Unraveling structural and compositional information in 3D FinFET electronic devices

Detalhes bibliográficos
Autor(a) principal: Trombini, Henrique
Data de Publicação: 2019
Outros Autores: Marmitt, Gabriel Guterres, Vellame, Igor Alencar, Baptista, Daniel Lorscheitter, Reboh, Shay, Mazen, Frédéric, Pinheiro, Rafael Bortolin, Sanchez, Dario Ferreira, Senna, Carlos Alberto, Archanjo, Braulio Soares, Achete, Carlos A., Grande, Pedro Luis
Tipo de documento: Artigo
Idioma: eng
Título da fonte: Repositório Institucional da UFRGS
Texto Completo: http://hdl.handle.net/10183/200524
Resumo: Non-planar Fin Field Effect Transistors (FinFET) are already present in modern devices. The evolution from the well-established 2D planar technology to the design of 3D nanostructures rose new fabrication processes, but a technique capable of full characterization, particularly their dopant distribution, in a representative (high statistics) way is still lacking. Here we propose a methodology based on Medium Energy Ion Scattering (MEIS) to address this query, allowing structural and compositional quantification of advanced 3D FinFET devices with nanometer spatial resolution. When ions are backscattered, their energy losses unfold the chemistry of the different 3D compounds present in the structure. The FinFET periodicity generates oscillatory features as a function of backscattered ion energy and, in fact, these features allow a complete description of the device dimensions. Additionally, each measurement is performed over more than thousand structures, being highly representative in a statistical meaning. Finally, independent measurements using electron microscopy corroborate the proposed methodology
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spelling Trombini, HenriqueMarmitt, Gabriel GuterresVellame, Igor AlencarBaptista, Daniel LorscheitterReboh, ShayMazen, FrédéricPinheiro, Rafael BortolinSanchez, Dario FerreiraSenna, Carlos AlbertoArchanjo, Braulio SoaresAchete, Carlos A.Grande, Pedro Luis2019-10-11T03:55:30Z20192045-2322http://hdl.handle.net/10183/200524001101237Non-planar Fin Field Effect Transistors (FinFET) are already present in modern devices. The evolution from the well-established 2D planar technology to the design of 3D nanostructures rose new fabrication processes, but a technique capable of full characterization, particularly their dopant distribution, in a representative (high statistics) way is still lacking. Here we propose a methodology based on Medium Energy Ion Scattering (MEIS) to address this query, allowing structural and compositional quantification of advanced 3D FinFET devices with nanometer spatial resolution. When ions are backscattered, their energy losses unfold the chemistry of the different 3D compounds present in the structure. The FinFET periodicity generates oscillatory features as a function of backscattered ion energy and, in fact, these features allow a complete description of the device dimensions. Additionally, each measurement is performed over more than thousand structures, being highly representative in a statistical meaning. Finally, independent measurements using electron microscopy corroborate the proposed methodologyapplication/pdfengScientific Reports. Berlin. Vol. 9 (Aug. 2019), 11629, 7 p.Feixes de íonsEspalhamento de íons de energia intermediariaDifração de raios XDispositivos eletrônicosUnraveling structural and compositional information in 3D FinFET electronic devicesEstrangeiroinfo:eu-repo/semantics/articleinfo:eu-repo/semantics/publishedVersioninfo:eu-repo/semantics/openAccessreponame:Repositório Institucional da UFRGSinstname:Universidade Federal do Rio Grande do Sul (UFRGS)instacron:UFRGSTEXT001101237.pdf.txt001101237.pdf.txtExtracted Texttext/plain29383http://www.lume.ufrgs.br/bitstream/10183/200524/2/001101237.pdf.txtbb2aba1fea386fdcc125f9d0195cfb8fMD52ORIGINAL001101237.pdfTexto completo (inglês)application/pdf1884783http://www.lume.ufrgs.br/bitstream/10183/200524/1/001101237.pdf98c351cb76414e441811ff85af688c68MD5110183/2005242024-05-24 06:42:16.836744oai:www.lume.ufrgs.br:10183/200524Repositório de PublicaçõesPUBhttps://lume.ufrgs.br/oai/requestopendoar:2024-05-24T09:42:16Repositório Institucional da UFRGS - Universidade Federal do Rio Grande do Sul (UFRGS)false
dc.title.pt_BR.fl_str_mv Unraveling structural and compositional information in 3D FinFET electronic devices
title Unraveling structural and compositional information in 3D FinFET electronic devices
spellingShingle Unraveling structural and compositional information in 3D FinFET electronic devices
Trombini, Henrique
Feixes de íons
Espalhamento de íons de energia intermediaria
Difração de raios X
Dispositivos eletrônicos
title_short Unraveling structural and compositional information in 3D FinFET electronic devices
title_full Unraveling structural and compositional information in 3D FinFET electronic devices
title_fullStr Unraveling structural and compositional information in 3D FinFET electronic devices
title_full_unstemmed Unraveling structural and compositional information in 3D FinFET electronic devices
title_sort Unraveling structural and compositional information in 3D FinFET electronic devices
author Trombini, Henrique
author_facet Trombini, Henrique
Marmitt, Gabriel Guterres
Vellame, Igor Alencar
Baptista, Daniel Lorscheitter
Reboh, Shay
Mazen, Frédéric
Pinheiro, Rafael Bortolin
Sanchez, Dario Ferreira
Senna, Carlos Alberto
Archanjo, Braulio Soares
Achete, Carlos A.
