Microwave plasma chemical vapour deposition diamond nucleation on ferrous substrates with Ti and Cr interlayers

Detalhes bibliográficos
Autor(a) principal: Silva, FJG
Data de Publicação: 2002
Outros Autores: Baptista, APM, Pereira, E, Teixeira, V, Fan, QH, Fernandes, AJS, Costa, FM
Tipo de documento: Artigo
Idioma: eng
Título da fonte: Repositório Científico de Acesso Aberto de Portugal (Repositórios Cientìficos)
Texto Completo: https://hdl.handle.net/10216/526
Resumo: Diamond-coated steel is considered an important issue in synthetic diamond technology due to the great economical importance of enhancing the wear resistance and surface hardness of commercial Fe-based alloys. However, direct diamond coating by chemical vapour deposition (CVD) is rather problematic-adhesion and growth are seriously affected. The use of interlayers is a common approach to minimise these problems. This work reports an investigation on the establishment of good nucleation and growth conditions of diamond films by microwave plasma CVD (MPCVD) on ferrous substrates coated with Ti and Cr interlayers. Commercial grade ferrous substrates were pre-coated with commercial interlayers by sputtering (Ti, Cr) and electroplating (Cr) techniques. Steel substrates led to better results than iron cast substrates. The best films were obtained on Ti pre-coated steel substrate. The results on Cr interlayers pointed to the advantage of electroplating over the physical vapour deposition (PVD) sputtering. From the two selected parameter sets for diamond deposition, the one using lower power level conducted to the best results. Initial roughness and growth parameters were found to counteract on the uniformity of the diamond films. The morphology was studied by scanning electron microscopy (SEM), the roughness was estimated by profilometry, while diamond quality and stress state were evaluated by mu-Raman spectroscopy. (C) 2002 Elsevier Science B.V. All rights reserved.
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spelling Microwave plasma chemical vapour deposition diamond nucleation on ferrous substrates with Ti and Cr interlayersEngenharia dos materiaisMaterials engineeringDiamond-coated steel is considered an important issue in synthetic diamond technology due to the great economical importance of enhancing the wear resistance and surface hardness of commercial Fe-based alloys. However, direct diamond coating by chemical vapour deposition (CVD) is rather problematic-adhesion and growth are seriously affected. The use of interlayers is a common approach to minimise these problems. This work reports an investigation on the establishment of good nucleation and growth conditions of diamond films by microwave plasma CVD (MPCVD) on ferrous substrates coated with Ti and Cr interlayers. Commercial grade ferrous substrates were pre-coated with commercial interlayers by sputtering (Ti, Cr) and electroplating (Cr) techniques. Steel substrates led to better results than iron cast substrates. The best films were obtained on Ti pre-coated steel substrate. The results on Cr interlayers pointed to the advantage of electroplating over the physical vapour deposition (PVD) sputtering. From the two selected parameter sets for diamond deposition, the one using lower power level conducted to the best results. Initial roughness and growth parameters were found to counteract on the uniformity of the diamond films. The morphology was studied by scanning electron microscopy (SEM), the roughness was estimated by profilometry, while diamond quality and stress state were evaluated by mu-Raman spectroscopy. (C) 2002 Elsevier Science B.V. All rights reserved.20022002-01-01T00:00:00Zinfo:eu-repo/semantics/publishedVersioninfo:eu-repo/semantics/articleapplication/pdfhttps://hdl.handle.net/10216/526eng0925-963510.1016/S0925-9635(02)00029-8Silva, FJGBaptista, APMPereira, ETeixeira, VFan, QHFernandes, AJSCosta, FMinfo:eu-repo/semantics/openAccessreponame:Repositório Científico de Acesso Aberto de Portugal (Repositórios Cientìficos)instname:Agência para a Sociedade do Conhecimento (UMIC) - FCT - Sociedade da Informaçãoinstacron:RCAAP2023-11-29T14:41:19Zoai:repositorio-aberto.up.pt:10216/526Portal AgregadorONGhttps://www.rcaap.pt/oai/openaireopendoar:71602024-03-20T00:06:50.019179Repositório Científico de Acesso Aberto de Portugal (Repositórios Cientìficos) - Agência para a Sociedade do Conhecimento (UMIC) - FCT - Sociedade da Informaçãofalse
dc.title.none.fl_str_mv Microwave plasma chemical vapour deposition diamond nucleation on ferrous substrates with Ti and Cr interlayers
title Microwave plasma chemical vapour deposition diamond nucleation on ferrous substrates with Ti and Cr interlayers
spellingShingle Microwave plasma chemical vapour deposition diamond nucleation on ferrous substrates with Ti and Cr interlayers
Silva, FJG
Engenharia dos materiais
Materials engineering
title_short Microwave plasma chemical vapour deposition diamond nucleation on ferrous substrates with Ti and Cr interlayers
title_full Microwave plasma chemical vapour deposition diamond nucleation on ferrous substrates with Ti and Cr interlayers
title_fullStr Microwave plasma chemical vapour deposition diamond nucleation on ferrous substrates with Ti and Cr interlayers
title_full_unstemmed Microwave plasma chemical vapour deposition diamond nucleation on ferrous substrates with Ti and Cr interlayers
title_sort Microwave plasma chemical vapour deposition diamond nucleation on ferrous substrates with Ti and Cr interlayers
author Silva, FJG
author_facet Silva, FJG
Baptista, APM
Pereira, E
Teixeira, V
Fan, QH
Fernandes, AJS
Costa, FM
author_role author
author2 Baptista, APM
Pereira, E
Teixeira, V
Fan, QH
Fernandes, AJS
Costa, FM
author2_role author
author
author
author
author
author
dc.contributor.author.fl_str_mv Silva, FJG
Baptista, APM
Pereira, E
Teixeira, V
Fan, QH
Fernandes, AJS
Costa, FM
dc.subject.por.fl_str_mv Engenharia dos materiais
Materials engineering
topic Engenharia dos materiais
Materials engineering
description Diamond-coated steel is considered an important issue in synthetic diamond technology due to the great economical importance of enhancing the wear resistance and surface hardness of commercial Fe-based alloys. However, direct diamond coating by chemical vapour deposition (CVD) is rather problematic-adhesion and growth are seriously affected. The use of interlayers is a common approach to minimise these problems. This work reports an investigation on the establishment of good nucleation and growth conditions of diamond films by microwave plasma CVD (MPCVD) on ferrous substrates coated with Ti and Cr interlayers. Commercial grade ferrous substrates were pre-coated with commercial interlayers by sputtering (Ti, Cr) and electroplating (Cr) techniques. Steel substrates led to better results than iron cast substrates. The best films were obtained on Ti pre-coated steel substrate. The results on Cr interlayers pointed to the advantage of electroplating over the physical vapour deposition (PVD) sputtering. From the two selected parameter sets for diamond deposition, the one using lower power level conducted to the best results. Initial roughness and growth parameters were found to counteract on the uniformity of the diamond films. The morphology was studied by scanning electron microscopy (SEM), the roughness was estimated by profilometry, while diamond quality and stress state were evaluated by mu-Raman spectroscopy. (C) 2002 Elsevier Science B.V. All rights reserved.
publishDate 2002
dc.date.none.fl_str_mv 2002
2002-01-01T00:00:00Z
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dc.identifier.uri.fl_str_mv https://hdl.handle.net/10216/526
url https://hdl.handle.net/10216/526
dc.language.iso.fl_str_mv eng
language eng
dc.relation.none.fl_str_mv 0925-9635
10.1016/S0925-9635(02)00029-8
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dc.format.none.fl_str_mv application/pdf
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