Unraveling structural and compositional information in 3D FinFET electronic devices
Autor(a) principal: | |
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Data de Publicação: | 2019 |
Outros Autores: | , , , , , , , , , , |
Tipo de documento: | Artigo |
Idioma: | eng |
Título da fonte: | Repositório Institucional da UFRGS |
Texto Completo: | http://hdl.handle.net/10183/200524 |
Resumo: | Non-planar Fin Field Effect Transistors (FinFET) are already present in modern devices. The evolution from the well-established 2D planar technology to the design of 3D nanostructures rose new fabrication processes, but a technique capable of full characterization, particularly their dopant distribution, in a representative (high statistics) way is still lacking. Here we propose a methodology based on Medium Energy Ion Scattering (MEIS) to address this query, allowing structural and compositional quantification of advanced 3D FinFET devices with nanometer spatial resolution. When ions are backscattered, their energy losses unfold the chemistry of the different 3D compounds present in the structure. The FinFET periodicity generates oscillatory features as a function of backscattered ion energy and, in fact, these features allow a complete description of the device dimensions. Additionally, each measurement is performed over more than thousand structures, being highly representative in a statistical meaning. Finally, independent measurements using electron microscopy corroborate the proposed methodology |
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Trombini, HenriqueMarmitt, Gabriel GuterresVellame, Igor AlencarBaptista, Daniel LorscheitterReboh, ShayMazen, FrédéricPinheiro, Rafael BortolinSanchez, Dario FerreiraSenna, Carlos AlbertoArchanjo, Braulio SoaresAchete, Carlos A.Grande, Pedro Luis2019-10-11T03:55:30Z20192045-2322http://hdl.handle.net/10183/200524001101237Non-planar Fin Field Effect Transistors (FinFET) are already present in modern devices. The evolution from the well-established 2D planar technology to the design of 3D nanostructures rose new fabrication processes, but a technique capable of full characterization, particularly their dopant distribution, in a representative (high statistics) way is still lacking. Here we propose a methodology based on Medium Energy Ion Scattering (MEIS) to address this query, allowing structural and compositional quantification of advanced 3D FinFET devices with nanometer spatial resolution. When ions are backscattered, their energy losses unfold the chemistry of the different 3D compounds present in the structure. The FinFET periodicity generates oscillatory features as a function of backscattered ion energy and, in fact, these features allow a complete description of the device dimensions. Additionally, each measurement is performed over more than thousand structures, being highly representative in a statistical meaning. Finally, independent measurements using electron microscopy corroborate the proposed methodologyapplication/pdfengScientific Reports. Berlin. Vol. 9 (Aug. 2019), 11629, 7 p.Feixes de íonsEspalhamento de íons de energia intermediariaDifração de raios XDispositivos eletrônicosUnraveling structural and compositional information in 3D FinFET electronic devicesEstrangeiroinfo:eu-repo/semantics/articleinfo:eu-repo/semantics/publishedVersioninfo:eu-repo/semantics/openAccessreponame:Repositório Institucional da UFRGSinstname:Universidade Federal do Rio Grande do Sul (UFRGS)instacron:UFRGSTEXT001101237.pdf.txt001101237.pdf.txtExtracted Texttext/plain29383http://www.lume.ufrgs.br/bitstream/10183/200524/2/001101237.pdf.txtbb2aba1fea386fdcc125f9d0195cfb8fMD52ORIGINAL001101237.pdfTexto completo (inglês)application/pdf1884783http://www.lume.ufrgs.br/bitstream/10183/200524/1/001101237.pdf98c351cb76414e441811ff85af688c68MD5110183/2005242024-05-24 06:42:16.836744oai:www.lume.ufrgs.br:10183/200524Repositório de PublicaçõesPUBhttps://lume.ufrgs.br/oai/requestopendoar:2024-05-24T09:42:16Repositório Institucional da UFRGS - Universidade Federal do Rio Grande do Sul (UFRGS)false |
dc.title.pt_BR.fl_str_mv |
Unraveling structural and compositional information in 3D FinFET electronic devices |
title |
Unraveling structural and compositional information in 3D FinFET electronic devices |
spellingShingle |
Unraveling structural and compositional information in 3D FinFET electronic devices Trombini, Henrique Feixes de íons Espalhamento de íons de energia intermediaria Difração de raios X Dispositivos eletrônicos |
