Interferometric characterization of an XY piezoeletric nanopositioner: Linearity9 Hysteresis and frequency response
Autor(a) principal: | |
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Data de Publicação: | 2019 |
Outros Autores: | , , , , |
Tipo de documento: | Artigo de conferência |
Idioma: | eng |
Título da fonte: | Repositório Institucional da UNESP |
Texto Completo: | http://dx.doi.org/10.1109/INDUSCON.2018.8627259 http://hdl.handle.net/11449/190172 |
Resumo: | Piezoelectric motors have been considered successors of electromagnetic motors in areas such as robot joints, high precision machines, micro robots, and MEMS (Micro-Electro-Mechanical Systems). The main interest in this work is the investigation of an XY flextensional positioner adapted for future applications as a rotary piezoelectric motor. To perform this task, the mechanical deformation analysis of the actuator structure was evaluated using finite element software. The results obtained with these simulations were validated using an optical phase detection technique using laser interferometry. Information regarding the linearity between applied voltage and generated displacement, hysteresis, frequency response of displacement and mechanical resonances of the actuator were measured between 0 and 3500 Hz. Simulation and experimental results have brought to light many technical issues that will lead to further investigations, helping the improvement the system in future works. |
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Repositório Institucional da UNESP |
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Interferometric characterization of an XY piezoeletric nanopositioner: Linearity9 Hysteresis and frequency responseInteferometryMetrologyPiezoelectric transducerVibration measurementPiezoelectric motors have been considered successors of electromagnetic motors in areas such as robot joints, high precision machines, micro robots, and MEMS (Micro-Electro-Mechanical Systems). The main interest in this work is the investigation of an XY flextensional positioner adapted for future applications as a rotary piezoelectric motor. To perform this task, the mechanical deformation analysis of the actuator structure was evaluated using finite element software. The results obtained with these simulations were validated using an optical phase detection technique using laser interferometry. Information regarding the linearity between applied voltage and generated displacement, hysteresis, frequency response of displacement and mechanical resonances of the actuator were measured between 0 and 3500 Hz. Simulation and experimental results have brought to light many technical issues that will lead to further investigations, helping the improvement the system in future works.Department of Eletrical Engineering Sao Paulo State University - UNESPInstituto Federal de Educação Ciênciae Tecnologia de São Paulo - IFSPFederal Institute of Mato Grosso Do sul IFMSDepartment of Mechatronics and Mechanical Systems Engineering Escola Politècnica da Universidade de São Paulo - EPUSP SPDepartment of Eletrical Engineering Sao Paulo State University - UNESPUniversidade Estadual Paulista (Unesp)Ciênciae Tecnologia de São Paulo - IFSPIFMSUniversidade de São Paulo (USP)Martinez, Guilherme Alves [UNESP]Pereira, Fernando Da CruzGaleti, Jose HenriqueHiguti, Ricardo Tokio [UNESP]Nelli Silva, Emilio CarlosKitano, Claudio [UNESP]2019-10-06T17:04:39Z2019-10-06T17:04:39Z2019-01-25info:eu-repo/semantics/publishedVersioninfo:eu-repo/semantics/conferenceObject1355-1361http://dx.doi.org/10.1109/INDUSCON.2018.86272592018 13th IEEE International Conference on Industry Applications, INDUSCON 2018 - Proceedings, p. 1355-1361.http://hdl.handle.net/11449/19017210.1109/INDUSCON.2018.86272592-s2.0-85062538671640533951088320328834403518951670000-0003-4201-56170000-0001-6320-755XScopusreponame:Repositório Institucional da UNESPinstname:Universidade Estadual Paulista (UNESP)instacron:UNESPeng2018 13th IEEE International Conference on Industry Applications, INDUSCON 2018 - Proceedingsinfo:eu-repo/semantics/openAccess2024-07-04T19:11:55Zoai:repositorio.unesp.br:11449/190172Repositório InstitucionalPUBhttp://repositorio.unesp.br/oai/requestopendoar:29462024-08-05T22:29:23.027325Repositório Institucional da UNESP - Universidade Estadual Paulista (UNESP)false |
dc.title.none.fl_str_mv |
Interferometric characterization of an XY piezoeletric nanopositioner: Linearity9 Hysteresis and frequency response |
title |
Interferometric characterization of an XY piezoeletric nanopositioner: Linearity9 Hysteresis and frequency response |
spellingShingle |
