Sputtering of silicon nanopowders by an argon cluster ion beam
Autor(a) principal: | |
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Data de Publicação: | 2019 |
Outros Autores: | , , , , , , |
Tipo de documento: | Artigo |
Idioma: | eng |
Título da fonte: | Repositório Científico de Acesso Aberto de Portugal (Repositórios Cientìficos) |
Texto Completo: | https://doi.org/10.3762/bjnano.10.13 |
Resumo: | This study was supported by Wuhan Municipal Science and Technology Bureau grant No. 2017030209020250 and Shenzhen Municipal Committee on Science and Technology Innovation grant No. JCYJ20170818112901473, and partly by the Ministry of Education and Science of the Russian Federation within the framework of project no. 8.2810.2017. |
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Sputtering of silicon nanopowders by an argon cluster ion beamFinite size effectGas cluster ion beamSilicon nanoparticlesSmoothing effectSputteringMaterials Science(all)Physics and Astronomy(all)Electrical and Electronic EngineeringThis study was supported by Wuhan Municipal Science and Technology Bureau grant No. 2017030209020250 and Shenzhen Municipal Committee on Science and Technology Innovation grant No. JCYJ20170818112901473, and partly by the Ministry of Education and Science of the Russian Federation within the framework of project no. 8.2810.2017.In this work an Ar + cluster ion beam with energy in the range of 10-70 keV and dose of 7.2 × 10 14 -2.3 × 10 16 cluster/cm 2 was used to irradiate pressed Si nanopowder targets consisting of particles with a mean diameter of 60 nm. The influence of the target density and the cluster ion beam parameters (energy and dose) on the sputtering depth and sputtering yield was studied. The sputtering yield was found to decrease with increasing dose and target density. The energy dependence demonstrated an unusual non-monotonic behavior. At 17.3 keV a maximum of the sputtering yield was observed, which was more than forty times higher than that of the bulk Si. The surface roughness at low energy demonstrates a similar energy dependence with a maximum near 17 keV. The dose and energy dependence of the sputtering yield was explained by the competition of the finite size effect and the effect of debris formation.CeFITec – Centro de Física e Investigação TecnológicaDF – Departamento de FísicaRUNZeng, XiaomeiPelenovich, VasiliyWang, ZhenguoZuo, WenbinBelykh, SergeyTolstogouzov, AlexanderFu, DejunXiao, Xiangheng2019-09-18T22:46:31Z2019-01-012019-01-01T00:00:00Zinfo:eu-repo/semantics/publishedVersioninfo:eu-repo/semantics/article8application/pdfhttps://doi.org/10.3762/bjnano.10.13eng2190-4286PURE: 13379978http://www.scopus.com/inward/record.url?scp=85060154337&partnerID=8YFLogxKhttps://doi.org/10.3762/bjnano.10.13info:eu-repo/semantics/openAccessreponame:Repositório Científico de Acesso Aberto de Portugal (Repositórios Cientìficos)instname:Agência para a Sociedade do Conhecimento (UMIC) - FCT - Sociedade da Informaçãoinstacron:RCAAP2024-03-11T04:36:24Zoai:run.unl.pt:10362/81689Portal AgregadorONGhttps://www.rcaap.pt/oai/openaireopendoar:71602024-03-20T03:36:07.618357Repositório Científico de Acesso Aberto de Portugal (Repositórios Cientìficos) - Agência para a Sociedade do Conhecimento (UMIC) - FCT - Sociedade da Informaçãofalse |
dc.title.none.fl_str_mv |
Sputtering of silicon nanopowders by an argon cluster ion beam |
title |
Sputtering of silicon nanopowders by an argon cluster ion beam |
spellingShingle |
