Analysis of linearity and frequency response of a novel piezoelectric flextensional actuator using a homodyne interferometer and the J1 - J4 method

Detalhes bibliográficos
Autor(a) principal: Marca̧l, Luiz Antônio Perezi
Data de Publicação: 2007
Outros Autores: Leão, José Vital Ferraz, Nader, Gilder, Higuti, Ricardo Tokio [UNESP], Kitano, Cláudio [UNESP], Silva, Emílio Carlos Nelli
Tipo de documento: Artigo
Idioma: eng
Título da fonte: Repositório Institucional da UNESP
Texto Completo: http://dx.doi.org/10.1109/TIM.2007.894173
http://hdl.handle.net/11449/224908
Resumo: Piezoelectric transducers are widely used in high-resolution positioning systems. This paper reports the experimental analysis of a novel piezoelectric flextensional actuator (PFA), which is designed by using the topology-optimization method through a low-cost homodyne Michelson interferometer. By applying the J1 - J4 method for signal demodulation, which provides a linear and direct measurement of dynamic optical phase shift independent of fading, the nanometric displacements of the PFA were determined. Linearity and frequency response of the PFA were evaluated up to 50 kHz. PFA calibration factor and amplification rate were determined for the PFA operating in the quasi-static regime. To confirm the observed frequencies of resonance, an impedance analyzer is also utilized to measure the magnitude and phase of the PFA admittance. © 2007 IEEE.
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spelling Analysis of linearity and frequency response of a novel piezoelectric flextensional actuator using a homodyne interferometer and the J1 - J4 methodHomodyne optical interferometerNanometric displacement measurementPiezoelectric flextensional actuator (PFA)Piezoelectric transducers are widely used in high-resolution positioning systems. This paper reports the experimental analysis of a novel piezoelectric flextensional actuator (PFA), which is designed by using the topology-optimization method through a low-cost homodyne Michelson interferometer. By applying the J1 - J4 method for signal demodulation, which provides a linear and direct measurement of dynamic optical phase shift independent of fading, the nanometric displacements of the PFA were determined. Linearity and frequency response of the PFA were evaluated up to 50 kHz. PFA calibration factor and amplification rate were determined for the PFA operating in the quasi-static regime. To confirm the observed frequencies of resonance, an impedance analyzer is also utilized to measure the magnitude and phase of the PFA admittance. © 2007 IEEE.Centro Universitário de Rio Preto, Sao Jose do Rio Preto 15025-400Centro Universitário Católico, Lins16401-371Centro Universitário de Lins, LinsInstituto de Pesquisas Tecnológicas, São Paulo 05508-900Department of Electrical Engineering Universidade Estadual Paulista, Ilha Solteira 15385-000Department of Mechatronics and Mechanical Systems Engineering Escola Politécnica da Universidade de São Paulo, São Paulo 05508-900Department of Electrical Engineering Universidade Estadual Paulista, Ilha Solteira 15385-000Centro Universitário de Rio PretoCentro Universitário CatólicoCentro Universitário de LinsInstituto de Pesquisas TecnológicasUniversidade Estadual Paulista (UNESP)Universidade de São Paulo (USP)Marca̧l, Luiz Antônio PereziLeão, José Vital FerrazNader, GilderHiguti, Ricardo Tokio [UNESP]Kitano, Cláudio [UNESP]Silva, Emílio Carlos Nelli2022-04-28T20:17:20Z2022-04-28T20:17:20Z2007-06-01info:eu-repo/semantics/publishedVersioninfo:eu-repo/semantics/article954-961http://dx.doi.org/10.1109/TIM.2007.894173IEEE Transactions on Instrumentation and Measurement, v. 56, n. 3, p. 954-961, 2007.0018-9456http://hdl.handle.net/11449/22490810.1109/TIM.2007.8941732-s2.0-34249026343Scopusreponame:Repositório Institucional da UNESPinstname:Universidade Estadual Paulista (UNESP)instacron:UNESPengIEEE Transactions on Instrumentation and Measurementinfo:eu-repo/semantics/openAccess2022-04-28T20:17:20Zoai:repositorio.unesp.br:11449/224908Repositório InstitucionalPUBhttp://repositorio.unesp.br/oai/requestopendoar:29462022-04-28T20:17:20Repositório Institucional da UNESP - Universidade Estadual Paulista (UNESP)false
dc.title.none.fl_str_mv Analysis of linearity and frequency response of a novel piezoelectric flextensional actuator using a homodyne interferometer and the J1 - J4 method
title Analysis of linearity and frequency response of a novel piezoelectric flextensional actuator using a homodyne interferometer and the J1 - J4 method
