Sample preparation method for scanning force microscopy

Detalhes bibliográficos
Autor(a) principal: Jankov,I.R.
Data de Publicação: 2001
Outros Autores: Szente,R.N., Goldman,I.D., Carreño,M.N.P., Swart,J.W., Landers,R.
Tipo de documento: Artigo
Idioma: eng
Título da fonte: Brazilian Journal of Physics
Texto Completo: http://old.scielo.br/scielo.php?script=sci_arttext&pid=S0103-97332001000400005
Resumo: We present a method of sample preparation for studies of ion implantation on metal surfaces. The method, employing a mechanical mask, is specially adapted for samples analysed by Scanning Force Microscopy. It was successfully tested on polycrystallyne copper substrates implanted with phosphorus ions at an acceleration voltage of 39keV. The changes of the electrical properties of the surface were measured by Kelvin Probe Force Microscopy and the surface composition was analysed by Auger Electron Spectroscopy.
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spelling Sample preparation method for scanning force microscopyWe present a method of sample preparation for studies of ion implantation on metal surfaces. The method, employing a mechanical mask, is specially adapted for samples analysed by Scanning Force Microscopy. It was successfully tested on polycrystallyne copper substrates implanted with phosphorus ions at an acceleration voltage of 39keV. The changes of the electrical properties of the surface were measured by Kelvin Probe Force Microscopy and the surface composition was analysed by Auger Electron Spectroscopy.Sociedade Brasileira de Física2001-12-01info:eu-repo/semantics/articleinfo:eu-repo/semantics/publishedVersiontext/htmlhttp://old.scielo.br/scielo.php?script=sci_arttext&pid=S0103-97332001000400005Brazilian Journal of Physics v.31 n.4 2001reponame:Brazilian Journal of Physicsinstname:Sociedade Brasileira de Física (SBF)instacron:SBF10.1590/S0103-97332001000400005info:eu-repo/semantics/openAccessJankov,I.R.Szente,R.N.Goldman,I.D.Carreño,M.N.P.Swart,J.W.Landers,R.eng2002-04-23T00:00:00Zoai:scielo:S0103-97332001000400005Revistahttp://www.sbfisica.org.br/v1/home/index.php/pt/ONGhttps://old.scielo.br/oai/scielo-oai.phpsbfisica@sbfisica.org.br||sbfisica@sbfisica.org.br1678-44480103-9733opendoar:2002-04-23T00:00Brazilian Journal of Physics - Sociedade Brasileira de Física (SBF)false
dc.title.none.fl_str_mv Sample preparation method for scanning force microscopy
title Sample preparation method for scanning force microscopy
spellingShingle Sample preparation method for scanning force microscopy
Jankov,I.R.
title_short Sample preparation method for scanning force microscopy
title_full Sample preparation method for scanning force microscopy
title_fullStr Sample preparation method for scanning force microscopy
title_full_unstemmed Sample preparation method for scanning force microscopy
title_sort Sample preparation method for scanning force microscopy
author Jankov,I.R.
author_facet Jankov,I.R.
Szente,R.N.
Goldman,I.D.
Carreño,M.N.P.
Swart,J.W.
Landers,R.
author_role author
author2 Szente,R.N.
Goldman,I.D.
Carreño,M.N.P.
Swart,J.W.
Landers,R.
author2_role author
author
author
author
author
dc.contributor.author.fl_str_mv Jankov,I.R.
Szente,R.N.
Goldman,I.D.
Carreño,M.N.P.
Swart,J.W.
Landers,R.
description We present a method of sample preparation for studies of ion implantation on metal surfaces. The method, employing a mechanical mask, is specially adapted for samples analysed by Scanning Force Microscopy. It was successfully tested on polycrystallyne copper substrates implanted with phosphorus ions at an acceleration voltage of 39keV. The changes of the electrical properties of the surface were measured by Kelvin Probe Force Microscopy and the surface composition was analysed by Auger Electron Spectroscopy.
publishDate 2001
dc.date.none.fl_str_mv 2001-12-01
dc.type.driver.fl_str_mv info:eu-repo/semantics/article
dc.type.status.fl_str_mv info:eu-repo/semantics/publishedVersion
format article
status_str publishedVersion
dc.identifier.uri.fl_str_mv http://old.scielo.br/scielo.php?script=sci_arttext&pid=S0103-97332001000400005
url http://old.scielo.br/scielo.php?script=sci_arttext&pid=S0103-97332001000400005
dc.language.iso.fl_str_mv eng
language eng
dc.relation.none.fl_str_mv 10.1590/S0103-97332001000400005
dc.rights.driver.fl_str_mv info:eu-repo/semantics/openAccess
eu_rights_str_mv openAccess
dc.format.none.fl_str_mv text/html
dc.publisher.none.fl_str_mv Sociedade Brasileira de Física
publisher.none.fl_str_mv Sociedade Brasileira de Física
dc.source.none.fl_str_mv Brazilian Journal of Physics v.31 n.4 2001
reponame:Brazilian Journal of Physics
instname:Sociedade Brasileira de Física (SBF)
instacron:SBF
instname_str Sociedade Brasileira de Física (SBF)
instacron_str SBF
institution SBF
reponame_str Brazilian Journal of Physics
collection Brazilian Journal of Physics
repository.name.fl_str_mv Brazilian Journal of Physics - Sociedade Brasileira de Física (SBF)
repository.mail.fl_str_mv sbfisica@sbfisica.org.br||sbfisica@sbfisica.org.br
_version_ 1754734859467620352

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