title_short |
Unraveling structural and compositional information in 3D FinFET electronic devices |
title_full |
Unraveling structural and compositional information in 3D FinFET electronic devices |
title_fullStr |
Unraveling structural and compositional information in 3D FinFET electronic devices |
title_full_unstemmed |
Unraveling structural and compositional information in 3D FinFET electronic devices |
title_sort |
Unraveling structural and compositional information in 3D FinFET electronic devices |
author |
Trombini, Henrique |
author_facet |
Trombini, Henrique Marmitt, Gabriel Guterres Vellame, Igor Alencar Baptista, Daniel Lorscheitter Reboh, Shay Mazen, Frédéric Pinheiro, Rafael Bortolin Sanchez, Dario Ferreira Senna, Carlos Alberto Archanjo, Braulio Soares Achete, Carlos A. Grande, Pedro Luis |
author_role |
author |
author2 |
Marmitt, Gabriel Guterres Vellame, Igor Alencar Baptista, Daniel Lorscheitter Reboh, Shay Mazen, Frédéric Pinheiro, Rafael Bortolin Sanchez, Dario Ferreira Senna, Carlos Alberto Archanjo, Braulio Soares Achete, Carlos A. Grande, Pedro Luis |
author2_role |
author author author author author author author author author author author |
dc.contributor.author.fl_str_mv |
Trombini, Henrique Marmitt, Gabriel Guterres Vellame, Igor Alencar Baptista, Daniel Lorscheitter Reboh, Shay Mazen, Frédéric Pinheiro, Rafael Bortolin Sanchez, Dario Ferreira Senna, Carlos Alberto Archanjo, Braulio Soares Achete, Carlos A. Grande, Pedro Luis |
dc.subject.por.fl_str_mv |
Feixes de íons Espalhamento de íons de energia intermediaria Difração de raios X Dispositivos eletrônicos |
topic |
Feixes de íons Espalhamento de íons de energia intermediaria Difração de raios X Dispositivos eletrônicos |
description |
Non-planar Fin Field Effect Transistors (FinFET) are already present in modern devices. The evolution from the well-established 2D planar technology to the design of 3D nanostructures rose new fabrication processes, but a technique capable of full characterization, particularly their dopant distribution, in a representative (high statistics) way is still lacking. Here we propose a methodology based on Medium Energy Ion Scattering (MEIS) to address this query, allowing structural and compositional quantification of advanced 3D FinFET devices with nanometer spatial resolution. When ions are backscattered, their energy losses unfold the chemistry of the different 3D compounds present in the structure. The FinFET periodicity generates oscillatory features as a function of backscattered ion energy and, in fact, these features allow a complete description of the device dimensions. Additionally, each measurement is performed over more than thousand structures, being highly representative in a statistical meaning. Finally, independent measurements using electron microscopy corroborate the proposed methodology |
publishDate |
2019 |
dc.date.accessioned.fl_str_mv |
2019-10-11T03:55:30Z |
dc.date.issued.fl_str_mv |
2019 |
dc.type.driver.fl_str_mv |
Estrangeiro info:eu-repo/semantics/article |
dc.type.status.fl_str_mv |
info:eu-repo/semantics/publishedVersion |
format |
article |
status_str |
publishedVersion |
dc.identifier.uri.fl_str_mv |
http://hdl.handle.net/10183/200524 |
dc.identifier.issn.pt_BR.fl_str_mv |
2045-2322 |
dc.identifier.nrb.pt_BR.fl_str_mv |
001101237 |
identifier_str_mv |
2045-2322 001101237 |
url |
http://hdl.handle.net/10183/200524 |
dc.language.iso.fl_str_mv |
eng |
language |
eng |
dc.relation.ispartof.pt_BR.fl_str_mv |
Scientific Reports. Berlin. Vol. 9 (Aug. 2019), 11629, 7 p. |
dc.rights.driver.fl_str_mv |
info:eu-repo/semantics/openAccess |
eu_rights_str_mv |
openAccess |
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application/pdf |
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reponame:Repositório Institucional da UFRGS instname:Universidade Federal do Rio Grande do Sul (UFRGS) instacron:UFRGS |
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UFRGS |
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Repositório Institucional da UFRGS |
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Repositório Institucional da UFRGS |
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http://www.lume.ufrgs.br/bitstream/10183/200524/2/001101237.pdf.txt http://www.lume.ufrgs.br/bitstream/10183/200524/1/001101237.pdf |
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