Grande, Pedro Luis
author_role author
author2 Marmitt, Gabriel Guterres
Vellame, Igor Alencar
Baptista, Daniel Lorscheitter
Reboh, Shay
Mazen, Frédéric
Pinheiro, Rafael Bortolin
Sanchez, Dario Ferreira
Senna, Carlos Alberto
Archanjo, Braulio Soares
Achete, Carlos A.
Grande, Pedro Luis
author2_role author
author
author
author
author
author
author
author
author
author
author
dc.contributor.author.fl_str_mv Trombini, Henrique
Marmitt, Gabriel Guterres
Vellame, Igor Alencar
Baptista, Daniel Lorscheitter
Reboh, Shay
Mazen, Frédéric
Pinheiro, Rafael Bortolin
Sanchez, Dario Ferreira
Senna, Carlos Alberto
Archanjo, Braulio Soares
Achete, Carlos A.
Grande, Pedro Luis
dc.subject.por.fl_str_mv Feixes de íons
Espalhamento de íons de energia intermediaria
Difração de raios X
Dispositivos eletrônicos
topic Feixes de íons
Espalhamento de íons de energia intermediaria
Difração de raios X
Dispositivos eletrônicos
description Non-planar Fin Field Effect Transistors (FinFET) are already present in modern devices. The evolution from the well-established 2D planar technology to the design of 3D nanostructures rose new fabrication processes, but a technique capable of full characterization, particularly their dopant distribution, in a representative (high statistics) way is still lacking. Here we propose a methodology based on Medium Energy Ion Scattering (MEIS) to address this query, allowing structural and compositional quantification of advanced 3D FinFET devices with nanometer spatial resolution. When ions are backscattered, their energy losses unfold the chemistry of the different 3D compounds present in the structure. The FinFET periodicity generates oscillatory features as a function of backscattered ion energy and, in fact, these features allow a complete description of the device dimensions. Additionally, each measurement is performed over more than thousand structures, being highly representative in a statistical meaning. Finally, independent measurements using electron microscopy corroborate the proposed methodology
publishDate 2019
dc.date.accessioned.fl_str_mv 2019-10-11T03:55:30Z
dc.date.issued.fl_str_mv 2019
dc.type.driver.fl_str_mv Estrangeiro
info:eu-repo/semantics/article
dc.type.status.fl_str_mv info:eu-repo/semantics/publishedVersion
format article
status_str publishedVersion
dc.identifier.uri.fl_str_mv http://hdl.handle.net/10183/200524
dc.identifier.issn.pt_BR.fl_str_mv 2045-2322
dc.identifier.nrb.pt_BR.fl_str_mv 001101237
identifier_str_mv 2045-2322
001101237
url http://hdl.handle.net/10183/200524
dc.language.iso.fl_str_mv eng
language eng
dc.relation.ispartof.pt_BR.fl_str_mv Scientific Reports. Berlin. Vol. 9 (Aug. 2019), 11629, 7 p.
dc.rights.driver.fl_str_mv info:eu-repo/semantics/openAccess
eu_rights_str_mv openAccess
dc.format.none.fl_str_mv application/pdf
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instname:Universidade Federal do Rio Grande do Sul (UFRGS)
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instname_str Universidade Federal do Rio Grande do Sul (UFRGS)
instacron_str UFRGS
institution UFRGS
reponame_str Repositório Institucional da UFRGS
collection Repositório Institucional da UFRGS
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