym15102277
dc.rights.driver.fl_str_mv info:eu-repo/semantics/openAccess
eu_rights_str_mv openAccess
dc.format.none.fl_str_mv 23
application/pdf
dc.source.none.fl_str_mv reponame:Repositório Científico de Acesso Aberto de Portugal (Repositórios Cientìficos)
instname:Agência para a Sociedade do Conhecimento (UMIC) - FCT - Sociedade da Informação
instacron:RCAAP
instname_str Agência para a Sociedade do Conhecimento (UMIC) - FCT - Sociedade da Informação
instacron_str RCAAP
institution RCAAP
reponame_str Repositório Científico de Acesso Aberto de Portugal (Repositórios Cientìficos)
collection Repositório Científico de Acesso Aberto de Portugal (Repositórios Cientìficos)
repository.name.fl_str_mv Repositório Científico de Acesso Aberto de Portugal (Repositórios Cientìficos) - Agência para a Sociedade do Conhecimento (UMIC) - FCT - Sociedade da Informação
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