Sputtering of silicon nanopowders by an argon cluster ion beam Zeng, Xiaomei Finite size effect Gas cluster ion beam Silicon nanoparticles Smoothing effect Sputtering Materials Science(all) Physics and Astronomy(all) Electrical and Electronic Engineering |
title_short |
Sputtering of silicon nanopowders by an argon cluster ion beam |
title_full |
Sputtering of silicon nanopowders by an argon cluster ion beam |
title_fullStr |
Sputtering of silicon nanopowders by an argon cluster ion beam |
title_full_unstemmed |
Sputtering of silicon nanopowders by an argon cluster ion beam |
title_sort |
Sputtering of silicon nanopowders by an argon cluster ion beam |
author |
Zeng, Xiaomei |
author_facet |
Zeng, Xiaomei Pelenovich, Vasiliy Wang, Zhenguo Zuo, Wenbin Belykh, Sergey Tolstogouzov, Alexander Fu, Dejun Xiao, Xiangheng |
author_role |
author |
author2 |
Pelenovich, Vasiliy Wang, Zhenguo Zuo, Wenbin Belykh, Sergey Tolstogouzov, Alexander Fu, Dejun Xiao, Xiangheng |
author2_role |
author author author author author author author |
dc.contributor.none.fl_str_mv |
CeFITec – Centro de Física e Investigação Tecnológica DF – Departamento de Física RUN |
dc.contributor.author.fl_str_mv |
Zeng, Xiaomei Pelenovich, Vasiliy Wang, Zhenguo Zuo, Wenbin Belykh, Sergey Tolstogouzov, Alexander Fu, Dejun Xiao, Xiangheng |
dc.subject.por.fl_str_mv |
Finite size effect Gas cluster ion beam Silicon nanoparticles Smoothing effect Sputtering Materials Science(all) Physics and Astronomy(all) Electrical and Electronic Engineering |
topic |
Finite size effect Gas cluster ion beam Silicon nanoparticles Smoothing effect Sputtering Materials Science(all) Physics and Astronomy(all) Electrical and Electronic Engineering |
description |
This study was supported by Wuhan Municipal Science and Technology Bureau grant No. 2017030209020250 and Shenzhen Municipal Committee on Science and Technology Innovation grant No. JCYJ20170818112901473, and partly by the Ministry of Education and Science of the Russian Federation within the framework of project no. 8.2810.2017. |
publishDate |
2019 |
dc.date.none.fl_str_mv |
2019-09-18T22:46:31Z 2019-01-01 2019-01-01T00:00:00Z |
dc.type.status.fl_str_mv |
info:eu-repo/semantics/publishedVersion |
dc.type.driver.fl_str_mv |
info:eu-repo/semantics/article |
format |
article |
status_str |
publishedVersion |
dc.identifier.uri.fl_str_mv |
https://doi.org/10.3762/bjnano.10.13 |
url |
https://doi.org/10.3762/bjnano.10.13 |
dc.language.iso.fl_str_mv |
eng |
language |
eng |
dc.relation.none.fl_str_mv |
2190-4286 PURE: 13379978 http://www.scopus.com/inward/record.url?scp=85060154337&partnerID=8YFLogxK https://doi.org/10.3762/bjnano.10.13 |
dc.rights.driver.fl_str_mv |
info:eu-repo/semantics/openAccess |
eu_rights_str_mv |
openAccess |
dc.format.none.fl_str_mv |
8 application/pdf |
dc.source.none.fl_str_mv |
reponame:Repositório Científico de Acesso Aberto de Portugal (Repositórios Cientìficos) instname:Agência para a Sociedade do Conhecimento (UMIC) - FCT - Sociedade da Informação instacron:RCAAP |
instname_str |
Agência para a Sociedade do Conhecimento (UMIC) - FCT - Sociedade da Informação |
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RCAAP |
institution |
RCAAP |
reponame_str |
Repositório Científico de Acesso Aberto de Portugal (Repositórios Cientìficos) |
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Repositório Científico de Acesso Aberto de Portugal (Repositórios Cientìficos) |
repository.name.fl_str_mv |
Repositório Científico de Acesso Aberto de Portugal (Repositórios Cientìficos) - Agência para a Sociedade do Conhecimento (UMIC) - FCT - Sociedade da Informação |
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1799137980628074496 |