High frequency FM MEMS accelerometer using piezoresistive resonators

Detalhes bibliográficos
Autor(a) principal: Coelho, Cláudia
Data de Publicação: 2018
Outros Autores: Gaspar, João, Rocha, Luís Alexandre Machado
Idioma: eng
Título da fonte: Repositório Científico de Acesso Aberto de Portugal (Repositórios Cientìficos)
Texto Completo: http://hdl.handle.net/1822/60633
Resumo: A novel frequency modulated (FM) accelerometer based on piezoresistive resonators is presented. The accelerometer uses two differential resonators, connected to the accelerometer proofmass by an amplifying leverage mechanism. The piezoresistive double-mass resonators are electrostatically driven in anti-phase and the output signal is measured piezoresistively by applying a bias current to the connecting microbeam of the double-mass resonators. Accelerometers were fabricated using SOI technology with a 5 µm device layer. Fabricated resonators show a high resonance frequency around 705 kHz and a Q-factor close to 20,000 when measured in vacuum. Preliminary measurements show a sensitivity around 0.46 Hz/g for a single resonator.
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spelling High frequency FM MEMS accelerometer using piezoresistive resonatorsA novel frequency modulated (FM) accelerometer based on piezoresistive resonators is presented. The accelerometer uses two differential resonators, connected to the accelerometer proofmass by an amplifying leverage mechanism. The piezoresistive double-mass resonators are electrostatically driven in anti-phase and the output signal is measured piezoresistively by applying a bias current to the connecting microbeam of the double-mass resonators. Accelerometers were fabricated using SOI technology with a 5 µm device layer. Fabricated resonators show a high resonance frequency around 705 kHz and a Q-factor close to 20,000 when measured in vacuum. Preliminary measurements show a sensitivity around 0.46 Hz/g for a single resonator.The first author is supported by FCT- Fundação para a Ciência e Tecnologia through the grant SFRH/BD/128775/2017. This work is supported by FCT with the reference project UID/EEA/04436/2013, COMPETE 2020 with the code POCI-01-0145-FEDER-006941.info:eu-repo/semantics/publishedVersionMultidisciplinary Digital Publishing InstituteUniversidade do MinhoCoelho, CláudiaGaspar, JoãoRocha, Luís Alexandre Machado2018-11-122018-11-12T00:00:00Zconference paperinfo:eu-repo/semantics/publishedVersionapplication/pdfhttp://hdl.handle.net/1822/60633eng2504-390010.3390/proceedings213info:eu-repo/semantics/openAccessreponame:Repositório Científico de Acesso Aberto de Portugal (Repositórios Cientìficos)instname:Agência para a Sociedade do Conhecimento (UMIC) - FCT - Sociedade da Informaçãoinstacron:RCAAP2024-05-11T05:57:45Zoai:repositorium.sdum.uminho.pt:1822/60633Portal AgregadorONGhttps://www.rcaap.pt/oai/openairemluisa.alvim@gmail.comopendoar:71602024-05-11T05:57:45Repositório Científico de Acesso Aberto de Portugal (Repositórios Cientìficos) - Agência para a Sociedade do Conhecimento (UMIC) - FCT - Sociedade da Informaçãofalse
dc.title.none.fl_str_mv High frequency FM MEMS accelerometer using piezoresistive resonators
title High frequency FM MEMS accelerometer using piezoresistive resonators
spellingShingle High frequency FM MEMS accelerometer using piezoresistive resonators
Coelho, Cláudia
title_short High frequency FM MEMS accelerometer using piezoresistive resonators
title_full High frequency FM MEMS accelerometer using piezoresistive resonators
title_fullStr High frequency FM MEMS accelerometer using piezoresistive resonators
title_full_unstemmed High frequency FM MEMS accelerometer using piezoresistive resonators
title_sort High frequency FM MEMS accelerometer using piezoresistive resonators
author Coelho, Cláudia
author_facet Coelho, Cláudia
Gaspar, João
Rocha, Luís Alexandre Machado
author_role author
author2 Gaspar, João
Rocha, Luís Alexandre Machado
author2_role author
author
dc.contributor.none.fl_str_mv Universidade do Minho
dc.contributor.author.fl_str_mv Coelho, Cláudia
Gaspar, João
Rocha, Luís Alexandre Machado
description A novel frequency modulated (FM) accelerometer based on piezoresistive resonators is presented. The accelerometer uses two differential resonators, connected to the accelerometer proofmass by an amplifying leverage mechanism. The piezoresistive double-mass resonators are electrostatically driven in anti-phase and the output signal is measured piezoresistively by applying a bias current to the connecting microbeam of the double-mass resonators. Accelerometers were fabricated using SOI technology with a 5 µm device layer. Fabricated resonators show a high resonance frequency around 705 kHz and a Q-factor close to 20,000 when measured in vacuum. Preliminary measurements show a sensitivity around 0.46 Hz/g for a single resonator.
publishDate 2018
dc.date.none.fl_str_mv 2018-11-12
2018-11-12T00:00:00Z
dc.type.driver.fl_str_mv conference paper
dc.type.status.fl_str_mv info:eu-repo/semantics/publishedVersion
status_str publishedVersion
dc.identifier.uri.fl_str_mv http://hdl.handle.net/1822/60633
url http://hdl.handle.net/1822/60633
dc.language.iso.fl_str_mv eng
language eng
dc.relation.none.fl_str_mv 2504-3900
10.3390/proceedings213
dc.rights.driver.fl_str_mv info:eu-repo/semantics/openAccess
eu_rights_str_mv openAccess
dc.format.none.fl_str_mv application/pdf
dc.publisher.none.fl_str_mv Multidisciplinary Digital Publishing Institute
publisher.none.fl_str_mv Multidisciplinary Digital Publishing Institute
dc.source.none.fl_str_mv reponame:Repositório Científico de Acesso Aberto de Portugal (Repositórios Cientìficos)
instname:Agência para a Sociedade do Conhecimento (UMIC) - FCT - Sociedade da Informação
instacron:RCAAP
instname_str Agência para a Sociedade do Conhecimento (UMIC) - FCT - Sociedade da Informação
instacron_str RCAAP
institution RCAAP
reponame_str Repositório Científico de Acesso Aberto de Portugal (Repositórios Cientìficos)
collection Repositório Científico de Acesso Aberto de Portugal (Repositórios Cientìficos)
repository.name.fl_str_mv Repositório Científico de Acesso Aberto de Portugal (Repositórios Cientìficos) - Agência para a Sociedade do Conhecimento (UMIC) - FCT - Sociedade da Informação
repository.mail.fl_str_mv mluisa.alvim@gmail.com
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