Characterization of a single electrode focusing lens for ion beam deceleration

Detalhes bibliográficos
Autor(a) principal: Lopes, Jose
Data de Publicação: 2017
Outros Autores: Rocha, J., Catarino, Norberto, Redondo, Luis
Tipo de documento: Artigo
Idioma: eng
Título da fonte: Repositório Científico de Acesso Aberto de Portugal (Repositórios Cientìficos)
Texto Completo: http://hdl.handle.net/10400.21/7028
Resumo: An ion beam deceleration system was studied for the highcurrent ion implanter at the Laboratório de Aceleradores e Tecnologias de Radiação at the Campus Tecnológico e Nuclear, of Instituto Superior Técnico. The installed system consists of a target plate and one electrostatic focusing lens with one electrode. This article describes the results of the evaluation of the new system. With this upgrade, the ion implanter provides enhanced versatility for decelerating to 5 keV a high current ion beam at the µA level. This implantation provides a wide area and allows for a continuous magnetic beam scanning, extending the energy range to lower values, opening up a wider set of applications.
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spelling Characterization of a single electrode focusing lens for ion beam decelerationDecelerationelectrostatic Einzel lensfluenceion implantationAn ion beam deceleration system was studied for the highcurrent ion implanter at the Laboratório de Aceleradores e Tecnologias de Radiação at the Campus Tecnológico e Nuclear, of Instituto Superior Técnico. The installed system consists of a target plate and one electrostatic focusing lens with one electrode. This article describes the results of the evaluation of the new system. With this upgrade, the ion implanter provides enhanced versatility for decelerating to 5 keV a high current ion beam at the µA level. This implantation provides a wide area and allows for a continuous magnetic beam scanning, extending the energy range to lower values, opening up a wider set of applications.Taylor & FrancisRCIPLLopes, JoseRocha, J.Catarino, NorbertoRedondo, Luis2017-05-19T09:37:09Z20172017-01-01T00:00:00Zinfo:eu-repo/semantics/publishedVersioninfo:eu-repo/semantics/articleapplication/pdfhttp://hdl.handle.net/10400.21/7028engLOPES, J.; [et al] - Characterization of a single electrode focusing lens for ion beam deceleration. Instrumentation Science & Technology. ISSN 1073-9149. Vol. 45, N.º 1 (2017), pp. 12-211073-914910.1080/10739149.2016.1186033metadata only accessinfo:eu-repo/semantics/openAccessreponame:Repositório Científico de Acesso Aberto de Portugal (Repositórios Cientìficos)instname:Agência para a Sociedade do Conhecimento (UMIC) - FCT - Sociedade da Informaçãoinstacron:RCAAP2023-08-03T09:52:33Zoai:repositorio.ipl.pt:10400.21/7028Portal AgregadorONGhttps://www.rcaap.pt/oai/openaireopendoar:71602024-03-19T20:16:04.159193Repositório Científico de Acesso Aberto de Portugal (Repositórios Cientìficos) - Agência para a Sociedade do Conhecimento (UMIC) - FCT - Sociedade da Informaçãofalse
dc.title.none.fl_str_mv Characterization of a single electrode focusing lens for ion beam deceleration
title Characterization of a single electrode focusing lens for ion beam deceleration
spellingShingle Characterization of a single electrode focusing lens for ion beam deceleration
Lopes, Jose
Deceleration
electrostatic Einzel lens
fluence
ion implantation
title_short Characterization of a single electrode focusing lens for ion beam deceleration
title_full Characterization of a single electrode focusing lens for ion beam deceleration
title_fullStr Characterization of a single electrode focusing lens for ion beam deceleration
title_full_unstemmed Characterization of a single electrode focusing lens for ion beam deceleration
title_sort Characterization of a single electrode focusing lens for ion beam deceleration
author Lopes, Jose
author_facet Lopes, Jose
Rocha, J.
Catarino, Norberto
Redondo, Luis
author_role author
author2 Rocha, J.
Catarino, Norberto
Redondo, Luis
author2_role author
author
author
dc.contributor.none.fl_str_mv RCIPL
dc.contributor.author.fl_str_mv Lopes, Jose
Rocha, J.
Catarino, Norberto
Redondo, Luis
dc.subject.por.fl_str_mv Deceleration
electrostatic Einzel lens
fluence
ion implantation
topic Deceleration
electrostatic Einzel lens
fluence
ion implantation
description An ion beam deceleration system was studied for the highcurrent ion implanter at the Laboratório de Aceleradores e Tecnologias de Radiação at the Campus Tecnológico e Nuclear, of Instituto Superior Técnico. The installed system consists of a target plate and one electrostatic focusing lens with one electrode. This article describes the results of the evaluation of the new system. With this upgrade, the ion implanter provides enhanced versatility for decelerating to 5 keV a high current ion beam at the µA level. This implantation provides a wide area and allows for a continuous magnetic beam scanning, extending the energy range to lower values, opening up a wider set of applications.
publishDate 2017
dc.date.none.fl_str_mv 2017-05-19T09:37:09Z
2017
2017-01-01T00:00:00Z
dc.type.status.fl_str_mv info:eu-repo/semantics/publishedVersion
dc.type.driver.fl_str_mv info:eu-repo/semantics/article
format article
status_str publishedVersion
dc.identifier.uri.fl_str_mv http://hdl.handle.net/10400.21/7028
url http://hdl.handle.net/10400.21/7028
dc.language.iso.fl_str_mv eng
language eng
dc.relation.none.fl_str_mv LOPES, J.; [et al] - Characterization of a single electrode focusing lens for ion beam deceleration. Instrumentation Science & Technology. ISSN 1073-9149. Vol. 45, N.º 1 (2017), pp. 12-21
1073-9149
10.1080/10739149.2016.1186033
dc.rights.driver.fl_str_mv metadata only access
info:eu-repo/semantics/openAccess
rights_invalid_str_mv metadata only access
eu_rights_str_mv openAccess
dc.format.none.fl_str_mv application/pdf
dc.publisher.none.fl_str_mv Taylor & Francis
publisher.none.fl_str_mv Taylor & Francis
dc.source.none.fl_str_mv reponame:Repositório Científico de Acesso Aberto de Portugal (Repositórios Cientìficos)
instname:Agência para a Sociedade do Conhecimento (UMIC) - FCT - Sociedade da Informação
instacron:RCAAP
instname_str Agência para a Sociedade do Conhecimento (UMIC) - FCT - Sociedade da Informação
instacron_str RCAAP
institution RCAAP
reponame_str Repositório Científico de Acesso Aberto de Portugal (Repositórios Cientìficos)
collection Repositório Científico de Acesso Aberto de Portugal (Repositórios Cientìficos)
repository.name.fl_str_mv Repositório Científico de Acesso Aberto de Portugal (Repositórios Cientìficos) - Agência para a Sociedade do Conhecimento (UMIC) - FCT - Sociedade da Informação
repository.mail.fl_str_mv
_version_ 1799133419925405696

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