Fundamentals and applications of spectroscopic ellipsometry

Detalhes bibliográficos
Autor(a) principal: Gonçalves,Débora
Data de Publicação: 2002
Outros Autores: Irene,Eugene A.
Tipo de documento: Artigo
Idioma: eng
Título da fonte: Química Nova (Online)
Texto Completo: http://old.scielo.br/scielo.php?script=sci_arttext&pid=S0100-40422002000500015
Resumo: This paper describes the use of ellipsometry as a precise and accurate technique for characterizing substrates and overlayers. A brief historical development of ellipsometry and the basic principles necessary to understand how an ellipsometer works are presented. There are many examples of studies performed in addressing materials science issues, and several are presented here: measurements of thickness, optical properties, and modeling of surface roughness. These selected results obtained in our laboratory for substrates, Si/SiO2 interfaces, and polymers provide evidence that ellipsometry can play a critical role in characterizing different types of materials.
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spelling Fundamentals and applications of spectroscopic ellipsometryellipsometrypolarizationfilmsThis paper describes the use of ellipsometry as a precise and accurate technique for characterizing substrates and overlayers. A brief historical development of ellipsometry and the basic principles necessary to understand how an ellipsometer works are presented. There are many examples of studies performed in addressing materials science issues, and several are presented here: measurements of thickness, optical properties, and modeling of surface roughness. These selected results obtained in our laboratory for substrates, Si/SiO2 interfaces, and polymers provide evidence that ellipsometry can play a critical role in characterizing different types of materials.Sociedade Brasileira de Química2002-09-01info:eu-repo/semantics/articleinfo:eu-repo/semantics/publishedVersiontext/htmlhttp://old.scielo.br/scielo.php?script=sci_arttext&pid=S0100-40422002000500015Química Nova v.25 n.5 2002reponame:Química Nova (Online)instname:Sociedade Brasileira de Química (SBQ)instacron:SBQ10.1590/S0100-40422002000500015info:eu-repo/semantics/openAccessGonçalves,DéboraIrene,Eugene A.eng2002-11-13T00:00:00Zoai:scielo:S0100-40422002000500015Revistahttps://www.scielo.br/j/qn/ONGhttps://old.scielo.br/oai/scielo-oai.phpquimicanova@sbq.org.br1678-70640100-4042opendoar:2002-11-13T00:00Química Nova (Online) - Sociedade Brasileira de Química (SBQ)false
dc.title.none.fl_str_mv Fundamentals and applications of spectroscopic ellipsometry
title Fundamentals and applications of spectroscopic ellipsometry
spellingShingle Fundamentals and applications of spectroscopic ellipsometry
Gonçalves,Débora
ellipsometry
polarization
films
title_short Fundamentals and applications of spectroscopic ellipsometry
title_full Fundamentals and applications of spectroscopic ellipsometry
title_fullStr Fundamentals and applications of spectroscopic ellipsometry
title_full_unstemmed Fundamentals and applications of spectroscopic ellipsometry
title_sort Fundamentals and applications of spectroscopic ellipsometry
author Gonçalves,Débora
author_facet Gonçalves,Débora
Irene,Eugene A.
author_role author
author2 Irene,Eugene A.
author2_role author
dc.contributor.author.fl_str_mv Gonçalves,Débora
Irene,Eugene A.
dc.subject.por.fl_str_mv ellipsometry
polarization
films
topic ellipsometry
polarization
films
description This paper describes the use of ellipsometry as a precise and accurate technique for characterizing substrates and overlayers. A brief historical development of ellipsometry and the basic principles necessary to understand how an ellipsometer works are presented. There are many examples of studies performed in addressing materials science issues, and several are presented here: measurements of thickness, optical properties, and modeling of surface roughness. These selected results obtained in our laboratory for substrates, Si/SiO2 interfaces, and polymers provide evidence that ellipsometry can play a critical role in characterizing different types of materials.
publishDate 2002
dc.date.none.fl_str_mv 2002-09-01
dc.type.driver.fl_str_mv info:eu-repo/semantics/article
dc.type.status.fl_str_mv info:eu-repo/semantics/publishedVersion
format article
status_str publishedVersion
dc.identifier.uri.fl_str_mv http://old.scielo.br/scielo.php?script=sci_arttext&pid=S0100-40422002000500015
url http://old.scielo.br/scielo.php?script=sci_arttext&pid=S0100-40422002000500015
dc.language.iso.fl_str_mv eng
language eng
dc.relation.none.fl_str_mv 10.1590/S0100-40422002000500015
dc.rights.driver.fl_str_mv info:eu-repo/semantics/openAccess
eu_rights_str_mv openAccess
dc.format.none.fl_str_mv text/html
dc.publisher.none.fl_str_mv Sociedade Brasileira de Química
publisher.none.fl_str_mv Sociedade Brasileira de Química
dc.source.none.fl_str_mv Química Nova v.25 n.5 2002
reponame:Química Nova (Online)
instname:Sociedade Brasileira de Química (SBQ)
instacron:SBQ
instname_str Sociedade Brasileira de Química (SBQ)
instacron_str SBQ
institution SBQ
reponame_str Química Nova (Online)
collection Química Nova (Online)
repository.name.fl_str_mv Química Nova (Online) - Sociedade Brasileira de Química (SBQ)
repository.mail.fl_str_mv quimicanova@sbq.org.br
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