Highly sensitive MEMS frequency modulated accelerometer with small footprint
Autor(a) principal: | |
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Data de Publicação: | 2020 |
Outros Autores: | , , , , , |
Tipo de documento: | Artigo |
Idioma: | eng |
Título da fonte: | Repositório Científico de Acesso Aberto de Portugal (Repositórios Cientìficos) |
Texto Completo: | https://hdl.handle.net/1822/71126 |
Resumo: | A single-axis resonant MEMS accelerometer is presented here. The goal is to achieve the maximum sensitivity on a set of predefined constraints: small footprint of 500 μm × 500 μm, vacuum operation under 150 Pa (requirement for a single-chip IMU) and fabrication using a Bosch silicon surface micromachining process. The sensor is composed by double-ended tuning fork resonators in differential architecture and a force amplification mechanism to increase its sensitivity. A complete characterization of the device was performed including closed-loop operation. A proportional-integral-derivative closed-loop controller architecture updates in real-time the excitation frequency to half the resonance frequency of the resonators. A scale-factor of 170 Hz/g and a non-linearity of 0.63 %FS (operation range of ±1 g) were experimentally measured. The relative sensitivities of 0.08 %Hz/g/nkg and 0.48 %Hz/g are among the highest reported for DETF-based devices. Long-term (700 μg/√Hz noise floor measured), dynamic and thermal drift measurements are also reported. The differential operation improved the thermal performance by 77 %. |
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Highly sensitive MEMS frequency modulated accelerometer with small footprintAccelerometerDouble-ended tuning fork (DETF) resonatorsFrequency modulatedMicro-lever mechanismMicroelectromechanical systems (MEMS)A single-axis resonant MEMS accelerometer is presented here. The goal is to achieve the maximum sensitivity on a set of predefined constraints: small footprint of 500 μm × 500 μm, vacuum operation under 150 Pa (requirement for a single-chip IMU) and fabrication using a Bosch silicon surface micromachining process. The sensor is composed by double-ended tuning fork resonators in differential architecture and a force amplification mechanism to increase its sensitivity. A complete characterization of the device was performed including closed-loop operation. A proportional-integral-derivative closed-loop controller architecture updates in real-time the excitation frequency to half the resonance frequency of the resonators. A scale-factor of 170 Hz/g and a non-linearity of 0.63 %FS (operation range of ±1 g) were experimentally measured. The relative sensitivities of 0.08 %Hz/g/nkg and 0.48 %Hz/g are among the highest reported for DETF-based devices. Long-term (700 μg/√Hz noise floor measured), dynamic and thermal drift measurements are also reported. The differential operation improved the thermal performance by 77 %.The authors would like to offer special thanks to the author Luis A. Rocha, who, although no longer with us, continues to inspire by his example and dedication to the students and collaborators he served over the course of his career. The first author is supported by FCT– Fundação para a Ciência e Tecnologia through the grant PDE/BDE/114564/2016. This work is supported by FCT with the reference project UID/EEA/04436/2019.Elsevier B.V.Universidade do MinhoEsteves Moreira, EuricoKuhlmann, BurkhardSerra Alves, FilipeDias, Rosana Maria AlvesCabral, JorgeGaspar, JoãoRocha, Luís Alexandre Machado20202020-01-01T00:00:00Zinfo:eu-repo/semantics/publishedVersioninfo:eu-repo/semantics/articleapplication/pdfhttps://hdl.handle.net/1822/71126eng0924-424710.1016/j.sna.2020.112005https://www.sciencedirect.com/science/article/abs/pii/S0924424719321284info:eu-repo/semantics/openAccessreponame:Repositório Científico de Acesso Aberto de Portugal (Repositórios Cientìficos)instname:Agência para a Sociedade do Conhecimento (UMIC) - FCT - Sociedade da Informaçãoinstacron:RCAAP2023-07-21T12:17:58Zoai:repositorium.sdum.uminho.pt:1822/71126Portal AgregadorONGhttps://www.rcaap.pt/oai/openaireopendoar:71602024-03-19T19:10:40.766983Repositório Científico de Acesso Aberto de Portugal (Repositórios Cientìficos) - Agência para a Sociedade do Conhecimento (UMIC) - FCT - Sociedade da Informaçãofalse |
dc.title.none.fl_str_mv |
Highly sensitive MEMS frequency modulated accelerometer with small footprint |
title |
Highly sensitive MEMS frequency modulated accelerometer with small footprint |