spellingShingle Analysis of linearity and frequency response of a novel piezoelectric flextensional actuator using a homodyne interferometer and the J1 - J4 method
Marca̧l, Luiz Antônio Perezi
Homodyne optical interferometer
Nanometric displacement measurement
Piezoelectric flextensional actuator (PFA)
title_short Analysis of linearity and frequency response of a novel piezoelectric flextensional actuator using a homodyne interferometer and the J1 - J4 method
title_full Analysis of linearity and frequency response of a novel piezoelectric flextensional actuator using a homodyne interferometer and the J1 - J4 method
title_fullStr Analysis of linearity and frequency response of a novel piezoelectric flextensional actuator using a homodyne interferometer and the J1 - J4 method
title_full_unstemmed Analysis of linearity and frequency response of a novel piezoelectric flextensional actuator using a homodyne interferometer and the J1 - J4 method
title_sort Analysis of linearity and frequency response of a novel piezoelectric flextensional actuator using a homodyne interferometer and the J1 - J4 method
author Marca̧l, Luiz Antônio Perezi
author_facet Marca̧l, Luiz Antônio Perezi
Leão, José Vital Ferraz
Nader, Gilder
Higuti, Ricardo Tokio [UNESP]
Kitano, Cláudio [UNESP]
Silva, Emílio Carlos Nelli
author_role author
author2 Leão, José Vital Ferraz
Nader, Gilder
Higuti, Ricardo Tokio [UNESP]
Kitano, Cláudio [UNESP]
Silva, Emílio Carlos Nelli
author2_role author
author
author
author
author
dc.contributor.none.fl_str_mv Centro Universitário de Rio Preto
Centro Universitário Católico
Centro Universitário de Lins
Instituto de Pesquisas Tecnológicas
Universidade Estadual Paulista (UNESP)
Universidade de São Paulo (USP)
dc.contributor.author.fl_str_mv Marca̧l, Luiz Antônio Perezi
Leão, José Vital Ferraz
Nader, Gilder
Higuti, Ricardo Tokio [UNESP]
Kitano, Cláudio [UNESP]
Silva, Emílio Carlos Nelli
dc.subject.por.fl_str_mv Homodyne optical interferometer
Nanometric displacement measurement
Piezoelectric flextensional actuator (PFA)
topic Homodyne optical interferometer
Nanometric displacement measurement
Piezoelectric flextensional actuator (PFA)
description Piezoelectric transducers are widely used in high-resolution positioning systems. This paper reports the experimental analysis of a novel piezoelectric flextensional actuator (PFA), which is designed by using the topology-optimization method through a low-cost homodyne Michelson interferometer. By applying the J1 - J4 method for signal demodulation, which provides a linear and direct measurement of dynamic optical phase shift independent of fading, the nanometric displacements of the PFA were determined. Linearity and frequency response of the PFA were evaluated up to 50 kHz. PFA calibration factor and amplification rate were determined for the PFA operating in the quasi-static regime. To confirm the observed frequencies of resonance, an impedance analyzer is also utilized to measure the magnitude and phase of the PFA admittance. © 2007 IEEE.
publishDate 2007
dc.date.none.fl_str_mv 2007-06-01
2022-04-28T20:17:20Z
2022-04-28T20:17:20Z
dc.type.status.fl_str_mv info:eu-repo/semantics/publishedVersion
dc.type.driver.fl_str_mv info:eu-repo/semantics/article
format article
status_str publishedVersion
dc.identifier.uri.fl_str_mv http://dx.doi.org/10.1109/TIM.2007.894173
IEEE Transactions on Instrumentation and Measurement, v. 56, n. 3, p. 954-961, 2007.
0018-9456
http://hdl.handle.net/11449/224908
10.1109/TIM.2007.894173
2-s2.0-34249026343
url http://dx.doi.org/10.1109/TIM.2007.894173
http://hdl.handle.net/11449/224908
identifier_str_mv IEEE Transactions on Instrumentation and Measurement, v. 56, n. 3, p. 954-961, 2007.
0018-9456
10.1109/TIM.2007.894173
2-s2.0-34249026343
dc.language.iso.fl_str_mv eng
language eng
dc.relation.none.fl_str_mv IEEE Transactions on Instrumentation and Measurement
dc.rights.driver.fl_str_mv info:eu-repo/semantics/openAccess
eu_rights_str_mv openAccess
dc.format.none.fl_str_mv 954-961
dc.source.none.fl_str_mv Scopus
reponame:Repositório Institucional da UNESP
instname:Universidade Estadual Paulista (UNESP)
instacron:UNESP
instname_str Universidade Estadual Paulista (UNESP)
instacron_str UNESP
institution UNESP
reponame_str Repositório Institucional da UNESP
collection Repositório Institucional da UNESP
repository.name.fl_str_mv Repositório Institucional da UNESP - Universidade Estadual Paulista (UNESP)
repository.mail.fl_str_mv
_version_ 1803650347998117888

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