Interferometric characterization of an XY piezoeletric nanopositioner: Linearity9 Hysteresis and frequency response Martinez, Guilherme Alves [UNESP] Inteferometry Metrology Piezoelectric transducer Vibration measurement |
title_short |
Interferometric characterization of an XY piezoeletric nanopositioner: Linearity9 Hysteresis and frequency response |
title_full |
Interferometric characterization of an XY piezoeletric nanopositioner: Linearity9 Hysteresis and frequency response |
title_fullStr |
Interferometric characterization of an XY piezoeletric nanopositioner: Linearity9 Hysteresis and frequency response |
title_full_unstemmed |
Interferometric characterization of an XY piezoeletric nanopositioner: Linearity9 Hysteresis and frequency response |
title_sort |
Interferometric characterization of an XY piezoeletric nanopositioner: Linearity9 Hysteresis and frequency response |
author |
Martinez, Guilherme Alves [UNESP] |
author_facet |
Martinez, Guilherme Alves [UNESP] Pereira, Fernando Da Cruz Galeti, Jose Henrique Higuti, Ricardo Tokio [UNESP] Nelli Silva, Emilio Carlos Kitano, Claudio [UNESP] |
author_role |
author |
author2 |
Pereira, Fernando Da Cruz Galeti, Jose Henrique Higuti, Ricardo Tokio [UNESP] Nelli Silva, Emilio Carlos Kitano, Claudio [UNESP] |
author2_role |
author author author author author |
dc.contributor.none.fl_str_mv |
Universidade Estadual Paulista (Unesp) Ciênciae Tecnologia de São Paulo - IFSP IFMS Universidade de São Paulo (USP) |
dc.contributor.author.fl_str_mv |
Martinez, Guilherme Alves [UNESP] Pereira, Fernando Da Cruz Galeti, Jose Henrique Higuti, Ricardo Tokio [UNESP] Nelli Silva, Emilio Carlos Kitano, Claudio [UNESP] |
dc.subject.por.fl_str_mv |
Inteferometry Metrology Piezoelectric transducer Vibration measurement |
topic |
Inteferometry Metrology Piezoelectric transducer Vibration measurement |
description |
Piezoelectric motors have been considered successors of electromagnetic motors in areas such as robot joints, high precision machines, micro robots, and MEMS (Micro-Electro-Mechanical Systems). The main interest in this work is the investigation of an XY flextensional positioner adapted for future applications as a rotary piezoelectric motor. To perform this task, the mechanical deformation analysis of the actuator structure was evaluated using finite element software. The results obtained with these simulations were validated using an optical phase detection technique using laser interferometry. Information regarding the linearity between applied voltage and generated displacement, hysteresis, frequency response of displacement and mechanical resonances of the actuator were measured between 0 and 3500 Hz. Simulation and experimental results have brought to light many technical issues that will lead to further investigations, helping the improvement the system in future works. |
publishDate |
2019 |
dc.date.none.fl_str_mv |
2019-10-06T17:04:39Z 2019-10-06T17:04:39Z 2019-01-25 |
dc.type.status.fl_str_mv |
info:eu-repo/semantics/publishedVersion |
dc.type.driver.fl_str_mv |
info:eu-repo/semantics/conferenceObject |
format |
conferenceObject |
status_str |
publishedVersion |
dc.identifier.uri.fl_str_mv |
http://dx.doi.org/10.1109/INDUSCON.2018.8627259 2018 13th IEEE International Conference on Industry Applications, INDUSCON 2018 - Proceedings, p. 1355-1361. http://hdl.handle.net/11449/190172 10.1109/INDUSCON.2018.8627259 2-s2.0-85062538671 6405339510883203 2883440351895167 0000-0003-4201-5617 0000-0001-6320-755X |
url |
http://dx.doi.org/10.1109/INDUSCON.2018.8627259 http://hdl.handle.net/11449/190172 |
identifier_str_mv |
2018 13th IEEE International Conference on Industry Applications, INDUSCON 2018 - Proceedings, p. 1355-1361. 10.1109/INDUSCON.2018.8627259 2-s2.0-85062538671 6405339510883203 2883440351895167 0000-0003-4201-5617 0000-0001-6320-755X |
dc.language.iso.fl_str_mv |
eng |
language |
eng |
dc.relation.none.fl_str_mv |
2018 13th IEEE International Conference on Industry Applications, INDUSCON 2018 - Proceedings |
dc.rights.driver.fl_str_mv |
info:eu-repo/semantics/openAccess |
eu_rights_str_mv |
openAccess |
dc.format.none.fl_str_mv |
1355-1361 |
dc.source.none.fl_str_mv |
Scopus reponame:Repositório Institucional da UNESP instname:Universidade Estadual Paulista (UNESP) instacron:UNESP |
instname_str |
Universidade Estadual Paulista (UNESP) |
instacron_str |
UNESP |
institution |
UNESP |
reponame_str |
Repositório Institucional da UNESP |
collection |
Repositório Institucional da UNESP |
repository.name.fl_str_mv |
Repositório Institucional da UNESP - Universidade Estadual Paulista (UNESP) |
repository.mail.fl_str_mv |
|
_version_ |
1808129430891003904 |