spellingShingle |
Highly sensitive MEMS frequency modulated accelerometer with small footprint Esteves Moreira, Eurico Accelerometer Double-ended tuning fork (DETF) resonators Frequency modulated Micro-lever mechanism Microelectromechanical systems (MEMS) |
title_short |
Highly sensitive MEMS frequency modulated accelerometer with small footprint |
title_full |
Highly sensitive MEMS frequency modulated accelerometer with small footprint |
title_fullStr |
Highly sensitive MEMS frequency modulated accelerometer with small footprint |
title_full_unstemmed |
Highly sensitive MEMS frequency modulated accelerometer with small footprint |
title_sort |
Highly sensitive MEMS frequency modulated accelerometer with small footprint |
author |
Esteves Moreira, Eurico |
author_facet |
Esteves Moreira, Eurico Kuhlmann, Burkhard Serra Alves, Filipe Dias, Rosana Maria Alves Cabral, Jorge Gaspar, João Rocha, Luís Alexandre Machado |
author_role |
author |
author2 |
Kuhlmann, Burkhard Serra Alves, Filipe Dias, Rosana Maria Alves Cabral, Jorge Gaspar, João Rocha, Luís Alexandre Machado |
author2_role |
author author author author author author |
dc.contributor.none.fl_str_mv |
Universidade do Minho |
dc.contributor.author.fl_str_mv |
Esteves Moreira, Eurico Kuhlmann, Burkhard Serra Alves, Filipe Dias, Rosana Maria Alves Cabral, Jorge Gaspar, João Rocha, Luís Alexandre Machado |
dc.subject.por.fl_str_mv |
Accelerometer Double-ended tuning fork (DETF) resonators Frequency modulated Micro-lever mechanism Microelectromechanical systems (MEMS) |
topic |
Accelerometer Double-ended tuning fork (DETF) resonators Frequency modulated Micro-lever mechanism Microelectromechanical systems (MEMS) |
description |
A single-axis resonant MEMS accelerometer is presented here. The goal is to achieve the maximum sensitivity on a set of predefined constraints: small footprint of 500 μm × 500 μm, vacuum operation under 150 Pa (requirement for a single-chip IMU) and fabrication using a Bosch silicon surface micromachining process. The sensor is composed by double-ended tuning fork resonators in differential architecture and a force amplification mechanism to increase its sensitivity. A complete characterization of the device was performed including closed-loop operation. A proportional-integral-derivative closed-loop controller architecture updates in real-time the excitation frequency to half the resonance frequency of the resonators. A scale-factor of 170 Hz/g and a non-linearity of 0.63 %FS (operation range of ±1 g) were experimentally measured. The relative sensitivities of 0.08 %Hz/g/nkg and 0.48 %Hz/g are among the highest reported for DETF-based devices. Long-term (700 μg/√Hz noise floor measured), dynamic and thermal drift measurements are also reported. The differential operation improved the thermal performance by 77 %. |
publishDate |
2020 |
dc.date.none.fl_str_mv |
2020 2020-01-01T00:00:00Z |
dc.type.status.fl_str_mv |
info:eu-repo/semantics/publishedVersion |
dc.type.driver.fl_str_mv |
info:eu-repo/semantics/article |
format |
article |
status_str |
publishedVersion |
dc.identifier.uri.fl_str_mv |
https://hdl.handle.net/1822/71126 |
url |
https://hdl.handle.net/1822/71126 |
dc.language.iso.fl_str_mv |
eng |
language |
eng |
dc.relation.none.fl_str_mv |
0924-4247 10.1016/j.sna.2020.112005 https://www.sciencedirect.com/science/article/abs/pii/S0924424719321284 |
dc.rights.driver.fl_str_mv |
info:eu-repo/semantics/openAccess |
eu_rights_str_mv |
openAccess |
dc.format.none.fl_str_mv |
application/pdf |
dc.publisher.none.fl_str_mv |
Elsevier B.V. |
publisher.none.fl_str_mv |
Elsevier B.V. |
dc.source.none.fl_str_mv |
reponame:Repositório Científico de Acesso Aberto de Portugal (Repositórios Cientìficos) instname:Agência para a Sociedade do Conhecimento (UMIC) - FCT - Sociedade da Informação instacron:RCAAP |
instname_str |
Agência para a Sociedade do Conhecimento (UMIC) - FCT - Sociedade da Informação |
instacron_str |
RCAAP |
institution |
RCAAP |
reponame_str |
Repositório Científico de Acesso Aberto de Portugal (Repositórios Cientìficos) |
collection |
Repositório Científico de Acesso Aberto de Portugal (Repositórios Cientìficos) |
repository.name.fl_str_mv |
Repositório Científico de Acesso Aberto de Portugal (Repositórios Cientìficos) - Agência para a Sociedade do Conhecimento (UMIC) - FCT - Sociedade da Informação |
repository.mail.fl_str_mv |
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1799132537137659904 |